Apparatus for measuring velocity of flow
First Claim
1. In an apparatus for measuring the velocity of flow of fluids, particularly intake air of internal combustion engines, the apparatus having a support, and an electrically heatable resistance layer which is applied in insulated fashion on the support, the resistance layer being in thermal contact with the flowing fluid, the improvement whereinthe support is made of silicon;
- the apparatus further comprisingfurther layers of low thermal conductivity provided on the resistance layer and on the surface of the support facing away from the resistance layer; and
whereinsaid further layers have a thickness which decreases in the direction of flow.
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Accused Products
Abstract
In an arrangement for measuring the velocity of flow of fluids, and, in particular, of the intake air of internal combustion engines, having an electrically heatable resistance layer which is applied in insulated manner on a support and is in thermal contact with the flowing fluid, the support consists of silicon. Between the support and the resistance layer an electrically insulating layer is applied. The resistance layer consists preferably of suitably doped polycrystalline silicon.
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Citations
9 Claims
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1. In an apparatus for measuring the velocity of flow of fluids, particularly intake air of internal combustion engines, the apparatus having a support, and an electrically heatable resistance layer which is applied in insulated fashion on the support, the resistance layer being in thermal contact with the flowing fluid, the improvement wherein
the support is made of silicon; - the apparatus further comprising
further layers of low thermal conductivity provided on the resistance layer and on the surface of the support facing away from the resistance layer; and
whereinsaid further layers have a thickness which decreases in the direction of flow. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8)
- the apparatus further comprising
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9. In an apparatus for measuring the velocity of flow of fluids, particularly intake air of internal-combustion engines, the apparatus having a support and an electrically heatable resistance layer which is applied in insulated fashion on the support, the resistance layer being in thermal contact with the flowing fluid, the improvement wherein
the support is made of silicon; - the apparatus further comprising
an electrically insulating layer applied between the support and the resistance layer; and further layers of low thermal conductivity provided on the resistance layer and on the surface of the support facing away from the resistance layer, and wherein said further layers have a thickness which decreases in the direction of flow.
- the apparatus further comprising
Specification