System for automatic inspection of periodic patterns

• US 4,771,468 A
• Filed: 04/17/1986
• Issued: 09/13/1988
• Est. Priority Date: 04/17/1986
• Status: Expired due to Term

• Current Assignee: International Business Machines Corporation
• Original Assignee: International Business Machines Corporation
• Inventors: Dom, Byron E., Batchelder, John S., Jaffe, Robert S., Bonner, Raymond E.
• Primary Examiner(s): Boudreau, Leo H.
• Application Number:
  US06/853,100
• Time in Patent Office: 880 Days
• Field of Search: 382/8, 382/27, 382/50, 358/106, 356/237
• US Class Current: 382/149
• CPC Class Codes: G03F 7/7065 Defects, e.g. optical inspection of patterned layer for defects
• CPC Class Codes: G06T 2207/30141 Printed circuit board [PCB]
• CPC Class Codes: G06T 2207/30148 Semiconductor; IC; Wafer
• CPC Class Codes: G06T 7/001 using an image reference approach

Abstract

A method and apparatus for automatic inspection of periodic patterns typically found on patterned silicon wafers, printed circuit board, and the like is disclosed herein. The method comprises an inspection algorithm of two parts: a low-level algorithm and a higher level algorithm which includes, therein the operation of the low-level algorithm. The low-level algorithm utilizes the known periodicity of the pattern to find defects by comparing identical cells in the periodic array. The high-level algorithm comprises applying the low-level algorithm, some number of times (N) in succession on the image. An accumulator image is formed by adding the results of the low-level algorithm to create a separate image array where the pixels relate to the number of times that the pixel in the original image was detected as defective by the low-level algorithm.

The apparatus for implementing the above method comprises a parallel/pipeline architecture for high speed processing and RAM LUT'"'"'s to implement a plurality of subtract and compare functions.

Claims

1. In a system for automatic inspection of two dimensional periodic patterns on printed circuit boards, photolithographic masks, pattern semiconductor wafers and the like wherein said pattern is scanned by image producing means such that digital images of the same optical image pattern is acquired some predetermined number of times, N, and greyscale value is assigned to said pixels so that greyscale values of the pixels in one pattern can be compared to the greyscale values of the respective pixels a repetition period away, the improvement to said inspection system comprising;

(a) establishing three neighborhoods of pixel greyscale values a repetition period away in either direction from a center designated neigborhood;

(b) comparing said neighborhoods to said center designated neighborhood to test said respective pixels as being blacker than or whiter than said center pixels by comparing selected predetermined pixels of the neighborhoods to selected predetermined pixels of said center neighborhood by a high sensitivity comparision test, a horizontal row test, a vertical row test and missing pattern test wherein the high sensitivity comparison test comprises;

(i) a difference test wherein one of the neighboring pixel groups to the central pixel are compared to said central pixel and a first preset threshold, and

(ii) a gradient test wherein the center pixel of the neighbor is compared to its connected neighbors and a second preset threshold;

(c) labelling by binary code to identify a neighbor as being blacker than or whiter that its respective center neighbor whereby a suspected defect pixel is a center pixel either blacker than or whiter than both of its respective said neighborhoods, and

(d) accumulating said labelled by binary code neighbors.

2. In a system for automatic inspection of two dimensional periodic patterns on printed circuit boards, photolithographic masks, pattern semiconductor wafers and the like wherein said pattern is scanned by image producing means such that digital images of the same optical image pattern is acquired some predetermined number of times, N, and a greyscale value is assigned to said pixels so that greyscale values of the pixels in one pattern can be compared to the greyscale values of the respective pixels a repetition period away, the improvement to said inspection system comprising;

(a) establishing three neighborhoods of pixel greyscale values a repetition period away in either direction from a center designated neighborhood;

(b) comparing said neighborhoods to said center designated neighborhood to test said respective pixels as being blacker than or whiter than said center pixels by comparing selected predetermined pixels of the neighborhoods to selected predetermined pixels of said center neighborhood by a high sensitivity comparison test, a horizontal row test, a vertical row test and missing pattern test wherein the horizontal row test comprises;

(i) a side row test comparing each of the pixels in a horizontal row of the neighboring pixel group to the central pixel and

(ii) a central row test wherein the central pixel of the center neighborhood is compared to its horizontal row connected neighbors;

(c) labelling by binary code to identify a neighbor as being blacker than or whiter that its respective center neighbor whereby a suspected defect pixel is a center pixel either blacker than or whiter than both of its respective said neighborhoods, and

(d) accumulating said labelled by binary code neighbors.

3. In a system for automatic inspection of two dimensional periodic patterns on printed circuit boards, photolithographic masks, pattern semiconductor wafers and the like wherein said pattern is scanned by image producing means such that digital images of the same optical image pattern is acquired some predetermined number of times, N, and a greyscale value is assigned to said pixels so that greyscale values of the pixels in one pattern can be compared to the greyscale values of the respective pixels a repetition period away, the improvement to said inspection system comprising;

(a) establishing three neighborhoods of pixel greyscale values a repetition period away in either direction from a center designated neighborhood

(b) comparing said neighborhoods to said center designated neighborhood to test said respective pixels as being blacker than or whiter than said center pixels by comparing selected predetermined pixels of the neighborhood to selected predetermined pixels of said center neighborhood by a high sensitivity comparision test, a horizontal row test, a vertical row test and missing pattern test wherein the vertical row test comprises;

(i) a side row test comparing each of the pixels in a vertical row of the neighboring pixel group to the central pixel and

(ii) a central row test wherein the central pixel of the center neighborhood is compared to its vertical row connected neighbors;

(c) labelling by binary code to identify a neighbor as being blacker than or whiter that its respective center neighbor whereby a suspected defect pixel is a center pixel either blacker than or whiter than both of its respective said neighborhoods, and

(d) accumulating said labelled by binary code neighbors.

4. In a system for automatic inspection of two dimensional periodic patterns on printed circuit boards, photolithographic masks, pattern semiconductor wafers and the like wherein said pattern is scanned by image producing means such that digital images of the same optical image pattern is acquired some predetermined nubmer of times, N, and a greyscale value is assigned to said pixels so that greyscale values of the pixels in one pattern can be compared to the greyscale values of the respective pixels a repetition period away, the improvement to said inspection system comprising;

(a) establishing three neighborhoods of pixel greyscale values a repetition period away in either direction from a center designated neighborhood;

(b) comparing said neighborhoods to said center designated neighborhood to test said respective pixels as being blacker than or whiter than said center pixels by comparing selected predetermined pixels of the neighborhood to selected predetermined pixels of said center neighborhood by a high sensitivity comparision test, a horizontal row test, a vertical row test and missing pattern test wherein the missing pattern test comprises comparing the left and right neighbors of the central pixel for a predetermined number of horizontally consecutive blacker than pixel results, netting a counter to mark each blacker than result and comparing said counter result to a preset threshold such that a missing pattern is indicated if the counter value is greater than or equal to the threshold;

(c) labelling by binary code to identify a neighbor as being blacker than or whiter that its respective center neighbor whereby a suspected defect pixel is a center pixel either blacker than or whiter than both of its respective said neighborhoods, and

(d) accumulating said labelled by binary code neighbors.

5. In a system for automatic inspection of two dimensional periodic patterns on a printed circuit boards, photolithographic masks, pattern semiconductor wafers and the like wherein said pattern is scanned by image producing means such that digital images of the same optical image pattern is acquired some predetermined number of times, N, and a greyscale value is assigned to said pixels so that greyscale values of the pixels in one pattern can be compared to the greyscale values of the respective pixels a repetition period away, the improvement to said inspection system comprising:

(a) means for establishing three neighborhoods of pixel greyscale values a repetition period away in either direction from a center designated neighborhood;

(b) means for comparing said neighborhoods to said center designated neighborhood to test said respective pixels as being blacker than or whiter than said center pixels by providing more than one pixel in parallel to a routing network that routes the values to the inputs of subtract and compare units, wherein said routing network multiplexes said pixels provided in parallel to create a predetermined number of greyscale values to be routed to the subtract and compare units and all pixel values (delay line taps) to be compared with the central pixel (Co) are multiplexed with one set of bus address lines and the central pixel tap is multiplexed with a second set of bus address lines;

(c) means for labelling by binary code to identify a neighbor as being blacker than or whiter than its respective center neighbor, and

(d) means for accumulating said respective labelled by binary code neighbors.

6. A system according to claim 5 wherein the central pixels of the left and right neighborhoods are multiplexed once with the set of address lines corresponding to values to be compared with the central pixel, CO, and once with the set corresponding to the central pixel itself.

7. A system according to claim 6 wherein the subtract-and-compare units comprise LUT RAMS programmed via the bus data lines, by having each data line correspond to a different LUT pattern and fanning each data line out to all the LUTs of its corresponding type.

8. A system according to claim 7 wherein the LUT RAMS are programmed via the bus address and data lines by stepping through all possible combinations of the two greyscale input values on the address lines and writing the correct data bits to all the LUTs simultaneously by writing a single word to the bus.