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Method and article for a nearly zero temperature coefficient pressure transducer

  • US 4,772,983 A
  • Filed: 04/20/1987
  • Issued: 09/20/1988
  • Est. Priority Date: 04/20/1987
  • Status: Expired due to Term
First Claim
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1. A capacitance pressure transducer having dimensions which change in response to an elastic deformation caused by the application of an external pressure, said transducer comprising a material characterized by a dominant elastic modulus which causes the capacitance of said transducer to change with pressure, said dominant elastic modulus having a temperature coefficient that is small in magnitude, such that the thermal stability of said transducer under pressure is improved and the variation of capacitance with temperature is reduced as an external pressure is applied to said transducer.

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