Crucible for evaporation of metallic film

• US 4,791,261 A
• Filed: 09/23/1987
• Issued: 12/13/1988
• Est. Priority Date: 09/23/1987
• Status: Expired due to Term

• Current Assignee: International Business Machines Corporation
• Original Assignee: International Business Machines Corporation
• Inventors: Strippe, David C., Phinney, Richard R.
• Primary Examiner(s): Leung, Philip H.
• Application Number:
  US07/100,068
• Time in Patent Office: 447 Days
• Field of Search: 219/10.49 R, 219/10.67, 219/10.491, 118/726, 118/727, 118/728, 118/729, 118/50.1, 118/620, 427/45.1, 427/46, 373/155, 373/156, 373/157, 373/163, 373/164
• US Class Current: 219/634
• CPC Class Codes: C23C 14/26 by resistance or inductive heating of the source
• CPC Class Codes: H05B 6/24 Crucible furnaces H05B6/30 takes precedence

Abstract

An evaporation source for RF heated evaporators in which the crucible has a susceptor made of a solid block of graphite carbon having a volume commensurate with the volume of molten material prior to evaporation. Moreover, the crucible has a depth that is less than twice its diameter. These features enhance the self-fractionation of the molten material prior to evaporation to thus enhance the properties of the film as-deposited.

Claims

1. An evaporation source, comprising:

a crucible having a given depth and a given diameter, said crucible containing a volume of molten material to be evaporated;

a susceptor abutting said crucible, said susceptor being a solid columnar block, the volume of said molten material within said crucible prior to evaporation of said molten material being five eights or less of the solid volume of said susceptor; and

a conductive coil disposed about said susceptor and said crucible for coupling RF energy to said susceptor and to said crucible.

2. The evaporation source of claim 1, wherein said depth of said crucible is less than twice said diameter thereof.

3. The evaporation source of claim 1, wherein said susceptor comprises a block of graphite carbon.

4. In a metal evaporation apparatus, a RF heated source comprising:

a RF coil;

a crucible disposed within said RF coil, said crucible having a depth that is less than twice its diameter, said crucible containing a volume of molten material to be evaporated; and

a susceptor abutting and supporting said crucible, said susceptor comprising a solid columnar block of material, the volume of said molten material prior to evaporation being five eights of the volume of the susceptor.

5. The apparatus of claim 4, further comprising a plurality of coaxial heat shields separating said crucible and said susceptor from said RF coil, each of said plurality of coaxial heat shields having an upper edge.

6. The apparatus of claim 5 wherein crucible has a flared mouth that extends above said upper edges of each of said plurality of heat shields.

7. The apparatus of claim 4 wherein said susceptor comprises a block of graphite carbon.

8. In an evaporation apparatus, an evaporation source or promoting self-fractionation of molten material to be evaporated,

a radio frequency heating coil;

a plurality of coaxial heat shields each having an upper edge, said shields being supported within said coil;

a solid columnar susceptor block of a given volume disposed within an innermost one of said plurality of coaxial shields;

a crucible disposed on and abutting said susceptor and containing a volume of molten material to be evaporated, said crucible having a depth that is less than twice its diameter,

the volume of said molten material, being less than five eights of the volume of the susceptor.

9. The apparatus of claim 8 further comprising a plurality of coaxial heat shields separating said crucible and said susceptor from said RF coil, each of said plurality of coaxial heat shields having an upper edge.

10. The apparatus of claim 9 wherein crucible has a flared mouth that extends above said upper edges of each of said plurality of heat shields.

11. The apparatus of claim 9, wherein said susceptor comprises a block of graphite carbon.

12. The apparatus of claim 11 wherein an outermost one of said plurality of heat shields comprises a cup-shaped member made of silica.

13. The apparatus of claim 12, wherein an innermost one of said plurality of heat shields comprises a cup-shaped member made of pyrolytic boron nitride.