Method and article for a nearly zero temperature coefficient pressure transducer
First Claim
1. A capacitance pressure transducer having dimensions which change in response to an elastic deformation caused by the application of an external pressure, said transducer comprising a material characterized by a dominant elastic modulus which causes the capacitance of said transducer to change with pressure, said dominant elastic modulus having a temperature coefficient that is small in magnitude, such that the thermal stability of said transducer under pressure is improved and the variation of capacitance with temperature is reduced as an external pressure is applied to said transducer.
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Abstract
A method and the resulting article for providing a nearly zero temperature coefficient pressure transducer preferably comprising a cylindrical capacitor whose capacitance is a function of both externally applied pressure and, undesirably, of temperature. The variation of capacitance with temperature may be greatly minimized by selectively choosing a transducer material characterized by particular parameter constants such that the temperature coefficient of Young'"'"'s modulus (αE) is equal in magnitude but opposite in sign to the temperature coefficient of linear expansion (αl). Moreover, the thermal variation of capacitance can be further minimized by selectively choosing a transducer material whose temperature coefficient of linear expansion and of Young'"'"'s modulus are nearly zero. Fabricating a capacitance pressure transducer from materials characterized by αE and αl which are both equal and opposite in sign and/or very small in magnitude will greatly reduce the high pressure, temperature sensitivity of the transducer, especially when compared with the temperature sensitivity under pressure characteristics of conventional fused quartz pressure transducers.
49 Citations
14 Claims
- 1. A capacitance pressure transducer having dimensions which change in response to an elastic deformation caused by the application of an external pressure, said transducer comprising a material characterized by a dominant elastic modulus which causes the capacitance of said transducer to change with pressure, said dominant elastic modulus having a temperature coefficient that is small in magnitude, such that the thermal stability of said transducer under pressure is improved and the variation of capacitance with temperature is reduced as an external pressure is applied to said transducer.
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9. A capacitance pressure transducer by which to improve thermal stability and reduce the variation of capacitance with temperature under an external pressure, said transducer comprising a material characterized by a temperature coefficient of linear expansion (α
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l) which is approximately equal in magnitude but opposite in sign to the temperature coefficient of Young'"'"'s modulus (α
E). - View Dependent Claims (10, 11, 12, 13, 14)
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l) which is approximately equal in magnitude but opposite in sign to the temperature coefficient of Young'"'"'s modulus (α
Specification