Optical measuring device using a spectral modulation sensor having an optically resonant structure

• US 4,778,987 A
• Filed: 10/03/1986
• Issued: 10/18/1988
• Est. Priority Date: 07/06/1984
• Status: Expired due to Fees

• Current Assignee: Photonetics Inc.
• Original Assignee: MetriCor, Inc. (Constellation Software Incorporated)
• Inventors: Saaski, Elric W., Hartl, James C.
• Primary Examiner(s): Nelms, David C.
• Application Number:
  US06/914,882
• Time in Patent Office: 746 Days
• Field of Search: 250/226, 250/227, 250/231 R, 250/231 D, 73/705, 73/717, 73/722, 356/352, 374/161, 374/162
• US Class Current: 250/226
• CPC Class Codes: G01D 5/268 using optical fibres G01D5/28 - G01D5/38 take precedence
• CPC Class Codes: G01J 3/26 using multiple reflection, e.g. Fabry-Perot interferometer, variable interference filters
• CPC Class Codes: G01K 11/12 using changes in colour, translucency or reflectance
• CPC Class Codes: G01L 9/0079 with Fabry-Perot arrangements
• CPC Class Codes: G01N 2021/0385 Diffusing membrane; Semipermeable membrane
• CPC Class Codes: G01N 2021/772 Tip coated light guide
• CPC Class Codes: G01N 21/45 using interferometric methods; using Schlieren methods
• CPC Class Codes: G01N 21/75 Systems in which material is subjected to a chemical reaction, the progress or the result of the reaction being investigated systems in which material is burnt in a flame or plasma G01N21/72, G01N21/73
• CPC Class Codes: G01N 21/7703 using reagent-clad optical fibres or optical waveguides using measurement of total internal reflection or attenuated total reflection G01N21/552; optical fibres or waveguides per se G02B
• CPC Class Codes: G01N 21/7746 the waveguide coupled to a cavity resonator
• CPC Class Codes: G01N 21/80 Indicating pH value
• CPC Class Codes: G01N 21/81 Indicating humidity

Abstract

Physical changes induced in the spectral modulation sensor'"'"'s optically resonant structure by the physical parameter being measured cause microshifts of its reflectivity and transmission curves, and of the selected operating segment(s) thereof being used, as a function of the physical parameter being measured. The operating segments have a maximum length and a maximum microshift of less than about one resonance cycle in length for unambiguous output from the sensor. The input measuring light wavelength(s) are selected to fall within the operating segment(s) over the range of values of interest for the physical parameter being measured. The output light from the sensor'"'"'s optically resonant structure is spectrally modulated by the optically resonant structure as a function of the physical parameter being measured. The spectrally modulated output light is then converted into analog electrical measuring output signals by detection means. In one form, a single optical fiber carries both input light to and output light from the optically resonant structure. When more than one input measuring light wavelength is used, means may also be provided to divide the input light wavelengths into two portions and then take the ratio thereof. This provides several advantages simultaneously, such as enabling longer operating segments and microshifts to be used for greater sensitivity or detection range, and also eliminates certain errors caused by fluctuations in input light intensity or by changes in light intensity caused by optical fiber bending and optical fiber connectors.

Claims

1. An optical measuring device for measuring a range of values for a sensed physical parameter, wherein said optical measuring device comprises:

light source means for emitting input measuring light of at least two wavelengths;

optically resonant structure means;

detection means; and

light transmission means;

wherein said optically resonant structure means has a reflectivity curve and a transmission curve, and has at least one operating segment on at least one of said reflectivity curve and said transmission curve;

wherein said optically resonant structure means has an optically sensitive physical characteristic which changes as a function of said sensed physical parameter;

wherein said changes of said optically sensitive physical characteristic microshift said at least one operating segment as a function of said sensed physical parameter;

wherein said optically resonant structure means are for spectrally modulated said input measuring light as a function of said microshifts to produce spectrally modulated output light which is spectrally modulated as a function of said sensed physical parameter;

wherein said at least one operating segment is selected to be less than about one resonance cycle in length for said range of values for said sensed physical parameter;

wherein said at least one operating segment is microshifted less than about one resonance cycle over said range of values for said sensed physical parameter;

wherein said wavelengths of said input measuring light are selected to fall at least substantially within said at least one operating segment over said range of values for said sensed physical parameter;

wherein said at least one operating segment and said wavelengths of said input measuring light are selected such that over said range of values for said sensed physical parameter said spectrally modulated output light bears a unique one-to-one relationship to said sensed physical parameter;

wherein said light transmission means are for conveying said input measuring light from said light source means to said optically resonant structure means and for conveying said spectrally modulated output light from said optically resonant structure means to said detection means;

wherein said detection means are for deriving two electrical signals corresponding to any two different wavelength portions of said spectrally modulated output light; and

are for taking the ratio of said two electrical signals to provide an output measuring electrical signal which is a function of said sensed physical parameter, to null errors in the measurement of the sensed physical parameter and to help to maximize both the useable length and the useable microshift of said at least one operating segment over said range of values for said sensed physical parameter;

wherein said optically resonant structure means are for sensing the refractive index of a sensed fluid to measure and monitor at least one of said sensed fluid'"'"'s density, composition, mixture composition and solute concentration;

wherein said optically resonant structure means comprises a body defining a cavity having a pair of opposed reflective surfaces;

wherein said body further defines opening means for permitting said sensed fluid to enter said cavity from outside of said optically resonant structure means; and

wherein said optically sensitive physical characteristic is said index of refraction of said sensed fluid located within said cavity between said pair of opposed reflective surfaces.

2. An optical measuring device according to claim 1, wherein said body comprises a substrate and a cover at least one of which defines said cavity;

wherein a first one of said pair of opposed reflective surfaces is a surface of said substrate facing said cover across said cavity; and

wherein a second one of said opposed reflective surfaces is a surface of said cover facing said substrate across said cavity.

3. An optical measuring device according to claim 2, wherein a face of said substrate defines an elongated microchannel;

wherein said cover overlies at least a portion of said microchannel;

wherein said cavity is defined between said substrate and said cover, and comprises at least a portion of said microchannel;

wherein one of said opposed reflective surfaces comprises a portion of a bottom of said microchannel; and

wherein said microchannel extends outwardly from said cavity to at least a first edge of said cover to form said opening means for permitting said sensed fluid to enter said cavity from outside of said optically resonant structure means.

4. An optical measuring device according to claim 3, wherein said opening means are located adjacent said cavity to minimize the distance between said opening means and said cavity, to thereby minimize the amount of time it takes said sensed fluid to enter said cavity, to thereby minimize the response time of said optically resonant structure means to said sensed fluid.

5. An optical measuring device according to claim 3, wherein said microchannel in said substrate extends outwardly in at least two different directions from said cavity to said first edge of said cover and to a second edge of said cover, to form a first and a second said opening means to permit said sensed fluid to enter said cavity via said first opening means and to leave said cavity via said second opening means.

6. An optical measuring device according to claim 3, wherein said body further comprises at least one filter comb structure means, comprising a plurality of filter elements, for helping to prevent undesired foreign matter from entering said cavity along with said sensed fluid;

and

wherein said at least one filter comb structure means is located at least substantially in said microchannel between said opening means and said cavity, and wherein said filter comb structure means extends at least substantially between said bottom of said microchannel and said cover.

7. An optical measuring device according to claim 6, wherein said opening means are located adjacent said at least one filter comb structure means;

and

wherein said at least one filter comb structure means are, in turn, located adjacent said cavity, to minimize the distance between said opening means and said cavity, to thereby minimize the amount of time it takes said sensed fluid to enter said cavity, to thereby minimize the response time of said optically resonant structure means to said sensed fluid.

8. An optical measuring device according to claim 6, wherein at least some of said filter elements are integrally formed as part of at least one of said substrate and said cover.

9. An optical measuring device according to claim 1, wherein said input measuring light has a bandwidth in the range of from about 1% to about 200% of the bandwidth of a resonance cycle containing said at least one operating segment.

10. An optical measuring device according to claim 1, wherein said input measuring light has a bandwidth in the range of from about 10% to about 110% of the bandwidth of a resonance cycle containing said at least one operating segment.

11. An optical measuring device according to claim 1, wherein said at least two wavelengths of said input measuring light are selected such that a wavelength separation between said at least two wavelengths is in the range of from less than about 0.1% to about 100% of the bandwidth of a resonance cycle containing said at least one operating segment.

12. An optical measuring device according to claim 1, wherein said at least two wavelengths of said input measuring light are selected such that a wavelength separation between said at least two wavelengths is a multiple of about 50% of the bandwidth of a resonance cycle containing said at least one operating segment.

13. An optical measuring device according to claim 2, wherein said substrate and said light transmission means are at least substantially index matched.

14. An optical measuring device according to claim 13, wherein to help index match said substrate to said light transmission means, said substrate is selected to be made from borosilicate glass.

15. An optical measuring device according to claim 2, wherein said substrate has a thickness;

and wherein to improve the sensitivity of said optically resonant structure, said thickness of said substrate is selected to be about equal to a diameter of said light transmission means.

16. An optical measuring device according to claim 2, wherein said body has an outer surface exposed to the environment;

wherein to help prevent light transmitted through said optically resonant structure into said cover from reentering said optically resonant structure from said cover, and to help prevent external light from entering said optically resonant structure through said outer surface of said body, said outer surface of said body is at least substantially covered by a coating structure;

wherein said coating structure is highly absorptive and non-reflective with respect to said wavelengths of said input measuring light;

wherein said coating structure comprises at least two alternating layer;

wherein each said layer comprises a different material; and

wherein each said layer has a thickness which is substantially less than a shortest wavelength of said input measuring light.

17. An optical measuring device according to claim 16, wherein said at least two alternating layers comprise a layer of chrome about 25 Angstroms thick and a layer of silicon about 100 Angstroms thick.

18. A spectral modulation sensor for sensing a range of values for a sensed physical parameter;

wherein said spectral modulation sensor comprises and optically resonant structure means;

wherein said optically resonant structure means is adapted to receive input measuring light of at least one wave length from a light source means via a light transmission means;

wherein said optically resonant structure means has a reflectively curve and a transmission curve, and has at least one operating segment on at least one of said reflectivity curve and said transmission curve;

wherein said optically resonant structure has an optically sensitive physical characteristic which changes as a function of said sensed physical parameter;

wherein said changes of said optically sensitive physical characteristic microshift said at least one operating segment as a function of said sensed physical parameter;

wherein said optically resonant structure means are for spectrally modulating said input measuring light as a function of said microshifts to produce spectrally modulated output light which is spectrally modulated as a function of said sensed physical parameter;

wherein said at least one operating segment is selected to be less than about one resonance cycle in length for said range of values for said sensed physical parameter;

wherein said at least one operating segment is microshifted less than about one resonance cycle over said range of values for said sensed physical parameter;

wherein said at least one wavelength of said input measuring light is selected to fall at least substantially within said at least one operating segment over said range of values for said sensed physical parameter;

wherein said at least one operating segment and said at least one wavelength of said input measuring light are selected such that over said range of values for said sensed physical parameter said spectrally modulated output light bears a unique one-to-one relationship to said sensed physical parameter;

wherein said optically resonant structure means are for sensing the refractive index of a sensed fluid to measure and monitor at least one of said sensed fluid'"'"'s density, composition, mixture composition, and solute concentration;

wherein said optically resonant structure means comprises a body defining a cavity having a pair of opposed reflective surfaces;

wherein said body further defines opening means for permitting said sensed fluid to enter said cavity from outside of said optically resonant structure means; and

wherein said optically sensitive physical characteristic is said index of refraction of said sensed fluid located within said cavity between said pair of opposed reflective surfaces.

19. A spectral modulation sensor according to claim 18, wherein said body comprises a substrate and a cover, at least one of which defines said cavity;

wherein a first one of said pair of opposed reflective surfaces is a surface of said substrate facing said cover across said cavity; and

wherein a second one of said opposed reflective surfaces is a surface of said cover facing said substrate across said cavity.

20. A spectral modulation sensor according to claim 19, wherein a face of said substrate defines an elongated microchannel;

wherein said cover overlies at least a portion of said microchannel;

wherein said cavity is defined between said substrate and said cover, and comprises at least a portion of said microchannel;

wherein one of said opposed reflective surfaces comprises a portion of a bottom of said microchannel; and

wherein said microchannel extends outwardly from said cavity to at least a first edge of said cover to form said opening means for permitting said sensed fluid to enter said cavity from outside of said optically resonant structure means.

21. A spectral modulation sensor according to claim 20, wherein said opening means are located adjacent said cavity to minimize the distance between said opening means and said cavity, to thereby minimize the amount of time it takes said sensed fluid to enter said cavity, to thereby minimize the response time of said optically resonant structure means to said sensed fluid.

22. A spectral modulation sensor according to claim 20, wherein said microchannel in said substrate extends outwardly in at least two different directions from said cavity to said first edge of said cover and to a second edge of said cover, to form a first and a second said opening means to permit said sensed chemical to enter said cavity via said first opening means and to leave said cavity via said second opening means.

23. A spectral modulation sensor according to claim 20, wherein said body further comprises at least one filter comb structure means, comprising a plurality of filter elements, for helping to prevent undesired foreign matter from entering said cavity along with said sensed fluid;

and

wherein said at least one filter comb structure means is located at least substantially in said elongated microchannel between said opening means and said cavity, and wherein said filter comb structure means extends at least substantially between said bottom of said microchannel and said cover.

24. A spectral modulation sensor according to claim 23, wherein said opening means are located adjacent said at least one filter comb structure means;

and

wherein said at least one filter comb structure means are, in turn, located adjacent said cavity, to minimize the distance between said opening means and said cavity, to thereby minimize the amount of time it takes said sensed fluid to enter said cavity, to thereby minimize the response time of said optically resonant structure means to said sensed fluid.

25. A spectral modulation sensor according to claim 23, wherein at least some of said filter elements are integrally formed as part of at least one of said substrate and said cover.

26. A spectral modulation sensor according to claim 19, wherein said substrate and said light transmission means are at least substantially index matched.

27. A spectral modulation sensor according to claim 26, wherein to help index match said substrate to said light transmission means, said substrate is selected to be made from borosilicate glass.

28. A spectral modulation sensor according to claim 19, wherein said substrate has a thickness;

and wherein to improve the sensitivity of said optically resonant structure, said thickness of said substrate is selected to be about equal to a diameter of said light transmission means.

29. A spectral modulation sensor according to claim 19, wherein said body has an outer surface exposed to the environment;

wherein to help prevent light transmitted through said optically resonant structure into said cover from reentering said optically resonant structure from said cover, and to help prevent external light from entering said optically resonant structure through said outer surface of said body, said outer surface of said body is at least substantially covered by a coating structure;

wherein said coating structure is highly absorptive and non-reflective with respect to said wavelengths of said input measuring light;

wherein said coating structure comprises at least two alternating layers;

wherein each said layer comprises a different material; and

wherein each said layer has a thickness which is substantially less than a shortest wavelength of said input measuring light.

30. A spectral modulation sensor according to claim 29, wherein said at least two alternating layers comprise a layer of chrome about 25 Angstroms thick and a layer of silicon about 100 Angstroms thick.