Cryosorption surface for a cryopump

• US 4,791,791 A
• Filed: 01/20/1988
• Issued: 12/20/1988
• Est. Priority Date: 01/20/1988
• Status: Expired due to Term

• Current Assignee: Genesis Vacuum Technologies, Inc.
• Original Assignee: Varian Associates, Inc. (Siemens AG)
• Inventors: Flegal, Christopher M., Porter, John R.
• Primary Examiner(s): Capossela, Ronald C.
• Application Number:
  US07/146,000
• Time in Patent Office: 335 Days
• Field of Search: 62/55.5, 62/268, 55/269, 417/901
• US Class Current: 62/55.5
• CPC Class Codes: F04B 37/08 by condensing or freezing, e.g. cryogenic pumps
• CPC Class Codes: Y10S 417/901 Cryogenic pumps

Abstract

A two-stage cryosorption pump has a first stage at a higher temperature and a second stage at a lower temperature. Sorption surfaces of reticulated vitreous carbon formed on the second stage have high rigidity and exceptionally high void volume.

Claims

1. A cryogenic pump for removing gaseous species from a chamber, comprising:

a first stage having an inlet opening at one end thereof for gaseous communication with the chamber and a generally cylindrical pumping surface maintained at a first temperature for removing a portion of the gaseous species, a second stage positioned coaxially within the first stage and having a pumping surface maintained at a temperature lower than the first temperature for removing an additional portion of the gaseous species, and a plurality of baffle members spaced axially apart between the first and second stages for shielding the pumping surface of the second stage from direct exposure to the inlet opening while permitting substantially unimpeded flow of the gaseous species from the inlet opening to the second stage, said second stage including surfaces of reticulated vitreous carbon.

2. A cryogenic pump as in claim 1 wherein said surfaces of reticulated vitreous carbon are formed by attaching segments of reticulated vitreous carbon panels on metal surfaces of said second stage.

3. A cryogenic pump as in claim 2 wherein said reticulated vitreous carbon panels are attached with low-temperature epoxy adhesive.

4. A cryogenic pump as in claim 1 wherein said surfaces of reticulated vitreous carbon are formed between two sheets of metal, said two sheets of metal having large perforations therein whereby to expose said surfaces of reticulated vitreous carbon to the gaseous species being removed.

5. A cryogenic pump as in claim 1 wherein the pumping surface of the first stage is blackened to prevent reflection of thermal energy from the inlet opening to the pumping surface of the second stage.

6. A cryogenic pump as in claim 1 wherein the baffle members include a first baffle member having a generally planar portion positioned axially between the inlet opening and the second stage and a frusto-conical portion extending outwardly from the generally planar portion and away from the inlet opening, and a second baffle positioned radially adjacent said second stage and having a frusto-conical wall of larger diameter than the frusto-conical portion of the first baffle member.

7. A cryogenic pump as in claim 3 wherein the baffle members include radially extending annular plates.

8. A cryogenic pump as in claim 3 wherein the first stage comprises a ring adjacent the inlet opening, a support plate at the end of the stage opposite the inlet opening, and a plurality of individual leaves extending between the ring and plate to form the generally cylindrical pumping surface.

9. A cryogenic pump as in claim 8 wherein the leaves are formed to provide a radial bulge for increased gas flow in the vicinity of said second stage.

10. A cryogenic pump as in claim 3 wherein the baffle members are maintained at substantially the temperature of said first stage.

11. A cryogenic pump for removing gaseous species from a chamber, comprising a first stage having an inlet opening at one end thereof for gaseous communication with the chamber and a generally cylindrical pumping surface maintained at a first temperature for removing a portion of the gaseous species, a second stage positioned coaxially within the first stage and having a pumping surface maintained at a temperature lower than the first temperature for removing an additional portion of the gaseous species, the pumping surface of the first stage being blackened to prevent reflection of thermal energy from the inlet opening to the pumping surface of the second stage, a first baffle having a first portion positioned axially between the inlet opening and the second stage and a frusto-conical portion extending outwardly from the first portion and away from the inlet opening and second baffle member of frusto-conical shape positioned radially adjacent the second stage and having a greater diameter than the frusto-conical portion of the first baffle member, said baffle members being maintained at substantially the temperature of the first stage and shielding the pumping surface of the second stage from direct exposure to the inlet opening while permitting substantially unimpeded flow of the gaseous species from the inlet opening to the second stage, said second stage including surfaces of reticulated vitreous carbon.

12. A cryogenic pumping apparatus having pumping surfaces maintained at a predetermined temperature for condensation and adsorption of gaseous species, comprising:

a frame having an axially extending core portion and a plurality of fins extending radially from the core portion, a group of axially spaced generally parallel plate members extending outwardly from the core portion between adjacent ones of the fins and inclined at a predetermined angle to the axis of the core portion, a surface of reticulated vitreous carbon formed on at least one surface of each of the plate members, and removable fasteners securing the plate members to the fins.

13. A cryogenic pump as in claim 12 wherein said surfaces of reticulated vitreous carbon are formed by attaching segments of reticulated vitreous carbon panels on metal surfaces of said second stage.

14. A cryogenic pump as in claim 13 wherein said reticulated vitreous carbon panels are attached with low-temperature epoxy adhesive.

15. A cryogenic pump as in claim 12 wherein said surfaces of reticulated vitreous carbon are formed between two sheets of metal, said two sheets of metal having large perforations therein whereby to expose said surfaces of reticulated vitreous carbon to the gaseous species being removed.

16. The apparatus of claim 12 wherein the plate members have generally planar web portions with mounting portions at the sides of the web portions adjacent the radial fins of the frame.

17. Cryogenic pumping apparatus for removing gaseous species from a chamber, comprising:

means forming an inlet opening for gaseous communications with the chamber, a first stage extending axially from the inlet opening and having a pumping surface maintained at a first temperature for removing a portion of the gaseous species, and a second stage positioned coaxially within the first stage and having a plurality of pumping surfaces maintained at a temperature lower than the first temperature for removing an additional portion of the gaseous species, said first stage including a louvered thermal shield positioned between the inlet opening and the second stage for preventing thermal radiation from the chamber from falling directly on the pumping surfaces of the second stage while permitting relatively unimpeded flow of gaseous species from the inlet opening to the second stage, said second stage comprising a frame having an axially extending core portion and a plurality of fins extending radially from the core portion, a plurality of axially spaced generally parallel plate members extending outwardly from the core portion and extending away from the inlet opening and extending between adjacent ones of the fins, a surface of recticulated vitreous carbon formed on at least one surface of each of the plate members, and removable fasteners securing the plate members to the fins.

18. A cryogenic pumping apparatus as in claim 17 wherein said surfaces of reticulated vitreous carbon are formed by attaching segments of reticulated vitreous carbon panels on metal surfaces of said second stage.

19. A cryogenic pumping apparatus as in claim 17 wherein said surfaces of reticulated vitreous carbon are formed between two sheets of metal, said two sheets of metal having large perforations therein whereby to expose said surfaces of reticulated vitreous carbon to the gaseous species being removed.

20. A cryogenic pumping apparatus for removing gaseous species from a chamber, comprising:

means forming an inlet opening for gaseous communication with the chamber, a first stage extending from the inlet opening and having a pumping surface maintained at a first temperature for removing a portion of the gaseous species, and a second stage positioned within the first stage and maintained at a temperature lower than the first temperature for removing an additional portion of the gaseous species, said first stage including a thermal shield means positioned between the inlet opening and the second stage for preventing thermal radiation from the chamber from falling directly on the second stage while permitting relatively unimpeded flow of gaseous species from the inlet opening to the second stage, said second stage comprising a frame having an axially extending core portion and a plurality of fins extending radially from the core portion, a plurality of individual plate members removably mounted on the frame to form pumping surfaces for the gaseous species, said plate members being axially spaced and generally parallel, and said plate members extending outwardly from the core portion and extending between adjacent ones of the fins, a surface of reticulated vitreous carbon formed on at least one surface of each of the plate members, said plate members being generally planar web portions with mounting portions at the sides of the web portions adjacent the radial fins of the frame, and removable fasteners securing the plate members to the fins.