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Absolute capacitance manometers

  • US 4,785,669 A
  • Filed: 05/18/1987
  • Issued: 11/22/1988
  • Est. Priority Date: 05/18/1987
  • Status: Expired due to Term
First Claim
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1. Capacitive pressure transducer apparatus having a diaphragm in fluid-tight separating relation to regions exhibiting different fluid pressure conditions, said diaphragm including electrically-conductive capacitor electrode surfaces movable therewith, and composite capacitor means disposed in one of said regions, said composite capacitor means including a flexible member having electrically-conductive capacitor electrode surfaces movable therewith in closely-spaced relation to said electrode surfaces of said diaphragm and forming a first variable capacitor therewith, and a relatively rigid member mounting relatively stationary electrically-conductive capacitor electrode surfaces in spaced relation to said electrode surfaces of said flexible member and forming a second variable capacitor therewith, and means mounting said composite capacitor means in position relative to said diaphragm for said diaphragm to physically deflect said flexible member in response to and by amounts related to differences in pressures between said regions beyond a predetermined range, whereby said first variable capacitor exhibits cpacitances related to said differences in pressures within said predetermined range and said second variable capacitor exhibits capacitances related to differences in pressures beyond said range.

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