Optical position measuring apparatus
First Claim
1. Apparatus for measuring the distance to an object comprising:
- projection means for projecting a radiation beam onto the object, said projection means including a radiation generating means and a first optical system for projecting the radiation beam on the surface of said object in accordance with said radiation, said first optical system having a lens component; and
detectilon means for detecting the radiation beam reflected from the object, said detection means including radiation detecting means having a radiation-receiving surface for detecting the intensity distribution of the radiation on said radiation-receiving surface, and a second optical system cooperating with said lens component for guiding at least a portion or the reflected radiation beam from the object to said radiation-receiving surface, said lens component and said second optical system being so disposed as to bring said radiation-receiving surface into an optically conjugated relation with a line segment of the optical axis of the first optical system along which the object is located, said radiation-receiving surface being disposed so that a projection image of said radiation-receiving surface formed by said lens component intersects the optical axis of said lens component substantially at right angles and so that the position of said radiation beam on said radiation-receiving surface changes linearly in accordance with an amount of displacement of the object along said line segment of the optical axis of said first optical system.
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Accused Products
Abstract
Apparatus for measuring the distance to an object comprising projection means for projecting a radiation beam onto the object including a radiation generating means and a first optical system, and detection means for detecting the radiation beam reflected from the object including radiation detecting means having a radiation-receiving surface for detecting the intensity distribution of the radiation on said radiation-receiving surface and a second optical system for guiding at least a portion of the reflected radiation beam from the object to said radiation-receiving surface, an optically conjugated relation being held between said radiation-receiving surface and an area of the optical axis of the first optical system.
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Citations
8 Claims
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1. Apparatus for measuring the distance to an object comprising:
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projection means for projecting a radiation beam onto the object, said projection means including a radiation generating means and a first optical system for projecting the radiation beam on the surface of said object in accordance with said radiation, said first optical system having a lens component; and detectilon means for detecting the radiation beam reflected from the object, said detection means including radiation detecting means having a radiation-receiving surface for detecting the intensity distribution of the radiation on said radiation-receiving surface, and a second optical system cooperating with said lens component for guiding at least a portion or the reflected radiation beam from the object to said radiation-receiving surface, said lens component and said second optical system being so disposed as to bring said radiation-receiving surface into an optically conjugated relation with a line segment of the optical axis of the first optical system along which the object is located, said radiation-receiving surface being disposed so that a projection image of said radiation-receiving surface formed by said lens component intersects the optical axis of said lens component substantially at right angles and so that the position of said radiation beam on said radiation-receiving surface changes linearly in accordance with an amount of displacement of the object along said line segment of the optical axis of said first optical system. - View Dependent Claims (2, 3, 4)
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5. Apparatus for measuring the distance to an object comprising:
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projection means for projecting a radiation beam onto the object, said projection means including a radiation generating means and a first optical system for projecting the radiation beam on the surface of said object in accordance with said radiation; and detection means for detecting the radiation beam reflected from the object, said detection means including radiaion detecting means having a radiation-receiving surface for detecting the intensity distribhution of the radiation on said radiation-receiving surface, andf a second optical system for guiding at least a portion of the reflected radiation beam from the object to said radiation-receiving surface, said second optical system being so disposed as to bring said radiation-receiving surface into a substantially optically conjugated relation with a line segment of the optical axis of the first optical system along which the object is located and also into a predetermined relationship wherein the position of said radiation beam on said radiation-receiving surface changes linearly in accordance with an amount of displacement of the object along said line segment of the optical axis of said first optical system and the optical axis of said second optical system, intersecting the optical axis of said first optical system substantially at right angles. - View Dependent Claims (6)
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7. Apparatus for measuring the distance to an object comprising:
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projection means for projecting a radiation beam onto the object, said projection means including a radiation generating means and a first optical system for projecting the radiation beam on the surface of said object, said first optical system having a lens component; and detection means for detecting the radiation beam reflected from the object, said detection means including radiation detecting means having a radiation-receiving surface for detecting the intensity distribution of the radiation on said radiation-receiving surface, and a second optical system cooperating with said lens component for guiding at least a portion of the reflected radiation beam from the object to said radiation-receiving surface, said second optical system bringing said radiation-receiving surface into a substantially optically conjugated relation with a line segment of the optical axis of said first optical system along which the object is located and also into a predetermined relationship wherein the position of said radiation beam on said radiation-receiving surface changes linearly in accordance with an amount of displacement of the object along said line segment of the optical axis of said first optical system.
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8. Apparatus for measuring the distance to an object comprising:
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projection means for projecting a radiation beam onto the object, said projection means including radiation generating means and a first optical system for projecting the radiation beam of the surface of said object; and detection means for detecting the radiation beam reflected from the object, said detection means including radiation detecting means having a radiation-receiving surface for detecting the intensity distribution of the radiation on said radiation-receiving surface, and a second optical system for guiding at least a portion of the reflected radiation beam from the object to said radiation-receiving surface, and for bringing said radiation-receiving surface into a substantially optically conjugated realation with a line segment of the optical axis of said first optical system and also into predetermined relationship wherein the position of said radiation beam on said radiation-receiving surface changes linearly in accordance with an amount of displacement of the object along said line segment of the optical axis of said first optical system.
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Specification