Diaphragm for use in condenser microphone type detector

• US 4,776,019 A
• Filed: 05/13/1987
• Issued: 10/04/1988
• Est. Priority Date: 05/31/1986
• Status: Expired due to Fees

• Current Assignee: Horiba Limited
• Original Assignee: Horiba Limited
• Inventors: Miyatake, Kimio
• Primary Examiner(s): Hix, L. T.
• Assistant Examiner(s): Brown, Brian W.
• Application Number:
  US07/049,146
• Time in Patent Office: 510 Days
• Field of Search: 381/168, 381/174, 381/191, 381/202, 381/203, 181/157, 181/158, 250/343, 250/344
• US Class Current: 381/174
• CPC Class Codes: G01D 5/2417 by varying separation
• CPC Class Codes: G01L 9/0044 Constructional details of non-semiconductive diaphragms
• CPC Class Codes: G01L 9/0072 using variations in capacitance

Abstract

A diaphragm for use as a pressure receiving and dislocatable member in a condenser-type microphone detector. The diaphragm electrode is a thin metallic film member having a central movable portion, a supporting frame portion around the outside of and spaced from the central movable portion, and at least three supporting spring portions at equal intervals around the periphery of the central movable portion and connected between the central movable portion and the supporting frame portion for permitting the central movable portion to be moved out of the plane of the supporting frame portion by differential pressure across the opposite sides of the central movable portion. The central movable portions can have holes therein for partly relieving the pressure thereon.

Claims

1. A diaphragm for use as a pressure receiving and dislocatable member in a condenser-type microphone detector, comprising:

a thin metallic film member having;

a central movable portion;

a supporting frame portion around the outside of and spaced from said central movable portion; and

at least three supporting spring portions at equal intervals around the periphery of said central movable portion and connected between said central movable portion and said supporting frame portion for permitting said central movable portion to be moved out of the plane of said supporting frame portion by differential pressure across the opposite sides of said central movable portion.

2. A diaphragm as claimed in claim 1 in which said central movable portion has a square shape.

3. A diaphragm as claimed in claim 1 in which said central movable portion has triangular shape.

4. A diaphragm as claimed in claim 1 in which said central movable portion has a circular shape.

5. A diaphragm as claimed in claim 1 in which said central movable portion has a plurality of holes therethrough.

6. A diaphragm as claimed in claim 1 in which said spring portions are each a flat zig-zag spring.

7. A diaphragm as claimed in claim 1 in which said spring portions are each a flat double zig-zag spring.

8. A condenser-type microphone detector for sensing a pressure differential, comprising:

a first electrode supporting base having an opening therein for receiving pressure from a first pressure source, and an electrode formed of a thin metallic sheet and mounted on said first electrode supporting base and having a plurality of holes therein having a central movable portion, a supporting frame portion around the outside of and spaced from said central movable portion and attached to said first electrode supporting base for mounting said electrode thereon, and at least three supporting spring portions at equal intervals around said central movable portion and connected between said central movable portion and said supporting frame portion for permitting said central movable portion to be moved out of the plane of said supporting frame portion by differfential pressure across opposite sides of said central movable portion;

a second electrode supporting base having an opening therein for receiving pressure from a second pressure source, and a further electrode formed of a further thin metallic sheet and mounted on said second electrode suppoting base and having a further central movable portion in spaced opposed relation to said central movable portion, a further supporting frame portion around the outside of and spaced from said further central movable portion and attached to said second electrode supporting base for mounting said further electrode thereon, and at least three further supporting spring portions at equal intervals around said further central movable portion and connected between said further central movable portion and said further supporting frame portion for permitting said further central movable portion to be moved out of the plane of said further supporting frame portion by differential pressure across opposite sides of said further central movable portion; and

a spacer between said two electrodes for maintaining the spacing therebetween, whereby when said detector is disturbed by vibrations, said electrodes can move together for accurately detecting the pressure differential.