CMOS integrated circuit and process for producing an electric isolation zones in said integrated circuit

• US 4,786,960 A
• Filed: 07/23/1987
• Issued: 11/22/1988
• Est. Priority Date: 08/07/1984
• Status: Expired due to Fees

• Current Assignee: Commissariat a L'Energie Atomique (French Alternative Energies and Atomic Energy Commission)
• Original Assignee: Commissariat a L'Energie Atomique (French Alternative Energies and Atomic Energy Commission)
• Inventors: Jeuch, Pierre
• Primary Examiner(s): James, Andrew J.
• Assistant Examiner(s): Prenty, Mark
• Application Number:
  US07/077,092
• Time in Patent Office: 488 Days
• Field of Search: 357/42, 357/49, 357/55
• US Class Current: 257/374
• CPC Class Codes: H01L 21/743 Making of internal connections, substrate contacts
• CPC Class Codes: H01L 21/763 Polycrystalline semiconductor regions H01L21/76264 takes precedence

Abstract

CMOS integrated circuit and process for the production of electric isolation zones in the integrated circuit.

According to the invention the process comprises the following stages: formation of several trenches in a silicon substrate, thermal oxidation of the substrate leading to the formation of an oxide film on the sides and bottom of the trenches, elimination of the oxide film near the bottom of the trenches and filling the trenches with a conductive material, thus constituting an electrode connected to the substrate corresponding to the circuit earth.

Claims

1. A CMOS integrated circuit having at least one n-channel MOS transistor and at least one p-channel MOS transistor formed on a same silicon substrate having a determined conductivity type and corresponding to the circuit ground, an isolation trench having a layer of insulating material on the side walls of said trench only for electrically isolating said n-channel transistor from said p-channel transistor, a gate common to said n-channel transistor and to said p-channel transistor crossing said isolation trench in a first direction, corresponding to the channel width direction said isolation trench being in direct contact with the channels of said transistors in said first direction at the location where the gate crosses the trench, without there being a field oxide between said transistors and said trench, said trench being filled with a filling conductive material constituting a conductive electrode, which is electrically connected to said substrate and grounded by means of a doping formed in the bottom of said trench and which has the same conductivity type of said substrate.

2. An integrated circuit according to claim 1, wherein the substrate comprises a weakly doped zone surmounting a strongly doped zone, the weakly doped zone being obtained by epitaxy from the strongly doped zone.

3. An integrated circuit according to claim 1, wherein the filling material is polycrystalline silicon or a refractory metal silicide.

4. An integrated circuit according to claim 3, wherein the polycrystalline silicon is n⁺ doped or p⁺ doped.

5. An integrated circuit according to claim 3, wherein the silicide is tungsten silicide.