Method and apparatus for controlling electrostatic charges in fluidized beds
First Claim
Patent Images
1. A fluidized bed device for thermal operations on a workpiece adapted to minimize electrostatic charge comprising:
- at least one enclosure having means for expanding a mass of solid particles therein, said enclosure having a means for supporting a workpiece disposed therein comprising a basket means, having surfaces adapted to allow the passage of fluidized particles to pass therethrough;
said surfaces being in electrical communication with an electrical ground;
a mass of solid particles within the enclosure, at least some of said particles selected from the group consisting of electrically conductive and semi-conductive materials;
means for contacting the expanded mass with the conductive surfaces; and
means for controlling the temperature within said enclosure.
1 Assignment
0 Petitions
Accused Products
Abstract
A fluidized bed method and apparatus involving a grounded electrically conductive bed for controlling or eliminating electrostatic charges therein and high surface area charge dissipators.
-
Citations
15 Claims
-
1. A fluidized bed device for thermal operations on a workpiece adapted to minimize electrostatic charge comprising:
-
at least one enclosure having means for expanding a mass of solid particles therein, said enclosure having a means for supporting a workpiece disposed therein comprising a basket means, having surfaces adapted to allow the passage of fluidized particles to pass therethrough;
said surfaces being in electrical communication with an electrical ground;a mass of solid particles within the enclosure, at least some of said particles selected from the group consisting of electrically conductive and semi-conductive materials; means for contacting the expanded mass with the conductive surfaces; and means for controlling the temperature within said enclosure. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11)
-
-
12. A device for thermal testing, which comprises:
-
a first and second enclosure each having means for producing an expanded mass of solid particles therein including at least some particles selected from the group consisting of conductive and semi-conductive materials; support means for supporting a workplace within said enclosures; means for adjusting the temperature in each enclosure; means for contacting the expanded mass in each enclosure with electrical ground; and
electromechanical means for transporting the support means between the first and second enclosure. - View Dependent Claims (13)
-
-
14. A fluidized bed device, which comprises:
-
at least one enclosure having means for producing an expanded mass of solid particles therein including at least some particles selected from the group consisting of conductive and semi-conductive materials; means for contacting the expanded mass with electrical ground; and means for controlling the temperature within said enclosure, wherein an electrically conductive means for supporting a workpiece comprises a wire basket comprising a plurality of intermeshed wires surrounding a workpiece, adapted to allow the passage of fluidized particles to pass therethrough;
further comprising a plurality of dissipators mounted on the means for supporting a workpiece in order to dissipate static charges in the vicinity of the workpiece and a plurality of dissipators mounted within the enclosure in electrical communication with the walls of the enclosure.
-
-
15. A method of thermal testing semiconductor devices comprising:
-
providing a fluidized bed of solid particulate matter; placing the semiconductor devices in an electrically conductive workpiece holder which is disposed within the fluidized bed; contacting the semiconductor devices with particles of the fluidized bed wherein at least some of the particles are electrically conductive materials; dissipating electrostatic charge from the particles by contacting the particles with grounded conductive surface, wherein the surfaces comprise electrically conductive, grounded walls of the fluidized bed, electrically conductive, grounded, charge dissipating wires disposed in the fluidized bed, and the workpiece holder.
-
Specification