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CMOS integrated circuit and process for producing an electric isolation zones in said integrated circuit

  • US 4,786,960 A
  • Filed: 07/23/1987
  • Issued: 11/22/1988
  • Est. Priority Date: 08/07/1984
  • Status: Expired due to Fees
First Claim
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1. A CMOS integrated circuit having at least one n-channel MOS transistor and at least one p-channel MOS transistor formed on a same silicon substrate having a determined conductivity type and corresponding to the circuit ground, an isolation trench having a layer of insulating material on the side walls of said trench only for electrically isolating said n-channel transistor from said p-channel transistor, a gate common to said n-channel transistor and to said p-channel transistor crossing said isolation trench in a first direction, corresponding to the channel width direction said isolation trench being in direct contact with the channels of said transistors in said first direction at the location where the gate crosses the trench, without there being a field oxide between said transistors and said trench, said trench being filled with a filling conductive material constituting a conductive electrode, which is electrically connected to said substrate and grounded by means of a doping formed in the bottom of said trench and which has the same conductivity type of said substrate.

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