Pattern inspection system

• US 4,783,826 A
• Filed: 08/18/1986
• Issued: 11/08/1988
• Est. Priority Date: 08/18/1986
• Status: Expired due to Term

• Current Assignee: Gerber Systems Corp (Barco NV)
• Original Assignee: Gerber Scientific Incorporated
• Inventors: Koso, Dusan A.
• Primary Examiner(s): Shepperd, John W.
• Assistant Examiner(s): Parker, Michael D.
• Application Number:
  US06/897,721
• Time in Patent Office: 813 Days
• Field of Search: 382/8, 382/26, 382/19, 382/45, 358/101, 358/106, 358/107
• US Class Current: 382/147
• CPC Class Codes: G01N 2021/95615 with stored comparision signal
• CPC Class Codes: G01N 2021/95638 for PCB's
• CPC Class Codes: G01N 21/95607 using a comparative method
• CPC Class Codes: G06T 2207/30141 Printed circuit board [PCB]
• CPC Class Codes: G06T 7/001 using an image reference approach
• CPC Class Codes: G06T 7/30 Determination of transform parameters for the alignment of images, i.e. image registration

Abstract

A system which inspects pattern-bearing material that is subject to topical distortions which scans in a first direction a plurality of predefined local regions of a pattern to be inspected to provide an image of each local region and generates a reference image for each of the local regions. The system shifts the position of the image of each local region and the position of its corresponding reference image relative to each other to align the images in the second direction and/or modifies in the first direction the dimension of the image of each local region and the dimension of its corresponding reference image relative to each other to align the images in the first direction. For each local region the system compares the aligned images to detect errors in the pattern independent of misalignment of and topical distortions of each local region.

Claims

1. A system which inspects pattern-bearing material that is subject to topical distortions, comprising:

means for scanning in a first direction a plurality of predefined local regions of a pattern to be inspected to provide an image of each local region, said means for scanning having a scan width, in a second direction, greater than the width in the second direction of each said local region;

means for generating a reference image for each of said local regions;

means for shifting the position of the image of each said local region and the position of its corresponding reference image relative to each other to align as a pair the images in the second direction;

means for modifying in the first direction at least one of the dimension of the image of each said local region and the dimension of its corresponding reference image relative to each other to align as a pair the images in the first direction; and

means for comparing each pair of aligned images to detect errors in the pattern independent of misalignment of and topical distortions of each said local region.

2. The inspection system of claim 1 in which said means for scanning includes camera means for producing the image of each said local region.

3. The inspection system of claim 2 in which said means for shifting includes means for selecting within the scan width the field of view of said camera means utilized to produce said image.

4. The inspection system of claim 3 in which said means for selecting includes means for determining for each said local region and its corresponding reference image the difference in position of said local region relative to the position of said reference image in the second direction.

5. The inspection system of claim 3 in which said camera means includes a plurality of photosensitive elements.

6. The inspection system of claim 5 in which said plurality of photosensitive elements includes a charge coupled device.

7. The inspection system of claim 1 in which said means for modifying includes means for representing for each said local region and its corresponding reference image the difference in dimension of said local region and the dimension of said reference image relative to each other in the first direction.

8. The inspection system of claim 7 in which said means for modifying further includes means for adjusting the dimension of said reference image in the first direction.

9. The inspection system of claim 8 in which said means for scanning provides the image of each said local region as a first set of successive portions and said means for generating generates its corresponding reference image as a second set of successive portions.

10. The inspection system of claim 9 in which said means for adjusting repeats a portion of said reference image when said local region is shorter in the first direction than said reference image and deletes a portion of said reference image when said local region is longer in the first direction.

11. The inspection system of claim 9 in which each said portion is a plurality of units and said means for comparing compares each local region unit to its corresponding reference image unit.

12. The inspection system of claim 11 in which each said unit is at least as large in dimension as the maximum expected topical distortion in the pattern of each said local region.

13. The inspection system of claim 8 in which said means for generating generates said reference image for each said local region as a set of successive lines.

14. The inspection system of claim 13 in which said means for adjusting, for a reference image having N lines, repeats line N-1 of said reference image when said local region is shorter in the first direction than said reference image and jumps from line N-1 to the first line of the next reference image when said local region is longer in the first direction.

15. The inspection system of claim 14 in which said reference images are arranged sequentially in the first direction.

16. The inspection system of claim 1 in which said means for generating generates digital reference images and includes memory means for storing the reference images in digital form.

17. The inspection system of claim 16 in which said means for scanning provides digital images of the local areas and the means for comparing includes digital comparison means.

18. The inspection system of claim 1 in which said pattern is disposed on a printed wire board.

19. The inspection system of claim 1 in which the second direction is transverse to the first direction along the plane of the pattern.

20. The inspection system of claim 1 in which said means for shifting and said means for modifying completely align each said local region with its corresponding reference image in the first and second directions.

21. The inspection system of claim 2 in which said means for scanning further includes movable platform means and means for securing the pattern to said platform means.

22. The inspection system of claim 21 further including means for coarsely aligning in the first direction said platform means and said camera means.

23. A system which inspects patternbearing material that is subject to topical distortions, comprising:

means for scanning in a first direction a plurality of predefined local regions of a pattern to be inspected to provide an image of each local region, said means for scanning having a scan width, in a second direction, greater than the width in the second direction of each said local region and having an adjustable field of view for producing the image of each said local region;

means for generating a reference image for each of said local regions;

means for shifting the position of the image of each said local region to align as a pair the images in the second direction, said means for shifting including means for selecting within the scan width of said means for scanning the field of view utilized to produce the image of each said local region; and

means for comparing each pair of aligned images to detect errors in the pattern independent of misalignment of and topical distortions of each said local region.

24. A system which inspects pattern-bearing material that is subject to topical distortions, comprising:

means for scanning in a first direction a plurality of predefined local regions of a pattern to be inspected to provide an image of each local region;

means for generating a reference image for each of said local regions;

means for modifying in the first direction at least one of the dimension of the image of each said local region and the dimension of its corresponding reference image relative to each other to align as a pair the images in the first direction; and

means for comparing each pair of aligned images to detect errors in the pattern independent of misalignment of and topical distortions of each said local region.

25. A method of inspecting pattern-bearing material that is subject to topical distortions, comprising:

defining a plurality of local regions in a pattern to be inspected;

scanning the pattern by passing in a first direction the local regions to provide an image of each local region, whereby the width of the scan in a second direction is greater than the width in the second direction of each local region;

establishing within the scan width a field of view for producing the image of each local region;

generating, for each local region, a reference image corresponding to that local region;

determining for each set of corresponding images the difference in position of the local region relative to the portion of its corresponding reference image in a second direction;

shifting the position of the image of each local region in the second direction to align the images in the second direction by adjusting the field of view utilized to produce the image of each local region; and

comparing, for each local region, the aligned images to detect errors in the pattern independent of misalignment of and topical distortions of each said local region.

26. The method of claim 25 in which the step of determining includes initially scanning the pattern to view a portion of each region to resolve for that region any offset in the second direction.

27. The method of claim 26 in which the step of scanning to provide an image includes subsequently scanning each region by the field of view selected to compensate for the offset for that region.

28. A method of inspecting pattern-bearing material that varies nonuniformly, comprising:

defining a plurality of local regions in a pattern to be inspected;

scanning the pattern by passing in a first direction the local regions to provide an image of each local region;

generating, for each local region, a reference image corresponding to that local region;

representing for each set of corresponding images the difference in position of the local region relative to the position of its reference image in the first direction;

modifying in the first direction the dimension of the corresponding reference image relative to the image of that local region to align the images in the first direction; and

comparing, for each local region, the aligned images to detect errors in the pattern independent of misalignment of and topical distortions of each said local region.

29. The method of claim 28 in which the step of representing includes initially scanning the pattern to view a portion of each region to resolve for that region any offset in the first direction.

30. The method of claim 29 in which the step of modifying includes altering the dimension of the corresponding reference image by the offset for that region.

31. The method of claim 28 in which the the dimension of the image of each local region is modified relative to the dimension of its corresponding reference image by repeating a portion of the reference image when the local region is shorter in the first direction than the reference image and deleting a portion of the reference image when the local region is longer in the first direction.