Control for coordinate measuring instruments

• US 4,769,763 A
• Filed: 06/16/1986
• Issued: 09/06/1988
• Est. Priority Date: 06/28/1985
• Status: Expired due to Term

• Current Assignee: Carl Zeiss Industrielle Messtechnik GmbH (Carl-Zeiss-Stiftung)
• Original Assignee: Carl-Zeiss-Stiftung
• Inventors: Aubele, Karl-Eugen, Schepperle, Karl, Trieb, Gerhard
• Primary Examiner(s): Lall, Parshotam S.
• Assistant Examiner(s): Mattson, Brian M.
• Application Number:
  US06/874,696
• Time in Patent Office: 813 Days
• Field of Search: 364/559, 364/560, 364/565, 364/506, 364/507, 364/512, 364/472, 364/468, 364/579, 364/580, 33/503-505, 318/574-576
• US Class Current: 702/168
• CPC Class Codes: B82Y 15/00 Nanotechnology for interacting, sensing or actuating, e.g. quantum dots as markers in protein assays or molecular motors
• CPC Class Codes: G05B 19/401 characterised by control arrangements for measuring, e.g. calibration and initialisation, measuring workpiece for machining purposes G05B19/19 takes precedence
• CPC Class Codes: G05B 2219/37193 Multicoordinate measuring system, machine, cmm
• CPC Class Codes: G05B 2219/50134 Tool pushes reference plane, or vice versa, reverse motion until again zero

Abstract

A "scanning" work-contact probe is deflectable with respect to a measuring-machine head which is driven by the three-coordinate drive system of the measuring machine. The arrangement is such that the probe continuously tracks (scans) a desired profile of a workpiece and, in doing so, measured probe increments (decrements) of deflection with respect to the head are so mathematically combined with head-position data that, in the further circumstance of holding path-velocity magnitude |V_des. | of the measuring machine to a constant value, the orientation of the probe head with respect to the locally contacted slope of the workpiece can also be a constant.

Claims

1. A control system for a multi-coordinate measuring machine having an individual drive for each of a plurality of coordinate-component directions, said system comprising:

a velocity-control circuit for each of said drives;

a control unit for simultaneously controlling at least two of said drives;

a scanning probe head movable along a path determined by said drives, said head including a probe pin that is deflectable in each of the coordinate-component directions, and plural measuring transducers for generating separate output signals which are proportional to the respective coordinate-component directions of probe-pin deflection, whereby during driven probe-head displacement with said probe pin in continuous contact with a workpiece, the output signals of said transducers are indicative of the respective component directions of path deviation with respect to workpiece contour;

input means coupled to said control unit for inputting a preselected magnitude |V_des. | of path velocity;

said control unit including calculating means connected to said input means and to said transducers for freshly computing control-path velocity as the vector sum of instantaneous path velocity V₁ and a vector A_e corresponding to the vector sum of said transducer-output signals, with the magnitude of the computed control-path velocity corresponding to said preselected magnitude;

said calculating means having separate output connections supplying velocity-component values to the respective velocity-control circuits; and

force-producing means in said probe head for producing a deflection-independent force of workpiece contact by said probe pin, wherein said force is substantially perpendicular to the instantaneous direction of path velocity.

2. The control system of claim 1, in which said force-producing means comprises moving-coil actuators in the scanning head.

4. The control system of claim 1 or claim 3, wherein said calculating means calculates output signals to said velocity-control circuits in accordance with the following rule of computation:

##EQU3## and in which;

V₁ is the velocity vector before a given change in direction,

V₂ is the velocity vector after the given change in direction,

A_act. is the measured deflection of the scanning pin,

A_des. is a pre-selected reference deflection of the probe pin when in workpiece contact, and

|V_des. | is the pre-selected magnitude of the path velocity.

5. The control system of claim 1 or claim 3, wherein the plurality of machine axes is three, and the plurality of measurement transducers in the scanning head is three, said transducers being respectively oriented for response in three orthogonally related directions in space.

6. A multi-coordinate measuring machine having the control system of claim 1 or claim 3 and having a process computer which is used to control all machine functions, wherein the input means of said control unit is connected to said process computer and wherein said preselected magnitude of path velocity is entered into storage in said process computer as a reference value for said control unit.

7. A multi-coordinate measuring machine having the control system of claim 1 or claim 3, wherein said velocity-control circuits are components of position and velocity control means of the machine, wherein said control unit includes a microprocessor which is connected to the position and velocity control means of the machine.

8. A multi-coordinate measuring machine having the control system of claim 1 or claim 3 and having a process computer which is used to control all machine functions, said system being characterized by the fact that the input means of said control unit is connected to said process computer, and that (a) said preselected magnitude of path velocity and (b) a preselected magnitude of probe-pin deflection normal to instantaneous path direction are separately entered into storage as reference values for said control unit.

9. The control system of claim 1 or claim 3, in which said deflectable probe pin includes a mounted-ball tip for workpiece contact.

3. A control system for a multi-coordinate measuring machine having an individual drive for each of a plurality of coordinate-component directions, said system comprising:

a velocity-control circuit for each of said drives;

a control unit for simultaneously controlling at least two of said drives;

a scanning probe head movable along a path determined by said drives, said head including a probe pin that is deflectable in each of the coordinate-component directions, and plural measuring transducers for generating separate output signals which are proportional to the respective coordinate-component directions of probe-pin deflection, whereby during driven probe-head displacement with said probe pin in continuous contact with a workpiece, the output signals of said transducers are indicative of the respective directions of path-deviation with respect to workpiece contour;

input means coupled to said control unit for inputting a preselected magnitude |V_des. | of path velocity;

said control unit including calculating means connected to said input means and to said transducers for freshly computing control-path velocity as the vector sum of instantaneous path velocity V₁ and a vector A_e corresponding to the vector sum of said transducer-output signals, with the magnitude of the computed control-path velocity corresponding to said preselected magnitude;

said calculating means having separate output connections supplying velocity-component values to the respective velocity-control circuits; and

force-producing means in said probe head for producing a deflection-dependent return force of workpiece contact by said probe pin, said return force being of magnitude proportional to that resulting from deflection of said probe pin.