Monolythic resonator vibrating beam accelerometer
First Claim
1. A monolithic resonator and flexure structure for a vibrating beam accelerometer comprising:
- (a) a planar member of piezoelectric material having a first portion with a first mounting surface, a second portion with a second mounting surface spaced therefrom, and a vibrating beam disposed in an intermediate portion disposed between said first and second portions and respective mounting surfaces;
(b) first and second flexures disposed at the top and bottom of said intermediate portion, coupling said first and second portions with the respective mounting surfaces; and
(c) a first arm rigidly connected to said first portion and coupling said vibrating beam to said first portion with the first mounting surface at the top of said vibrating beam, and a second arm rigidly connected to said second portion and coupling said vibrating beam to said second portion with the second mounting surface at the bottom of said vibrating beam whereby relative movement of said first and second portions with respective mounting surfaces, permissible because of said first and second flexures, will cause said beam to be placed under compression or tension, depending on the relative direction of movement.
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Accused Products
Abstract
In order to implement a vibrating beam accelerometer, preferably in a dual beam configuration, a monolithic piezoelectric structure which includes at least a first mounting surface, a second mounting surface spaced therefrom and between the mounting surfaces and coupled thereto a vibrating beam, is provided. The two mounting surfaces are connected to each other by flexures so that relative movement between them is possible. This structure results in a closed path from mounting surface to vibrating beam to mounting surface avoiding problems present in prior art devices in which there were joints at three different points within the closed path.
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Citations
9 Claims
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1. A monolithic resonator and flexure structure for a vibrating beam accelerometer comprising:
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(a) a planar member of piezoelectric material having a first portion with a first mounting surface, a second portion with a second mounting surface spaced therefrom, and a vibrating beam disposed in an intermediate portion disposed between said first and second portions and respective mounting surfaces; (b) first and second flexures disposed at the top and bottom of said intermediate portion, coupling said first and second portions with the respective mounting surfaces; and (c) a first arm rigidly connected to said first portion and coupling said vibrating beam to said first portion with the first mounting surface at the top of said vibrating beam, and a second arm rigidly connected to said second portion and coupling said vibrating beam to said second portion with the second mounting surface at the bottom of said vibrating beam whereby relative movement of said first and second portions with respective mounting surfaces, permissible because of said first and second flexures, will cause said beam to be placed under compression or tension, depending on the relative direction of movement. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9)
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Specification