Amorphous silicon ionizing particle detectors

• US 4,785,186 A
• Filed: 10/21/1986
• Issued: 11/15/1988
• Est. Priority Date: 10/21/1986
• Status: Expired due to Term

• Current Assignee: Xerox Corporation (Xerox Holdings Corp.)
• Original Assignee: Xerox Corporation (Xerox Holdings Corp.)
• Inventors: Mendez, Victor P., Street, Robert A., Kaplan, Selig N.
• Primary Examiner(s): Fields, Carolyn E.
• Assistant Examiner(s): NOT, DEFINED
• Application Number:
  US06/921,302
• Time in Patent Office: 756 Days
• Field of Search: 250/370 K, 250/370 F, 250/370 R, 250/370 A, 357/2
• US Class Current: 250/370.14
• CPC Class Codes: G01T 1/24 with semiconductor detectors
• CPC Class Codes: G01T 1/242 Stacked detectors, e.g. for depth information constructional or manufacturing details H01L25/00
• CPC Class Codes: H01L 31/02322 comprising luminescent members, e.g. fluorescent sheets upon the device
• CPC Class Codes: H01L 31/03762 including only elements of Group IV of the Periodic Table
• CPC Class Codes: H01L 31/117 of the bulk effect radiation detector type, e.g. Ge-Li compensated PIN gamma-ray detectors
• CPC Class Codes: H01L 31/118 of the surface barrier or shallow PN junction detector type, e.g. surface barrier alpha-particle detectors
• CPC Class Codes: Y02E 10/548 Amorphous silicon PV cells

Abstract

Amorphous silicon ionizing particle detectors having a hydrogenated amorphous silicon (a--Si:H) thin film deposited via plasma assisted chemical vapor deposition techniques are utilized to detect the presence, position and counting of high energy ionizing particles, such as electrons, x-rays, alpha particles, beta particles and gamma radiation.

Claims

1. A particle detector having a body portion for detecting high energy ionizing particles moving in a path toward said detector where, upon penetration into said detector body portion, form electron-hole pairs and comprising:

a substrate,

first electrode means formed on said substrate,

an a--Si;

H film deposited on said first electrode,

said a--Si;

H film comprises three monolithic, contiguous regions consecutively comprising an a--Si region doped to be a first conductivity type, an intrinsic region of a--Si and an a--Si region doped to be a second conductivity type,

second electrode means formed over said a--Si;

H film,

means to increase the sensitivity to a level sufficient to detect single ionizing particles as they individually impact said detector body portion by increasing the collection efficiency of said a--Si;

H film intrinsic region to have a low trap density below 1×

10¹⁶ cm^-3 ev^-1 with a large film thickness above 1 μ

m and operative at voltages above 50 volts per μ

m, and

means to collect said electron-hole pairs and indicate the number and energy level of said ionizing particles.

2. The particle detector of claim 1 where said a--Si:

H film comprises a single intrinsic layer of a--Si having a thickness in the range of 1 μ

m to 15 μ

m.

3. The particle detector of claim 1 comprising

a plurality of said a--Si:

H film detectors formed in a stack on said substrate,

electrode means formed between the first of said detectors and said substrate,

electrode means formed between adjacently stacked detectors forming one or more intermediate electrode means,

electrode means formed on the top most detector of said stack,

said intermediate electrode means being commonly connected together according to the conductivity type of the adjacently formed detector,

voltage bias means connected across said commonly connected electrode means.

4. The particle detector of claim 1 comprising a Si--Ge alloy wherein said Ge comprises about 3%-20% atomic weight to advance the interaction of said particles with said film and so as to enhance the sensitivity of said detector.

5. The particle detector of claim 1 formed as detector array wherein

said first electrode means comprises a first set of spatially formed parallel electrodes on said substrate,

said second electrode means comprises a second set of spatially formed parallel electrodes on said film,

said second electrode set being substantially orthogonal to said first electrode set forming electrode cross points with said film to function as individually addressed detectors in said array.

6. The particle detector of claim 1 including means to dispose at least a planar portion of said film at an angle transverse to the path of incoming high energy ionizing particles to enhance the sensitivity of said detector.

7. A method for improving the detection of high energy ionizing particles which comprises the steps of:

providing a detector body portion of a--Si;

H film, said film being sandwiched between a pair of electrodes,

increasing the sensitivity level of said a--Si;

H film sufficient to detect single ionizing particles as they individually impact said detector body portion by increasing the collection efficiency of said a--Si;

H film to have a low trap density below 1×

10¹⁶ cm^-3 ev^-1 with a large film thickness above 1 μ

m and operative at voltages above 50 volts per μ

m,

placing the detector in a path of ionizing particle radiation wherein said radiation is separated into electron-hole pairs as said radiation penetrates into said detector body portion,

separating and collecting said electron-hole pairs,

detecting said collected electron-hole pairs by measuring the output current response upon collection thereof wherein each detected current output pulse is representative of a single electron-hole pair, and

counting said current output pulses.

8. The method of claim 7 wherein said detector is a back-to-back Schottky diode.

9. The method of claim 7 wherein said detector is a p-i-n diode.

10. The method of claim 7 wherein said detector is a stack of p-i-n diodes.

11. The method of claim 7 which includes the steps of:

calibrating the current output pulses from the detector with a known source to determine the energy of the particles detected.

12. The method of claim 7 which includes the steps of:

providing a series of stack detectors to enhance the efficiency of collection of electron-hole pairs.

13. A single particle detector having a body portion for detecting high energy ionizing particles moving in a path toward said detector, said detector comprising a combination of contiguous films of a--Si:

H film and CsI, said CsI film causing said particles to be converted into photons, said a--Si film sensitive to said photons and separating them into electron-hole pairs, means to collect said electron-hole pairs indicative of the number and energy level of said ionizing particles.

14. The particle detector of claim 13 wherein said a--Si:

H film comprises three monolithic, contiguous regions consecutively comprising a Si region doped to be a first conductivity type, an intrinsic region and a Si region doped to be a second conductivity type.

15. A single particle detector having a body portion for detecting high energy ionizing particles moving in a path toward said detector where, upon penetration into said detector body portion, form electron-hole pairs,

means to separate said electron-hole pairs and collect the separated electrons and holes indicative of the number and energy level of said particles,

a--Si:

H film comprising said body portion and having at least, in part, a planar surface for receiving said particles and generating said electron-hole pairs,

means to support said film planar surface at an angle transverse to said particle path to increase the path length of particle penetration in said film and to permit the unincumbered separation and collection of said electron-hole pairs without interference in the collection of other separated electrons and holes so as to increase the sensitivity level of particle detection.

16. The particle detector of claim 15 wherein said a--Si:

H film comprises three monolithic, contiguous regions consecutively comprising a Si region doped to be a first conductivity type, an intrinsic region and a--Si region doped to be a second conductivity type.

17. The particle detector of claim 15 wherein said support means comprises a support member having a plurality of elongated triangular shaped ridges spatially across said member, said ridges having one or more sides disposed at an angle transverse relative to said particle path.