Microfilter foil and method of producing same

• US 4,801,379 A
• Filed: 07/15/1987
• Issued: 01/31/1989
• Est. Priority Date: 07/23/1986
• Status: Expired due to Term

• Current Assignee: Sulzer Brothers, Ltd (Sulzer AG)
• Original Assignee: Sulzer Brothers, Ltd (Sulzer AG)
• Inventors: Ruegg, Thomas, Ehrsam, Christian
• Primary Examiner(s): Sever, Frank
• Application Number:
  US07/073,812
• Time in Patent Office: 566 Days
• Field of Search: 210/500.25, 210/500.26, 210/483, 210/496, 210/500.1, 210/500.22, 210/500.24, 210/500.27, 210/500.35, 210/500.36, 210/500.42, 210/500.4 3, 264/22, 264/41, 264/42, 264/45.1, 264/DIG. 48, 264/DIG. 70, 204/11, 204/15
• US Class Current: 210/498
• CPC Class Codes: B01D 2323/02 Hydrophilization
• CPC Class Codes: B01D 2325/022 Asymmetric membranes
• CPC Class Codes: B01D 67/0062 by micromachining techniques, e.g. using masking and etching steps, photolithography
• CPC Class Codes: B01D 69/02 characterised by their properties
• CPC Class Codes: B01D 71/02 Inorganic material
• CPC Class Codes: G03F 7/0015 Production of aperture devices, microporous systems or stamps
• CPC Class Codes: Y10S 264/48 Processes of making filters
• CPC Class Codes: Y10S 264/70 Processes for forming screens or perforating articles

Abstract

The microfilter foil is made of an inorganic substance such as metal with opened pores. Each pore is formed with a channel which increases in cross-section from the crest so as to obviate clogging. The foil is produced by exposure of a photosensitive layer of paint or lacquer with the use of an interference pattern produced by monochromatic and coherent light. A skin of inorganic material is produced on the photosensitive layer and portions of the skin are thereafter removed from the coated teeth in order to produce the pores in the subsequently formed foil.

Claims

1. A microfilter foil of inorganic material having a filtering surface on one side, a plurality of discrete hollow protuberances extending from said surface, each said protuberance having a pore opening at a crest thereof and a pore channel extending therethrough with an increasing cross-section in a direction from said crest.

2. A microfilter foil as set forth in claim 1 wherein said foil is a one-piece asymmetrical structure.

3. A microfilter foil as set forth in claim 1 wherein said pores are of substantially the same size and have an average diameter of approximately form 0.1 to 1 μ

m.

4. A microfilter foil as set forth in claim 3 wherein said foil is of a thickness substantially equal to said average pore diameter.

5. A microfilter foil as set forth in claim 3 wherein said pores are spaced apart a distance from two to five times said average pore diameter.

6. A microfilter foil as set forth in claim 3 wherein discrete pore openings in any two directions perpendicular to one another are of the same diameter.

7. A microfilter foil as set forth in claim 3 wherein discrete pore openings in any two directions perpendicular to one another are of different diameters.

8. A microfilter foil as set forth in claim 7 wherein each pore opening is of slot-like shape.

9. A microfilter foil as set forth in claim 1 wherein said pore openings have non-planar edges.

10. A microfilter foil as set forth in claim 1 wherein said pore openings are coplanar.

11. In combination

a microfilter foil of inorganic material having a filtering surface on one side, a plurality of discrete hollow protuberances extending from said surface, each said protuberance having a pore opening at a crest thereof and a pore channel extending therethrough with an increasing cross-section in a direction from said crest;

and

an open-pore support structure supporting said foil on a side opposite said one side and having pore openings of greater size than said pore openings of said foil.

12. A method of producing a microfilter foil comprising the steps of

forming a photosensitive layer of a material selected from the group consisting of paint and lacquer on a substrate;

exposing the photosensitive layer to an interference pattern produced with monochromatic and coherent light to form a relief surface having a plurality of discrete protuberances thereon;

forming a skin of inorganic material on and over said protuberances of said relief surfaces;

thereafter removing inorganic material from over said protuberances along with a portion of each protuberance to define perforations in said skin; and

removing the remainder of the photosensitive layer to obtain a foil of inorganic material with a plurality of discrete protuberances, each said protuberance having a pore opening in a crest thereof.

13. A method as set forth in claim 12 wherein the relief surface includes upright teeth, troughs and saddles, and wherein the inorganic material is broken off from above said teeth.

14. A method as set forth in claim 12 wherein said step of removing inorganic material includes peeling of a layer of inorganic material from said skin with the remaining inorganic material defining the foil.

15. A method as set forth in claim 12 wherein the skin is formed by cathodic separation.

16. A method as set forth in claim 12 wherein the substrate is a glass plate reflecting at most 3% of the incident light.