Sub-nyquist interferometry

• US 4,791,584 A
• Filed: 10/15/1986
• Issued: 12/13/1988
• Est. Priority Date: 10/15/1986
• Status: Expired due to Fees

• Current Assignee: Eastman Kodak Company
• Original Assignee: Eastman Kodak Company
• Inventors: Greivenkamp, John E. Jr.
• Primary Examiner(s): Lall, Parshotam S.
• Assistant Examiner(s): Ramirez, Ellis B.
• Application Number:
  US06/918,951
• Time in Patent Office: 790 Days
• Field of Search: 356/349, 356/353, 356/358, 356/359, 356/360, 250/550, 364/525, 364/561, 364/563
• US Class Current: 356/513
• CPC Class Codes: G01B 11/303 using photoelectric detection means
• CPC Class Codes: G01B 9/0201 using temporal phase variation
• CPC Class Codes: G01B 9/02038 Shaping the wavefront, e.g. generating a spherical wavefront
• CPC Class Codes: G01B 9/02083 characterised by particular signal processing and presentation
• CPC Class Codes: G01J 9/02 by interferometric methods using interferometers for measuring optically the linear dimensions of objects G01B9/02
• CPC Class Codes: G01M 11/005 Testing of reflective surfaces, e.g. mirrors

Abstract

A technique is described for extending the measurement range of interferometry past the Nyquist limit of the sampling frequency of the interferogram. The absolute phase values measured by an interferometer are reconstructed by applying constraints based upon a priori knowledge of the absolute phase values. The constraints include the knowledge that one or more derivatives of the spatial distribution of phase values is a continuous function, and the knowledge of step heights to within λ/2.

Claims

1. A method of surface measurement interferometry, comprising the steps of:

a. generating a first beam of coherent light;

b. generating a second beam of coherent light;

c. combining the first and second beams to form a interferogram;

d. measuring the phase of the interferogram at a plurality of sampling locations to form samples of the interferogram, said samples representing phase values modulo 2π

; and

e. reconstructing (i.e. removing 2π

phase discontinuities to produce) absolute phase values from said samples by adding to or subtracting from said samples multiples of 2π

, including the step of applying a constraint based upon a priori knowledge of the absolute phase values to correctly reconstruct the absolute phase values when the absolute phase changes by more than π

per sample.

2. The method of interferometry claimed in claim 1, wherein said a priori knowledge is that the phase values have continuous derivatives, and that there is a region in the interferogram where the absolute phase changes by less than π

per sample, and further including the step of starting said step of reconstructing absolute phase values in said region.

3. The method of interferometry claimed in claim 1, wherein said a priori knowledge is the location of a step discontinuity in the interferogram, and the absolute value of the step is known to within less than π

.

4. The method of interferometry claimed in claim 1, wherein the method is phase-shifting interferometry.

5. Apparatus for performing surface measurement interferometry, comprising:

a. means for forming an interferogram;

b. means for sampling phase values modulo 2π

of the interferogram at an array of sampling locations;

c. means for reconstructing (i.e. removing 2π

phase discontinuities to produce) absolute phase values from said phase values modulo 2π

by adding or subtracting multiples of 2π

, including means for constraining the reconstruction of said absolute phase values based upon a priori knowledge of the absolute phase values such that the absolute phase values are correctly reconstructed when the absolute phase changes by more than π

per sample location.

6. The apparatus claimed in claim 5, wherein said a priori knowledge is the knowledge that the phase values are represented by a function having continuous derivatives, and that there is a region in the interferogram where the phase changes by less than π

per sample location, and said reconstructing means beginning said reconstruction at said region, and proceeding outwardly therefrom.

7. the apparatus claimed in claim 6, including means for displaying said interferogram, and means for generating a signal representing a region on said display where the interferogram is free from aliasing, said signal being supplied to said reconstructing means for indicating said starting location.

8. The apparatus claimed in claim 5, wherein said a priori knowledge is the knowledge of the location and height of a step discontinuity in phase to within less than π

.

9. The apparatus claimed in claim 5, wherein said apparatus is a phase shifting interferometer and said means for sampling the phase values modulo 2π

is a sparse array of image sensing elements having g=a/x_x less than 0.5 , where a is the width of the image sensing elements and x_s is the pitch.

10. The apparatus claimed in claim 9 wherein G=0.1.

11. Apparatus for measuring the spatial distribution of phase differences between a test beam and a reference beam of coherent monochromatic light by phase-shifting interferometry, comprising:

a. means for superposing the test beam and reference beam to form an interference pattern;

b. means for detecting the intensity of the interference pattern and for generating signals representing the intensity of the interference pattern at a sparse array of sampling locations;

c. means for displacing the relative phase of the reference beam and the test beam by fractions of a wavelength of the light;

d. means for providing a starting location signal indicating a neighborhood of sampling locations where the phase between the test beam and the reference beam does not change by more than π

between adjacent sampling locations in the neighborhood; and

e. signal processing means connected to said detecting means and said starting location signal providing means and responsive to the starting location signal and the signals representing the intensity of the interference pattern detected at three or more relative phase displacements to produce a signal representing the absolute phase values of said interference pattern at each of said sampling locations, said signal processing means including,

(1) means responsive to the signals representing the intensity of the interference pattern detected at three or more relative phase displacements for generating signals representing phase values modulo 2π

at each sampling location, and

(2) means connected to said means for generating signals representing phase values modulo 2π

responsive to the signals representing phase values modulo 2π

for reconstructing (i.e. removing 2π

phase discontinuities to produce) an absolute phase value at each of said sampling locations, said reconstructing means starting said reconstruction at said starting location, and reconstructing said absolute phase values according to the constraints that the spatial distribution and one or more derivatives of the spatial distribution of the phase values are continuous functions.

12. The apparatus claimed in claim 11, wherein said detecting means comprises a rectangular area array image sensor having a sparse array of image sensing elements.

13. The apparatus claimed in claim 12, wherein said image sensing array is characterized by G=a/x_s =0.1 where a is the width of said image sensing elements in said array and x_s is the pitch of elements in the array.

14. The apparatus claimed in claim 11, wherein said detecting means comprises a rectangular area array image sensor having an overlying mask defining a sparse array of apertures.

15. The apparatus claimed in claim 14, wherein said array of apertures is characterized by G=a/x_s =0.1 where a is the width of one of said apertures, and x_s is the pitch of apertures in the array.

16. The apparatus claimed in claim 11, wherein said apparatus comprises a Twyman-Green interferometer including a test surface and a reference surface for generating said test beam and said reference beam respectively, and said means for displacing the relative phase of the reference beam includes a piezoelectric driver for displacing said reference surface.

17. The apparatus claimed in claim 11, wherein said signal processing means comprises a digital computer.

18. The apparatus claimed in claim 17, further comprising means for generating a visual display of said interference pattern, and said means for providing a starting location signal comprising means for entering data representing the x,y coordinates of a selected region of said visual display into said digital computer.

19. The apparatus claimed in claim 11, wherein the intensity of the interference pattern is displaced and detected at four relative phase displacements separated by equal steps of π

/2, and the means for generating a phase value modulo 2π

solves the following equation;

##EQU5## where φ

(x,y) is the phase value modulo 2π

at sampling location (x,y), and

i_n (x,y) is the measured intensity for the n^th phase displacement at sampling location (x,y).

20. The apparatus claimed in claim 19, wherein said means for reconstructing absolute phase values from phase values modulo 2π

reconstructs two or more adjacent rows (or columns) having samples in the neighborhood of the starting location, then reconstructs the columns (or rows) of values from the values in the two or more reconstructed adjacent rows (or columns).

21. A method of measuring the spatial distribution of phase differences between a test beam and a reference beam of coherent monnochromatic light by phase-shifting interferometry, comprising:

a. superposing the test beam and the reference beam to form an interference pattern;

b. detecting the intensity of the interference pattern at a sparse array of sampling locations for three or more relative phase displacements between the reference beam and the test beam;

c. determining a neighborhood of sampling locations where the phase difference between the test beam and the reference beam does not change by more than π

between adjacent sampling locations in the neighborhood;

processing the intensity values to generate a phase value modulo 2π

at each sampling location; and

d. reconstructing (i.e. removing 2π

phase discontinuities to produce) absolute phase values from said phase values modulo 2π

starting at said starting location and reconstructing said absolute phase values according to the constraint that the spatial distribution and one or more derivatives of the spatial distribution of the phase values are continuous functions.

22. The method claimed in claim 21, wherein said sparse array of sampling locations is characterized by:

space="preserve" listing-type="equation">G=a/x.sub.s =0.1

where

a is the width of a sample and x_s is the pitch of samples in the array.

23. The method claimed in claim 21, wherein the intensity of the interference pattern is detected at four relative phases separated by equal steps of π

/2, and the phase difference values modulo 2π

are generated by solving the following equation;

##EQU6## where φ

(x,y) is the phase difference modulo 2π

at sampling location (x,y) and

i_n (x,y) is the measured intensity for the n^th phase displacement at sampling location (x,y).

24. Apparatus for performing phase-shifting interferometry wherein an array of phase values modulo 2π

are processed to reconstruct an array of absolute phase values by removing 2π

phase discontinuities from the phase values modulo 2π

according to the constraint that the phase values represent a continuous function, characterized by;

the array of phase values being generated from a sparsely sampled interference fringe intensity pattern, and said absolute phase values being reconstructed according to the further constraint that the first and/or higher derivatives of the array of phase values represent a continuous functions, and said reconstruction originating at a location in a neighborhood of the array where the difference in phase from one sampling location to the next is less than π

.