Aplanatic and quasi-aplanatic diffraction gratings

• US 4,798,446 A
• Filed: 09/14/1987
• Issued: 01/17/1989
• Est. Priority Date: 09/14/1987
• Status: Expired due to Fees

• Current Assignee: United States Of America As Represented By The Department Of Energy
• Original Assignee: United States Department of Energy
• Inventors: Hettrick, Michael C.
• Primary Examiner(s): Arnold, Bruce Y.
• Application Number:
  US07/095,715
• Time in Patent Office: 491 Days
• Field of Search: 350/162.21-162.24
• US Class Current: 359/570
• CPC Class Codes: G02B 5/1838 for use with ultraviolet radiation or X-rays
• CPC Class Codes: G02B 5/1861 Reflection gratings characterised by their structure, e.g. step profile, contours of substrate or grooves, pitch variations, materials G02B5/1809, G02B5/1828, G02B5/1833, G02B5/1838 and G02B5/1847 take precedence

Abstract

A reflection diffraction grating having a series of transverse minute grooves of progressively varying spacing along a concave surface enables use of such gratings for X-ray or longer wavelength imaging of objects. The variable groove spacing establishes aplanatism or substantially uniform magnification across the optical aperture. The grating may be used, for example, in X-ray microscopes or telescopes of the imaging type and in X-ray microprobes. Increased spatial resolution and field of view may be realized in X-ray imaging.

Claims

1. A grazing incidence diffraction grating for focusing intercepted x-rays from a first region into an image at a substantially normal incidence focal surface located at another region, said grating having a concave surface formed of reflective material and having a plurality of transverse grooves in said concave surface which define a series of diffraction zones along said concave surface, wherein the spacing of corresponding points in successive ones of said grooves progressively varies along at least a portion of said concave surface and wherein the change of spacing at successive grooves establishes substantially similar magnification along all ray paths from said grating to said focal surface.

2. The diffraction grating of claim 1 wherein said concave surface is spherical.

3. The diffraction grating of claim 1 wherein said concave surface is configured to redirect divergent ray paths originating at a point in said first region into diffracted ray paths of a predetermined spectral order that converge at said focal surface and wherein said grooves have a spacing in accordance with the expression:

space="preserve" listing-type="equation">α

(φ

)=mλ

*/[sin β

(φ

)-sin α

(φ

)]ps

where;

α

(φ

) is the groove spacing at a location situated at an angle φ

relative to the center of curvature of said concave surface, m is said predetermined spectral order,

5. The diffraction grating of claim 3 having a configuration which also satisfies the expression:

space="preserve" listing-type="equation">sin α

.sub.o /r.sub.o +sin β

.sub.o /r.sub.o '"'"'=1/2(tan α

.sub.o +tan β

.sub.o /R

resulting in;

space="preserve" listing-type="equation">r.sub.o =2R cos α

.sub.o (tan α

.sub.o +tan β

.sub.o /M)/(tan α

.sub.o +tan β

.sub.o)

space="preserve" listing-type="equation">and;

space="preserve" listing-type="equation">r.sub.o '"'"'=Mr.sub.o cos β

.sub.o /cos α

.sub.o

wherein the subscript o denotes that the quantity is defined at the point where the principal ray path strikes said grating and wherein R is the radius of curvature of said concave surface r is the object distance, r'"'"' is the image distance, and M is a predetermined magnification factor.

4. λ

* is a predetermined wavelength with which said grating is to be operated, α

(φ

) is the angle of incidence of the intercepted ray path at said location and β

(φ

) is the angle of diffraction of the diffracted ray path which originates at said location.

6. The diffraction grating of claim 4 wherein said magnification factor M is equal to one and said grating has a configuration locating the center of said focal surface and the origin point of said ray paths at a circle which has a center of curvature coincident with the center of curvature of said concave surface.

7. The diffraction grating of claim 4 wherein said magnification factor M is substantially infinite and wherein said grating has a configuration locating the origin point of said ray paths at a circle having a diameter equal to the radius of curvature of said concave surface and which is tangent to said concave surface at the point where the principal ray path strikes said grating.

8. The diffraction grating of claim 4 wherein said magnification factor M is a finite number other than one and wherein said grating has a configuration locating said focal surface at a region outside of a circle which has a center of curvature coincident with the center of curvature of said concave surface and locating the origin point of said ray paths between said circle and another circle having a diameter equal to the radius of curvature of said concave surface and which is tangent to said concave surface at the point where the principal ray path strikes said grating.

9. The diffraction grating of claim 4 wherein said magnification factor M is equal to one and said grating has a configuration locating the center of said focal surface and the origin point of said ray paths at a circle which has a center of curvature coincident with the center of curvature of said concave surface, said origin point being at a location on said circle where the principal ray path strikes said grating at a 45 degree angle of incidence and said focal surface center being at a point on said circle where the principal diffracted ray path leaves said grating at a 45 degree angle whereby said grating is aplanatic and produces a two dimensional image at said focal surface.

10. The diffraction grating of claim 8 wherein the largest groove spacing is at the region where said principal ray strikes said grating and wherein said groove spacing decreases outwardly from said region in each of two opposite directions.

11. In an optical system for producing a two dimensional image of an object at a spaced apart focal surface, the combination comprising first and second reflection diffraction gratings disposed between said object and focal surface, said first diffraction grating having a first concave surface formed of reflective material which is positioned to intercept rays from said object at grazing incidence and to direct convergent diffracted rays towards said second diffraction grating, said second diffraction grating having a second concave surface formed of reflective material and which is positioned to receive said diffracted rays from said first diffraction grating at grazing incidence and to direct convergent re-diffracted rays to said focal surface at normal incidence, said first and second concave surfaces being oriented in orthogonal relationship, and wherein each of said concave surfaces has a plurality of grooves formed therein which grooves are transverse to the path of intecepted rays and which form a series of diffraction zones on said gratings, said grooves at each of said concave surfaces having a progressively varying spacing therealong which establishes a substantially uniform magnification across the optical aperture of said system.