Mass flow controller

• US 4,794,947 A
• Filed: 06/30/1987
• Issued: 01/03/1989
• Est. Priority Date: 11/29/1986
• Status: Expired due to Fees

• Current Assignee: Kabushiki Kaisha Nippon IC
• Original Assignee: Kabushiki Kaisha Nippon IC
• Inventors: Kuramochi, Atsuo
• Primary Examiner(s): Cohan, Alan
• Application Number:
  US07/068,186
• Time in Patent Office: 553 Days
• Field of Search: 137/486, 137/487.5, 73/202, 73/204, 251/129.18, 251/129.21
• US Class Current: 137/486
• CPC Class Codes: G01F 1/68 by using thermal effects
• CPC Class Codes: G01F 1/6847 where sensing or heating elements are not disturbing the fluid flow, e.g. elements mounted outside the flow duct
• CPC Class Codes: G05D 7/0635 by action on throttling means G05D7/0688, G05D7/0694 take precedence
• CPC Class Codes: Y10T 137/7759 Responsive to change in rate of fluid flow
• CPC Class Codes: Y10T 137/7761 Electrically actuated valve

Abstract

A mass flow controller includes a mass flow control unit connected to a mid portion of a conduit, the mass flow control unit having a by-pass and a mass flow sensor on the upstream side thereof and a flow regulating valve on the downstream side thereof. The mass flow sensor is communicated with the flow regulating valve through an automatic controlling circuit. The by-pass and the mass flow sensor as well as the flow regulating valve are arranged such that they are successively disposed in series in a straight-line manner from the upstream side to the downstream side of the mass flow control unit.

Claims

1. An apparatus for controlling the mass flow of a gas through a conduit, said apparatus comprising:

a housing having therethrough a longitudinal passage and to be connected to a conduit such that an inlet end of said passage receives gas from the conduit and an outlet end of said passage discharges gas to the conduit;

at least one by-pass within said passage adjacent said inlet end thereof for passing therethrough the gas;

a mass flow sensor positioned within said passage adjacent the outlet of said by-pass for sensing the mass flow of the gas passing through said by-pass and for generating a signal representative thereof;

a flow regulating valve positioned within said passage adjacent said outlet end thereof, said valve comprising a member defining an orifice communicating with said outlet end, and an armature positioned between said sensor and said orifice defining member and having a seal member directed toward said orifice, said armature being movable longitudinally within said passage between a closed position whereat said seal member blocks said orifice and opened positions whereat said seal member is spaced from said orifice;

an electromagnetic coil within said housing at a position surrounding said armature;

automatic control circuit means, connected to said sensor for receiving said signal therefrom and connected to said electromagnetic coil, for energizing said electromagnetic coil to generate a field to move said armature between said closed and open positions thereof, and thereby for controlling the flow of gas through said orifice as a function of the mass flow of gas detected by said sensor; and

means for selectively adjusting the respective longitudinal positions of said orifice defining member and said electromagnetic coil within said housing.

2. An apparatus as claimed in claim 1, wherein said adjusting means comprises a reduced diameter cylindrical casing mounted within said housing and having an outlet end adjacent said outlet end of said passage and an inlet end directed toward said sensor, said armature being freely longitudinally movably mounted within said inlet end of said casing, said orifice defining member being adjustably threadedly mounted within said outlet end of said casing, and said electromagnetic coil being adjustably threadedly mounted about said inlet end of said casing.