Source of ions with at least two ionization chambers, in particular for forming chemically reactive ion beams

• US 4,782,235 A
• Filed: 10/01/1986
• Issued: 11/01/1988
• Est. Priority Date: 08/12/1983
• Status: Expired due to Fees

• Current Assignee: Centre National De La Recherche Scientifique
• Original Assignee: Centre National De La Recherche Scientifique
• Inventors: Lejeune, Claude, Gilles, Jean P.
• Primary Examiner(s): Niebling, John F.
• Assistant Examiner(s): Nguyen, Nam X.
• Application Number:
  US06/914,547
• Time in Patent Office: 762 Days
• Field of Search: 204/298, 204/192.1, 250/423 R, 250/425, 315/111.81, 315/111.31, 315/111.41, 315/111.91, 376/127, 376/130
• US Class Current: 250/423.00R
• CPC Class Codes: H01J 27/18 with an applied axial magnetic field

Abstract

The ion source comprises a cathode, an intermediate electrode and an anode with two ionization chambers between these electrodes, means for producing an axial magnetic field, means for applying a DC voltage between an intermediate electrode and the anode, ion extraction means and an alternating voltage generator between the cathode and the intermediate electrode.

Claims

1. An ion source having at least two ionization chambers and at least three electrodes, comprising successively along a longitudinal direction a cathode, an intermediate electrode with a first aperature at its center and an anode with a second aperature at its center, the first ionization chamber being disposed between said cathode and said intermediate electrode and the second ionization chamber being disposed between said intermediate electrode and said anode, comprising:

means for introducing an ionizable medium in said first ionization chamber in the vicinity of said cathode;

means for permanently applying, in operation, an A.C. voltage, at a frequency between about 20 and about 50 kHz, between said cathode and said intermediate electrode, thereby producing, in said first ionization chamber, a first plasma which remains ignited in a steady state;

means for applying, between said intermediate electrode and said anode, a D.C. voltage of a polarity such that said anode is maintained positive relative to said intermediate electrode, thereby extracting essentially electrons from said first ionization chamber into said second ionization chamber through said first aperature in said intermediate electrode, said electrons producing a second plasma in said second ionization chamber;

means for producing a longitudinal magnetic field between said intermediate electrode and said anode, thereby constricting said second plasma in said second ionization chamber; and

means for extracting ions from said second ionization chamber through said second aperature in said anode.

2. The ion source according to claim 1, wherein the cathode is cooled by flow of a fluid.

3. The ion source according to claim 1, wherein the cathode is hollow and an intake of the gas to be ionized is provided through said cathode.

4. The ion source according to claim 1, which includes an intake duct for the gas to be ionized whose ejection end is located in the vicinity of the cathode.

5. The ion source according to claim 1, which is of the duoplasmatron type with two ionization chambers, the first one disposed between the cathode and the intermediate electrode and the second one between the intermediate electrode and the anode, this latter being pierced with an extraction hole through which the ions formed then leave said second chamber to be accelerated.

6. The ion source according to claim 1, which is of the duopigatron type with two ionization chambers, the first one disposed between the cathode and the intermediate electrode and the second one between the intermediate electrode and an anti cathode which is pierced with an aperture through which the ions formed then leave said second chamber to be accelerated, a non-magnetic anode being situated between these latter two electrodes and polarized positively with respect to the intermediate electrode, the anti cathode being polarized negatively with respect to the intermediate electrode.

7. The ion source according to claim 1, which is of the triplasmatron type with three ionization chambers, the first disposed between the cathode and the intermediate electrode, the second between the intermediate electrode and a first anode, which is the main anode, the third one being disposed between said main anode and a fourth electrode, which is a second anode, located downstream from said main anode, and means for maintaining said second anode at a positive potential with respect to said main anode, the fourth electrode being pierced with at least one aperture through which the ions formed then leave said third chamber to be accelerated.

8. The ion source according to claim 1, which is of the triplasmatron type with three ionization chambers, the first disposed between the cathode and the intermediate electrode, the second between the intermediate electrode and a first anode, which is the main anode, the third one being disposed between said main anode and a fourth electrode, which is a second anode, located downstream from said main anode, and that it comprises, in addition to the fourth electrode, a reflector and an anti-cathode negatively biased with respect to the main anode and magnetic means adapted to create a surface induction field in the vicinity of said second anode of the alternating multipole type so as to confine both the electrons and the ions in the third chamber, the ions being emitted through apertures pierced in the anti-cathode.

9. The ion source according to claim 1, wherein the cathode is formed by at least one tube.

10. The ion source according to claim 1, wherein cathode is a spraying cathode, the active surface of the spraying cathode being concave in shape and the center of curvature of the concavity being situated on the axis of the ions source in the median plane of the second ionization chamber.

11. The ion source according to claim 1, wherein the cathode forms one plate of a capacitor, the other capacitor plate being formed by the lateral wall of the intermediate electrode.

12. The ion source according to claim 1, which includes means for accelerating the ions formed and forming an extraction optical system.

13. An ion source according to claim 1, wherein said means for permanently applying, in operation, an A.C. voltage are constituted by an A.C. voltage generator and a capacitor, disposed in series between said cathode and said intermediate electrode.

14. An ion source as set forth in claim 13 further comprising an impedance circuit disposed in series with said generator and said capacitor between said cathode and said intermediate electrode.

15. An ion source having at least two ionization chambers and at least three electrodes, comprising successively along a longitudinal direction a cathode cooled by a flow of liquid, an intermediate electrode with a first aperature at its center and an anode with a second aperture at its center, the first ionization chamber being disposed between said cathode and said intermediate electrode and the second ionization chamber being deposed between said intermediate electrode and said anode, comprising:

means for introducing an ionizable medium in said first ionization chamber in the vicinity of said cathode;

means for permanently applying, in operation, an A.C. voltage, at a frequency between about 20 and about 50 kHz, between said cathode and said intermediate electrode, thereby producing, in said first ionization chamber, a first plasma which remains ignited in a steady state;

said means for permanently applying an A.C. voltage including an A.C. voltage generator and a capacitor disposed in series between said cathode and said intermediate electrode;

means for applying, between said intermediate electrode and said anode, a D.C. voltage of a polarity such that said anode is maintained positive relative to said intermediate electrode, thereby extracting essentially electrons from said first ionization chamber into said second ionization chamber through said first aperature in said intermediate electrode, said electrons producing a second plasma in said second ionization chamber;

means for producing a longitudinal magnetic field between said intermediate electrode and said anode, thereby constricting said second plasma in said second ionization chamber; and

means for extracting ions from said second ionization chamber through said second aperature in said anode.