Hall sensor with integrated pole pieces
First Claim
Patent Images
1. A Hall-effect magnetic-field sensor including integrated pole pieces comprising:
- (a) a semiconductor die;
(b) a basic Hall element being formed in said semiconductor die at one surface thereof and being of the kind having a thin body with two sensing contact regions at opposite edges thereof;
(c) a basic trench formed in the opposite surface of said die adjacent an inner-die portion of said Hall element;
(d) a first layer of a high magnetic permeability material over said one surface of said die overlying said basic Hall element; and
(e) a second layer of a high magnetic permeability material over said opposite die surface extending into said basic trench and lying adjacent to said inner-die portion of said basic Hall element, said first and second layers serving as two pole pieces intimately sandwiching said basic Hall element.
2 Assignments
0 Petitions
Accused Products
Abstract
A Hall element is formed in one surface of a silicon die. A trench is etched away in the opposite die surface in a region adjacent the Hall element. An insulating silicon dioxide is grown on both surfaces and a layer of ferromagnetic metal is deposited on both surfaces to form a pair of pole pieces intimately integrated with the Hall element.
146 Citations
9 Claims
-
1. A Hall-effect magnetic-field sensor including integrated pole pieces comprising:
-
(a) a semiconductor die; (b) a basic Hall element being formed in said semiconductor die at one surface thereof and being of the kind having a thin body with two sensing contact regions at opposite edges thereof; (c) a basic trench formed in the opposite surface of said die adjacent an inner-die portion of said Hall element; (d) a first layer of a high magnetic permeability material over said one surface of said die overlying said basic Hall element; and (e) a second layer of a high magnetic permeability material over said opposite die surface extending into said basic trench and lying adjacent to said inner-die portion of said basic Hall element, said first and second layers serving as two pole pieces intimately sandwiching said basic Hall element. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9)
-
Specification