In situ conductivity monitoring technique for chemical/mechanical planarization endpoint detection

• US 4,793,895 A
• Filed: 01/25/1988
• Issued: 12/27/1988
• Est. Priority Date: 01/25/1988
• Status: Expired due to Term

• Current Assignee: International Business Machines Corporation
• Original Assignee: International Business Machines Corporation
• Inventors: Leach, Michael A., Kaanta, Carter W.
• Primary Examiner(s): Powell, William A.
• Application Number:
  US07/147,422
• Time in Patent Office: 337 Days
• Field of Search: 156/626, 156/627, 156/636, 156/637, 156/639, 156/645, 156/662, 156/903, 156/345, 51/281 R, 51/317
• US Class Current: 438/17
• CPC Class Codes: B24B 37/013 Devices or means for detecting lapping completion
• CPC Class Codes: B24B 49/04 involving measurement of the workpiece at the place of grinding during grinding operation
• CPC Class Codes: B24B 49/10 involving electrical means B24B49/02, B24B49/08 take precedence
• CPC Class Codes: G01N 27/041 of a solid body

Abstract

An apparatus and method for monitoring the conductivity of a semiconductor wafer during the course of a polishing process. A polishing pad that contacts the wafer has an active electrode and at least one passive electrode, both of which are embedded in the polishing pad. A detecting device is connected to the active and passive electrodes for monitoring the current between the electrodes as the wafer is lapped by the polishing pad. The etch endpoint of the wafer is determined as a function of the magnitude of the current flow.

Claims

1. An apparatus for monitoring the conductivity of an exposed surface of a workpiece during polishing in a lapping machine, comprising:

a plurality of isolated electrode means coupled to the lapping machine, at least one of said plurality of isolated electrode means contacting a surface of the workpiece; and

means for monitoring current flow between said plurality of isolated electrode means, said current indicating the amount of conductive material at the exposed surface of the substrate.

2. The apparatus according to claim 1, wherein the lapping machine comprises a polishing table, a polishing pad coupled to said polishing table, and a spinning wafer carrier suspended above said polishing table for bringing the workpiece into contact with said polishing pad.

3. The apparatus according to claim 2, wherein said plurality of isolated electrode means are embedded in said polishing pad.

4. The apparatus according to claim 3, wherein said plurality of isolated electrode means are provided by perforations in said polishing pad that are filled with conductive material.

5. The apparatus according to claim 3, wherein said plurality of isolated electrode means comprise a conductive material is selected from the group consisting of conductive epoxy, silver, graphite, copper, and aluminum.

6. The apparatus according to claim 2, wherein said plurality of isolated electrode means comprise first, second, and third electrodes embedded in said polishing pad.

7. The apparatus according to claim 6, wherein said means for monitoring current flow comprises:

a first comparator coupled to said second electrode, said first comparator producing a first signal that indicates the presence of current flow between said first and second electrodes;

a second comparator coupled to said third electrode, said second comparator producing a second signal that indicates the presence of current flow between said first and third electrodes, and;

a third comparator coupled to said first and second comparators for detecting the simultaneous presence of said first and second signals.

8. The apparatus according to claim 7, wherein said electrodes are arranged in a triangular manner in said polishing pad.

9. An apparatus for determining an etch endpoint, during a lapping process, of a work piece having at least one conductive portion and at least one insulative portion, comprising:

means for planarizing the work piece;

an active electrode and at least one passive elecrode, both of which are coupled to said planarizing means; and

means, coupled to said active and said at least one passive electrode, for electrically detecting when said active and passive electrodes contact the conductive portion of the work piece, whereby the etch endpoint of the work piece is determined by monitoring an output of said detecting means.

10. The apparatus according to claim 9, wherein said planarizing means comprises a polishing table having a polishing pad disposed thereon.

11. The apparatus according to claim 10, wherein said polishing table has a platen for supporting said polishing pad.

12. The apparatus according to claim 10, wherein said active electrode and said at least one passive electrode are embedded in said polishing pad.

13. The apparatus according to claim 10, wherein said active electrode and said at least one passive electrode are defined by holes of said perforated polishing pad which are filled with conductive epoxy material.

14. The apparatus according to claim 11, further comprising insulated contacts located in said platen, said contacts having conductive portions for connecting said active electrode and said at least one passive electrode to said detecting means.

15. A polishing pad for controllably lapping a work piece having at least one insulative portion and at least one non-insulative portion, said pad comprising an insulative support structure having an active electrode and at least one passive electrode embedded therein, said active and passive electrodes contacting respective portions of the work piece, so that during the lapping process the existence of current flow through said passive electrode indicates that portions of the non-insulative portion of the work piece are in contact with both the active and passive electrodes of the polishing pad.

16. The apparatus according to claim 15, wherein said polishing pad has a plurality of perforations, selected ones of said perforations being at least partially filled with conductive material to provide said electrodes.

17. The apparatus according to claim 16, wherein said conductive material is selected from the group consisting of conductive epoxy, silver, graphite, and copper.

18. A method for monitoring the conductivity of a work piece during the course of a lapping process carried out in a lapping machine having a polishing pad that contacts the work piece, the polishing pad having an active electrode and at least one passive electrode contacting the work piece, comprising the step of:

monitoring the current flow between said active and at least one passive electrode of the polishing pad during the polishing process.