Vacuum chamber slit valve

• US 4,785,962 A
• Filed: 04/20/1987
• Issued: 11/22/1988
• Est. Priority Date: 04/20/1987
• Status: Expired due to Term

• Current Assignee: Applied Materials Incorporated
• Original Assignee: Applied Materials Incorporated
• Inventors: Toshima, Masato
• Primary Examiner(s): NOT, DEFINED
• Application Number:
  US07/040,287
• Time in Patent Office: 582 Days
• Field of Search: 220/260, 220/263, 220/264, 220/334
• US Class Current: 220/260
• CPC Class Codes: F16K 1/16 with pivoted closure-members
• CPC Class Codes: F16K 51/02 specially adapted for high-vacuum installations
• CPC Class Codes: Y10S 414/139 including wafer charging or discharging means for vacuum chamber

Abstract

A slit valve for sealing an access opening in a vacuum chamber. The slit valve body or door is pivotally mounted adjacent the opening and has a pair of cam blocks mounted at its opposite ends. Cam follower rollers are mounted on a swing arm for reversible pivotal door opening and closing movement effected by a pneumatic cylinder. During closing movement of the swing arm, the cam followers engage the cam block and resiliently pivot the slit valve against the opening. Upon reversed, pivotal opening movement, the cam followers release from the cam block, allowing a spring to return the door to a normally opened position. The slit valve mounting is adapted to provide equal compressive sealing, both top-to-bottom and side-to-side.

Claims

1. A slit valve mechanism for selectively closing an opening in a wall, comprising:

a slit valve body pivotally mounted on the wall adjacent said opening for selectively closing said opening;

means connected to the slit valve body for biasing the slit valve body normally open;

means for closing the slit valve body comprising at least one cam block mounted on the side of the slit valve body opposite said wall and having a camming surface;

a swing arm having a cam follower on one end thereof, said swing arm being mounted for pivotal movement in first and second directions for engaging the cam follower against the cam block during movement in the first direction to cam the slit valve body closed and for releasing the camming force during movement in the second direction to permit the biasing means to open the slit valve body; and

actuator means connected to said swing arm for reciprocally pivoting said swing arm.

2. The slit valve mechanism of claim 1, the slit valve body having a sealing member therein on the side thereof facing the wall for forming a seal between the wall and body about the periphery of the opening;

said closing means comprising a pair of cam blocks and associated cam followers located at spaced positions along said valve body; and

said cam followers being eccentric rollers for compensating unequal side-to-side compressive sealing.

3. The slit valve mechanism of claim 1 or 2, the swing arm being oriented such that the included angle between the swing arm and camming surface in the closed second position is <

90°

for locking the swing arm and cam block in position.

4. The slit valve mechanism of claim 1 or 2, further comprising:

bracket means mounted adjacent the opening and rotatably mounting a shaft extending generally parallel to the opening, the slit valve body being mounted on the shaft for said pivotal opening and closing movement.

5. The slit valve mechanism of claim 4, the swing arm being oriented such that the included angle between the swing arm and the camming surface in the closed second position is <

90°

for locking the swing arm and cam block in position.

6. The slit valve mechanism of claim 2, further comprising:

bracket means mounted adjacent the opening and having slot means oriented transverse to the wall and rotatably mounting a shaft extending generally parallel to the opening, the body being mounted on the shaft for said pivotal opening and closing movement; and

biasing means connected to the slit valve body for normally positioning the body toward the outside edge of slot means, whereby closing movement of the cam follower in the first direction overcomes the spring biasing and linearly moves the slit valve body inwardly along the slot means and against the wall, thereby providing equalized top-to-bottom compression of the body against the wall.

7. The slit valve mechanism of claim 6, the swing arm being oriented such that the included angle between the swing arm and the camming surface in the closed second position is <

90°

for locking the swing arm and cam block in position.

8. The slit valve mechanism of claim 1, 2 or 6, the actuator means comprising a cylinder having an extendible rod and a crank pivotally connected at one end to the rod and adaptively connected at an opposite end to the swing arm for reversibly pivoting the swing arm in said first and second directions in response to extension and retraction of the rod.

9. A slit valve mechanism for selectively closing an opening in a vacuum chamber wall, comprising:

bracket means comprising a pair of brackets mounted adjacent the opening proximate opposite ends thereof, each bracket having a slot therein oriented transverse to the plane of the chamber wall for cooperatively mounting a rotatable shaft generally parallel to the opening;

a slit valve body mounted on the shaft for pivotal movement therewith to open and close the opening, the slit valve body having a sealing member on the side thereof facing the wall for forming a seal between the wall and body about the periphery of said opening;

biasing means operatively connected to the slit valve body for biasing the body normally open;

means for closing the slit valve body comprising at least one cam block mounted on the side of the body opposite the wall and having a camming surface;

a rotatable shaft;

a swing arm mounted on the shaft for rotation and carrying an eccentric cam follower roller on the end thereof opposite the shaft;

actuator means for reciprocally rotating the shaft and the swing arm in first and second directions for engaging the cam block during movement in the first direction to cam the slit valve body closed over the opening and for releasing from the cam block during movement in the second direction to permit the biasing spring to open said slit valve body; and

biasing means connected to the slit valve body for biasing the body toward the outside edge of the elongated slot, whereby closing movement of the cam follower in the first direction overcomes the biasing action and resiliently moves said slit valve body linearly inwardly along the slot and against the wall;

whereby said eccentric cam follower rollers and linear shaft movement provide equalized end-to-end and top-to-bottom compression sealing values.

10. The slit valve mechanism of claim 9, the actuator means comprising a cylinder having an extendible rod;

and a crank pivotally connected at one end to the extendible rod and connected at an opposite end to the rotatable shaft for reversibly rotating the shaft due to extension and retraction of the rod.

11. The slit valve mechanism of claim 9 or 10, the swing arm being oriented such that the included angle between the swing arm and the camming surface in the closed second position is <

90°

for locking the swing arm and cam block in position.