Transport container with an interchangeable inside container
First Claim
Patent Images
1. A transport container for transporting and storing semiconductor wafers in a semiconductor wafer cassette, comprising:
- an outside hood;
an outside bottom plate;
an inside hood;
an inside bottom plate that forms a closed inside container with said inside hood;
first and second closing levers for non-positive closing of said outside hood with said outside bottom plate;
a sealing element for air-tight closure of said transport container; and
an interchangeable semiconductor wafer holder secured to said inside hood and hingedly moveable relative to said transporting container.
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Abstract
A transport container with an interchangeable, bipartite inside container includes an outside hood, an outside bottom plate, an inside hood, an inside bottom plate, two closing levers, a sealing element and a semiconductor holder. A filter element is built into the container to provide a particle-type transportation container for transporting and storing semiconductor wafers in a semiconductor wafer cassette and for use in differing air pressure conditions and air purity conditions.
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Citations
11 Claims
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1. A transport container for transporting and storing semiconductor wafers in a semiconductor wafer cassette, comprising:
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an outside hood; an outside bottom plate; an inside hood; an inside bottom plate that forms a closed inside container with said inside hood; first and second closing levers for non-positive closing of said outside hood with said outside bottom plate; a sealing element for air-tight closure of said transport container; and an interchangeable semiconductor wafer holder secured to said inside hood and hingedly moveable relative to said transporting container. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11)
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Specification