System for calibrating a monochromator

• US 4,779,216 A
• Filed: 03/07/1986
• Issued: 10/18/1988
• Est. Priority Date: 03/07/1986
• Status: Expired due to Term

• Current Assignee: Perkinelmer Incorporated
• Original Assignee: Perkinelmer Incorporated
• Inventors: Collins, John B.
• Primary Examiner(s): Lall, Parshotam S.
• Assistant Examiner(s): Teska, Kevin J.
• Application Number:
  US06/837,438
• Time in Patent Office: 956 Days
• Field of Search: 364/153, 364/170, 364/525, 364/559, 364/571, 364/576, 356/71, 356/138, 356/308, 356/320, 356/346, 73/1 R, 73/1 E, 73/432 L
• US Class Current: 702/94
• CPC Class Codes: G01J 2003/066 Microprocessor control of functions, e.g. slit, scan, bandwidth during scan
• CPC Class Codes: G01J 2003/2866 Markers; Calibrating of scan
• CPC Class Codes: G01J 3/28 Investigating the spectrum using colour filters G01J3/51

Abstract

A method for calibrating a monochromator to compensate for mechanical imperfections in its diffraction grating and grating drive assembly employs a two stage interactive procedure which permits the use of small (0.2 nm) spectral regions for the identification of emission lines. An iterative, self-consistent, discrete Fourier transform is used for the determination of multiple positioning correction terms. When the Fourier calculations are completed, the results of the calibration procedure are presented by the system to the analyst for acceptance. If accepted, the positioning error of the primary calibration line is measured, stored and used by the system to maintain a zero centered distribution of positioning errors each time the monochromator is reinitialized.

Claims

1. A method for calibrating a monochromator, to compensate for mechanical imperfections is its defraction grating and grating drive assembly which cause positioning error in spectral emission lines, comprising the steps of:

(a) measuring the positioning error of a first pre-selected set of emission lines to establish a coarse correction to the positioning error attributable to said imperfections; and

(b) obtaining a polynomial fit to determine a set of multiple positioning correction terms for an expanded preselected set of emission line utilizing an iterative self-consistent Fourier transform.

2. A method as set forth in claim 1 wherein said step of measuring is performed utilizing a first preselected spectral window and said step of determining is performed utilizing a second spectral window which is narrower then said first window.

3. A method set forth in claim 1 further comprising the step of presenting the polynomial and Fourier transform coefficients for said determined multiple positioning correction terms to an operator for acceptance.

4. A method as set forth in claim 1 further comprising the steps of:

(a) choosing a primary reference line from said first preselected set of emission lines;

(b) utilizing said determined set of multiple positioning correction terms to locate said chosen primary reference line;

(c) measuring the offset of the located primary reference line from its theoretical position; and

(d) storing the measured offset of said primary reference line together with the polynomial and Fourier transform coefficients for said multiple positioning correction terms so that on subsequent reinitialization of said monochromator it is able to relocate the primary reference line at the offset position to preserve the validity of said coefficients.

5. A method as set forth in claim 1 wherein said step of determining further includes the steps of:

(a) determining the residual error for each line in said expanded preselected set of emission lines throughout said iterative process;

(b) removing a line from said expanded preselected set if the residual error associated with said line is ever greater than a preselected threshold value during said iterative process; and

(c) recomputing said set of multiple positioning correction terms utilizing said expanded preselected set of emission lines less the line removed from said set.

6. In a monochromator having a grating and grating drive assembly, a method for compensating for mechanical imperfections in the diffraction grating and drive assembly causing positioning errors having an aperiodic component comprising the steps of:

(a) generating a light beam;

(b) introducing the light beam into said monochromator;

(c) directing the light beam to strike said diffraction grating to create a spectrum;

(d) positioning said diffraction grating to locate a first set of preselected spectral lines in said spectrum by rotating said drive assembly a discrete number of steps and using a first preselected spectral window to isolate each line in said first set;

(e) measuring the positioning error, Δ

steps, for each isolated spectral line in said first set; and

(f) fitting a polynomial, P(steps), to said measured positioning errors plotted against the wavelength of said isolated lines from said first set to thereby obtain a coarse correction for said mechanical imperfections.

7. A method as set forth in claim 6 further comprising the steps of:

(a) utilizing said coarse correction to position said diffraction grating to locate a second set of preselected spectral lines in said spectrum wherein a second preselected spectral window, smaller then said first window, is used to isolate each line in said second set;

(b) measuring the positioning errors for each line located in said second set;

(c) fitting a polynomial, P'"'"'(steps), to the measured positioning error versus wavelength, for each isolated line in said second set; and

(d) adding the coefficients of P(steps) and P'"'"'(steps) algebraically to obtain the coefficients of a polynomial, P₂ (steps), which is an improved estimate of the aperiodic component of the positioning error.

8. A method as set forth in claim 7 wherein said step of fitting is performed by using the method of least squares.

9. A method as set forth in claim 7 wherein said step of measuring the positioning errors for each line located in said second set is performed by subtracting the first corrected step value for a given line in said second set from the actual number of steps required to locate said line, where each first corrected step value is calculated by adding the theoretical step value for a given line to the value of P(steps) for said line.

10. A method as set forth in claim 9 further comprising the step of constructing a set of residual errors, R₀, by subtracting P'"'"'(steps) from the measured positioning error for each line in said second set.

11. A method as set forth in claim 10 further comprising the steps of:

(a) determining if any significant periodic correction term exists in said set of residual errors by subjecting said set of residual errors to a Fourier transform over a preselected range of periods;

(b) determining if any of a predetermined set of stopping criteria are met wherein said set of criteria includes a determination that no periodic correction term of significance exists;

(c) constructing, whenever none of said stopping criteria are met, an improved set of residual errors, R₁, as a function of the significant periodic correction term identified as having the largest amplitude;

(d) accumulating the coefficients of said Fourier transform;

(e) subjecting said improved set of residual errors, R₁, to a Fourier transform at the period of the correction term identified as having the greatest amplitude to obtain a correction to the identified periodic correction term;

(f) subtracting said correction to the identified periodic correction term from each element in said improved set of residual errors to obtain a further improved set of residual errors, R₂ ;

(g) accumulating the coefficients of the identified periodic term and the coefficients of all prior identified significant periodic correction terms to keep all corrections self-consistent;

(h) performing a polynomial fit to said further improved set of residual errors to obtain P"(steps);

(i) accumulating the coefficients of P"(steps) to obtain a further improved aperiodic correction term estimate;

(j) constructing a still further improved set of residual errors, R₂ '"'"', by subtracting P"(steps) from each element of R₂ ;

(k) repeating, for a preselected number of iterations, the method steps beginning at step (e), with the contents of R₁ set equal to the contents of R₂ '"'"' at the start of each iteration; and

(l) repeating the method steps beginning at step (a) with the contents of R₀ set equal to the contents of R₂ '"'"' after said preselected number of iterations of method steps (e) through (k).

12. A method as set forth in claim 11 wherein said step of determining if any significant periodic correction term exists comprises the further steps of:

(a) identifying the periodic correction term with the greatest amplitude;

(b) measuring the amplitude of said identified periodic correction term; and

(c) comparing said measured amplitude with a first preselected threshold value.

13. A method as set forth in claim 12 wherein said step of constructing the improved set of residual errors, R₁ ;

comprises the step of subtracting from each element in said set of residual errors, R₀, the identified correction term having the largest amplitude exceeding said first threshold value.

14. A method as set forth in claim 11 wherein said predetetermined set of stopping criteria includes the identification of a preselected number of said significant periodic terms.

15. A method as set forth in claim 11 wherein said predetermined set of stopping criteria includes the identification of a preselected number of said significant periodic terms where said number of terms is a function of the numbers of lines in said second preselected set of emission lines.

16. A method as set forth in claim 11 further comprising the step of presenting the accumulated coefficients for said identified aperiodic term and the accumulated coefficients of all identified significant periodic correction terms to an operator for acceptance whenever a stopping criterion is met.

17. A method as set forth in claim 16 further comprising the steps of:

(a) choosing a primary reference line from said first set of preselected emission lines;

(b) utilizing said accumulated coefficients of said aperiodic and periodic correction terms to locate said chosen primary reference line;

(c) measuring the offset of the located primary reference line from its theoretical position; and

(d) storing the measured offset of said primary reference line together with said coefficients so that on subsequent reinitialization of said monochromator the device is able to relocate the primary spectral line at the offset position to preserve the validity of said coefficients.

18. A method as set forth in claim 11 further including the steps of:

(a) determining the residual error for each line in said second preselected set of emission lines throughout said iterative process;

(b) removing a line from said second preselected set if the residual error associated with said line is ever greater then a second preselected threshold value during said iterative process; and

(c) recomputing the coefficients of said periodic and aperiodic correction terms utilizing said expanded preselected set of emission lines less the line removed from said set.

19. A method for compensating for mechanical imperfections in the diffraction grating and grating drive assembly of a monochromator, comprising the steps of:

(a) generating a light beam;

(b) introducing the light beam into said monochromator;

(c) directing the light beam to strike said diffraction grating to create a spectrum;

(d) positioning said diffraction grating to locate a first set of preselected spectral lines in said spectrum by rotating said drive assembly a discrete number of steps and using a first preselected spectral window to isolate each line in said first set;

(e) measuring the positioning error, Δ

steps, for each isolated spectral line in said first set;

(f) fitting a polynomial, P(steps), to said measured positioning errors plotted against the wavelengths of said isolated lines from said first set to thereby obtain a coarse correction for said mechanical imperfections;

(g) utilizing said coarse correction to position said diffraction grating to locate a second set of preselected spectral lines in said spectrum wherein a second preselected spectral window, smaller then said first window, is used to isolate each line in said second set;

(h) measuring the positioning errors for each line located in said second set by subtracting the first corrected step value for a given line in said second set from the actual number of steps required to locate said line, where each first corrected step value is calculated by adding the theoretical step value for a given line to the value of P(steps) for said line;

(i) fitting a polynomial, P'"'"'(steps), to the measured positioning error versus wavelength, for each isolated line in said second set;

(j) adding the coefficients of P(steps) and P'"'"'(steps) algebraically to obtain the coefficients of a polynomial, P₂ (steps), which is an improved estimate of the aperiodic component of the positioning error; and

(k) constructing a set of residual errors, R₀, by subtracting P'"'"'(steps) from the measured positioning error for each line in said second set.

20. A method as set forth in claim 19 further comprising the steps of:

(a) subjecting said set of residual errors to a Fourier transform over a preselected range of periods;

(b) identifying the periodic correction term with the greatest amplitude;

(c) measuring the amplitude of said identified periodic correction term; and

(d) comparing said measured amplitude with a first preselected threshold value;

(e) determining if any of a predetermined set of stopping criteria are met wherein said set of criteria includes a determination that no periodic correction term of significance exists;

(f) constructing, whenever none of said stopping criteria are met, an improved set of residual errors, R₁, by subtracting from each element in said set of residual errors, R₀, the identified correction term having the largest amplitude exceeding said first threshold value;

(g) accumulating the coefficients of said Fourier transform;

(h) subjecting said improved set of residual errors, R₁, to a Fourier transform at the period of the correction term identified as having the greatest amplitude to obtain a correction to the identified periodic correction term;

(i) subtracting said correction to the identified periodic correction term from each element in said improved set of residual errors to obtain a further improved set of residual errors, R₂ ;

(j) accumulating the coefficients of the identified periodic term and the coefficients of all prior identified significant periodic correction terms to keep all corrections self-consistent;

(k) performing a polynomial fit to said further improved set of residual errors to obtain P"(steps);

(l) accumulating the coefficients of P"(steps) to obtain a further improved aperiodic correction term estimate;

(m) constructing a still further improved set of residual errors, R₂ '"'"', by subtracting P"(steps) from each element of R₂ ;

(n) repeating, for a preselected number of iterations, the method steps beginning with step (h), with the contents of R₁ set equal to the contents of R₂ '"'"' at the start of each iteration; and

(o) repeating the method steps beginning at step (a) with the contents of R₀ set equal to the contents of R₂ '"'"' after said preselected number of iterations of method steps (h) through (n).

21. A method as set forth in claim 20 wherein said predetermined set of stopping criteria includes the identification of a preselected number of said significant periodic terms.

22. A method as set forth in claim 20 wherein said predetermined set of stopping criteria includes the identification of a preselected number of said significant periodic terms where said number of terms is a function of the numbers of lines in said second preselected set of emission lines.

23. A method as set forth in claim 20 further comprising the step of presenting the accumulated coefficients for said identified aperiodic term and the accumulated coefficients of all identified significant periodic correction terms to an operator for acceptance whenever a stopping criterion is met.

24. A method as set forth in claim 23 further comprising the steps of:

(a) choosing a primary reference line from said first set of preselected emission lines;

(b) utilizing said accumulated coefficients of said aperiodic and periodic correction terms to locate said chosen primary reference line;

(c) measuring the offset of the located primary reference line from its theoretical position; and

(d) storing the measured offset of said primary reference line together with said coefficients so that on subsequent reinitialization of said monochromator the device is able to relocate the primary spectral line at the offset position to preserve the validity of said coefficients.

25. A method as set forth in claim 20 further comprising the steps of:

(a) determining the residual error for each line in said second preselected set of emission lines throughout said iterative process;

(b) removing a line from said second preselected set if the residual error associated with said line is ever greater than a second preselected threshold value during said iterative process; and

(c) recomputing the coefficients of said periodic and aperiodic correction terms utilizing said second preselected set of emission lines less the line removed from said set.

26. A system, including computer means and program, for calibrating a monochromator having a grating and grating drive assembly to compensate for mechanical imperfections in the monochromator diffraction grating and grating drive assembly, comprising:

(a) means for measuring the positioning error of a first preselected set of emission lines to establish a coarse correction to the positioning error attributable to said imperfections; and

(b) means for obtaining a polynomial fit to determine a set of multiple positioning correction terms for an expanded preselected set of emission lines utilizing an iterative self-consistent Fourier transform.

27. A system as set forth in claim 26 wherein said means for measuring comprises a first portion of said computer program which utilizes a first preselected spectral window to locate each of the emission lines in said first set of lines.

28. A system as set forth in claim 27 wherein said means to determine comprises a second portion of said computer program which utilizes a second spectral window, narrower then said first window, to locate each of the emission lines in said expanded set of lines.

29. A system as set forth in claim 26 further comprising means for presenting the coefficients of said Fourier transform for said determined multiple positioning correction terms to an operator for acceptance.

30. A system as set forth in claim 29 wherein said means for presenting is a CRT display.

31. A system as set forth in claim 26 further comprising:

(a) means for choosing a primary reference line from said first preselected set of emission lines;

(b) means for utilizing said determined set of multiple positioning correction terms to locate said chosen primary reference line;

(c) means for measuring the offset of the located primary reference line from its theoretical position; and

(d) means for storing the measured offset of said primary reference line together with the coefficients for said multiple positioning correction terms so that on subsequent reinitialization of said monochromator the system is able to relocate the primary reference line at the offset position to preserve the validity of said coefficients.

32. A system as set forth in claim 31 wherein said means to determine further comprises:

(a) means for determining the residual error for each line in said expanded preselected set of emission lines throughout said iterative process;

(b) means for removing a line from said expanded preselected set if the residual error associated with said line is ever greater than a preselected threshold value during said iterative process; and

(c) means for recomputing said set of multiple positioning correction terms utilizing said expanded preselected set of emission lines less the line removed from said set.

33. A system, including a monochromator having a grating, grating drive assembly, and computer means and program, for compensating for mechanical imperfections in the diffraction grating and grating assembly comprising:

(a) means for generating a light beam;

(b) means for introducing the light beam into said monochromator;

(c) means for directing the light beam to strike said diffraction grating to create a spectrum; and

(d) means operating under the control of said computer means and program for positioning said diffraction grating to locate a first set of preselected spectral lines in said spectrum by rotating said drive assembly a discrete number of steps, utilizing a first preselected spectral window to isolate each line in said first set.

34. A system as set forth in claim 33 wherein said positioning means further includes detector means for signalling said computer means whenever one of said preselected spectral lines is located by said positioning means.

35. A system as set forth in claim 33 wherein a first portion of said computer program measures the positioning error, Δ

steps, for each isolated spectral line in said first set and a second portion of said computer program to fits a polynomial, P(steps), to said measured positioning errors plotted against the wavelengths of said isolated lines from said first set to thereby obtain a coarse correction for said mechanical imperfections.

36. A system as set forth in claim 35 wherein a third portion of said computer program utilizes said coarse correction to position said diffraction grating to locate a second set of preselected spectral lines in said spectrum utilizing a second preselected spectral window, smaller then said first window, to isolate each line in said second set.

37. A system as set forth in claim 36 wherein a fourth portion of said computer program measures the positioning errors for each line located in said second set, a fifth portion of said computer program is used to fit a polynomial, P'"'"'(steps), to the measured positioning error versus wavelength, for each isolated line in said second set;

and a sixth portion of said computer program is used to add the coefficients of P(steps) and P'"'"'(steps) algebraically to obtain the coefficients of a polynomial, P₂ (steps), which is an improved estimate of the aperiodic component of the positioning error.

38. A system as set forth in claim 37 wherein said fifth portion of said computer program performs said polynomial fit by using the method of least squares.

39. A system as set forth in claim 37 wherein said fourth portion of said computer program is operative to subtract the first corrected step value for a given line in said second set from the actual number of steps required to locate said line, where each first corrected step value is calculated by adding the theoretical step value for a given line to the value of P(steps) for said line.

40. A system as set forth in claim 37 wherein a seventh portion of said computer program constructs a set of residual errors, R₀, by subtracting P'"'"'(steps) from the measured positioning error for each line in said second set.

41. A system as set forth in claim 40 wherein an eighth portion of said computer program determines if any significant periodic correction term exists in said set of residual errors by subjecting said set of residual errors to a Fourier transform over a preselected range of periods.

42. A system as set forth in claim 41 wherein said eighth portion of said computer program is operative to identify the periodic correction term with the greatest amplitude, to measure the amplitude of said identified periodic correction term and to compare said measured amplitude with a first preselected threshold value.

43. A system as set forth in claim 41 wherein a ninth portion of said computer program determines if any of a predetermined set of stopping criteria are met, said set of criteria including a determination that no periodic correction term of significance exists and, whenever none of said stopping criteria are met, to construct an improved set of residual errors, R₁, as a function of the significant periodic correction term identified as having the largest amplitude.

44. A system as set forth in claim 43 wherein said predetermined set of stopping criteria includes the identification of a preselected number or said significant periodic terms.

45. A system as set forth in claim 43 wherein said predetermined set of stopping criteria includes the identification of a preselected number of said significant periodic terms where said number of terms is a function of the numbers of lines in said second preselected set of emission lines.

46. A system as set forth in claim 43 wherein a tenth portion of said computer program accumulates the coefficients of said Fourier transform.

47. A system as set forth in claim 46 wherein an eleventh portion of said computer program subjects said improved set of residual errors, R₁, to a Fourier transform at the period of the correction term identified as having the greatest amplitude to obtain a correction to the identified periodic term;

to subtract said correction to the identified periodic correction term from each element in said improved set of residual errors to obtain a further improved set of residual errors, R₂ ;

to accumulate the coefficients of the identified periodic term and the coefficients of all prior identified significant periodic correction terms to keep all corrections self-consistent;

to perform a polynomial fit to said further improved set of residual errors to obtain P"(steps), to accumulate the coefficients of P"(steps) to obtain a further improved aperiodic correction term estimate and to construct a still further improved set of residual errors, R₂ '"'"', by subtracting P"(steps) from each element of R₂.

48. A system as set forth in claim 47 wherein a twelfth portion of said computer program repeats, for a preselected number of iterations, the operation of said eleventh portion of said computer program with the contents of R₁ set equal to the contents of R₂ '"'"' at the start of each iteration.

49. A system as set forth in claim 48 wherein a thirteenth portion of said computer program repeats the operation of said eighth through twelfth portions of said computer program with the contents of R₀ set equal to the contents of R₂ '"'"' after said preselected number of iterations of said eleventh program portion.

50. A system as set forth in claim 49 further comprising a fifteenth portion of said computer program operative to determine the residual error for each line in said second preselected set of emission lines throughout said iterative process;

to remove a line from said second preselected set if the residual error associated with said line is ever greater then a second preselected threshold value during said iterative process; and

to recompute the coefficients of said periodic and aperiodic correction terms utilizing said second preselected set of emission lines less the line removed from said set.

51. A system as set forth in claim 49 further comprising means for presenting the accumulated coefficients for said identified aperiodic term and the accumulated coefficients of all identified significant periodic correction terms to an operator for acceptance whenever a stopping criterion is met.

52. A system as set forth in claim 51 further comprising a fourteenth portion of said computer program operative, in response to an input from said operator to choose a primary reference line from said first set of preselected emission lines, to utilize said accumulated coefficients of said aperiodic and periodic correction terms to locate said chosen primary reference line;

to measure the offset of the located primary reference line from its theoretical position and to store the measured offset of said primary reference line together with said coefficients so that on subsequent reintialization of said monochromator the system is able to relocate the primary spectral line at the offset position to preserve the validity of said coefficients.