Galvanometric optical scanning system having synchronization photodetectors
First Claim
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1. A galvanometric optical scanning system, comprising:
- a scanning mirror rotatably supported on an axis;
mirror drive means for driving the said scanning mirror in an angularly reciprocating fashion about the said axis;
a light source for projecting a beam of light towards the scanning mirror to scan an object with the deflected beam of light deflected from the said scanning mirror;
galvanometer controller means for applying a drive signal to the said mirror drive means;
at least two synchronization photodetector means positioned in an optical path of the deflected beam to generate synchronization pulses upon impinging of the deflected beam thereon;
synchronization circuit means connected to said synchronization photodetector means for processing said synchronization pulses to generate correction signals indicative of phase variation φ
, offset Eoff and gain drift Egain of the drive signal, according to the following equations;
##EQU2## where t1, t2, t3 and t4 are timings of four synchronization pulses in each scan cycle andT1 =t2 -t1T2 =t4 -t3 and Tref is a preset reference value; and
means for applying any or all of the said correction signals to the said galvanometer controller means so that the said drive signal is compensated.
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Abstract
A galvanometric optical scanning system is disclosed. In order to compensate errors in phase, zero drift etc., at least two synchronization photodetector means are provided in an optical path of scanning beam of light. The pulses produced by the photodetector means are processed to generate correction signals for various commpensations.
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6 Claims
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1. A galvanometric optical scanning system, comprising:
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a scanning mirror rotatably supported on an axis; mirror drive means for driving the said scanning mirror in an angularly reciprocating fashion about the said axis; a light source for projecting a beam of light towards the scanning mirror to scan an object with the deflected beam of light deflected from the said scanning mirror; galvanometer controller means for applying a drive signal to the said mirror drive means; at least two synchronization photodetector means positioned in an optical path of the deflected beam to generate synchronization pulses upon impinging of the deflected beam thereon; synchronization circuit means connected to said synchronization photodetector means for processing said synchronization pulses to generate correction signals indicative of phase variation φ
, offset Eoff and gain drift Egain of the drive signal, according to the following equations;
##EQU2## where t1, t2, t3 and t4 are timings of four synchronization pulses in each scan cycle andT1 =t2 -t1 T2 =t4 -t3 and Tref is a preset reference value; and means for applying any or all of the said correction signals to the said galvanometer controller means so that the said drive signal is compensated. - View Dependent Claims (2, 3, 4, 5, 6)
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Specification