Micromechanical atomic force sensor head

• US 4,806,755 A
• Filed: 10/01/1987
• Issued: 02/21/1989
• Est. Priority Date: 10/03/1986
• Status: Expired due to Term

• Current Assignee: International Business Machines Corporation
• Original Assignee: International Business Machines Corporation
• Inventors: Wolter, Olaf, Gimewski, James K., Duerig, Urs T., Greschner, Johann, Pohl, Wolfgang D.
• Primary Examiner(s): Anderson, Bruce C.
• Application Number:
  US07/103,993
• Time in Patent Office: 509 Days
• Field of Search: 250/306, 250/307, 250/423 F
• US Class Current: 850/7
• CPC Class Codes: B82Y 35/00 Methods or apparatus for measurement or analysis of nanostructures
• CPC Class Codes: G01Q 20/04 Self-detecting probes, i.e. wherein the probe itself generates a signal representative of its position, e.g. piezoelectric gauge
• CPC Class Codes: G01Q 60/38 Probes, their manufacture, or their related instrumentation, e.g. holders
• CPC Class Codes: Y10S 977/863 Atomic force probe

Abstract

The micromechanical sensor head is designed to measure forces down to 10^-13 N. It comprises a common base from which a cantilever beam and a beam member extend in parallel. The cantilever beam carries a sharply pointed tip of a hard material, dielectric or not, for interaction with the surface of a sample to be investigated. Bulges forming a tunneling junction protrude from facing surfaces of said beams, the gap between said bulges being adjustable by means of electrostatic forces generated by a potential (V_d) applied to a pair of electrodes respectively coated onto parallel surface of said beams. The sensor head consists of one single piece of semiconductor material, such as silicon or gallium arsenide (or any other compounds thereof) which is fabricated to the dimensions required for the application by means of conventional semiconductor chip manufacturing techniques.

Claims

1. A micromechanical atomic force sensor head comprising at least one cantilever beam fixed at one end and carrying a sharp point at a location distant from said fixed end for interaction with a surface of a sample to be investigated, and detection means for detecting the deflection of said cantilever beam as it interacts with said investigated surface, said cantilever beam and said detection means forming one integral part micromechanically manufactured from one piece of material.

said detection means extending in parallel with said cantilever beam from a common base, there being a gap between said cantilever beam and said detection means,

a pair of tunnel electrodes attached to facing surfaces of said cantilever beam and said detection means, the distance between said tunnel electrodes being adjustable, and

a pair of electrostatic electrodes across which a potential is applied to adjust the distance between said electrostatic electrodes, said electrostatic electrodes being located with respect to said cantilever beam and said detection means that a potential applied across said electrostatic electrodes varies said adjustable distance between said tunneling electrodes thereby adjusting the tunnel current there between.

2. The sensor head of claim 1, wherein said detection means is a rigid beam which extends from said base in parallel with said cantilever beam, there being a gap there between, said pair of tunnel electrodes protruding from said cantilever beam and said rigid beam into said gap, said pair of electrostatic electrodes being mutually aligned deflection electrodes located on said cantilever beam and said rigid beam.

3. The sensor head of claim 1, wherein said detection means is a flexible beam extending in parallel with said cantilever beam from said common base, there being a gap between said beams.

a tunneling junction formed by a conductive first electrode located at the free end of said cantilever beam and a second electrode extending from said flexible beam and aligned with said first electrode, the distance between said first and second tunnel electrodes being adjustable by means of an electrostatic field applied between said pair of electrostatic electrodes.

4. The sensor head of claim 3, wherein said sharp point is located on said cantilever beam at the free end thereof in juxtaposition with said tunneling junction.

5. The sensor head of claim 3, wherein said sharp point is located on said cantilever beam about half way between the fixed end of said cantilever beam and said tunneling junction.

6. The sensor head of claim 1, wherein said detection means is a flexible beam extending in parallel with said cantilever beam from said common base, there being a gap between said beams,

tunneling junction formed by a conductive first electrode located at the free end of said cantilever beam and a second electrode extending from said flexible beam and aligned with said first electrode, the distance between said first and second tunnel electrodes being adjustable by means of a first electrostatical field applied between a first pair of electrodes disposed respectively on facing surfaces of said cantilever beam and a fixed wall, and a second electrostatical field applied between a second pair of electrodes disposed respectively on facing surfaces of said flexible beam and said fixed wall, said wall being attached to said common base.

7. The sensor head of claim 1, wherein said detection means includes a rigid beam fixed to a wall and extending from a common base in parallel with said cantilever beam, there being an oblique gap between said beams, said tunneling junction being formed by said pair of tunnel electrodes which are respectively attached to oblique facing shoulders of said beams, said cantilever beam and said wall carrying mutually facing electrostatic electrodes for adjusting the width of the tunneling gap of said tunneling junction through the application of a deflection potential to said electrostatic electrodes.

8. The sensor head of claim 1, wherein said detection means includes a flexible beam extending in parallel with said cantilever beam from said common base there being an oblique gap between said beams, a tunneling junction formed by said pair of tunnel electrodes which are respectively attached to oblique, facing shoulders of said beams, each of said beams carrying an electrostatic deflection electrode on their sides facing a fixed wall extending from said common base and carrying a pair of counterelectrodes respectively aligned with said electrostatic deflection electrodes.

9. A micromechanical atomic force sensor head for examining the surface of a sample including:

at least one cantilever beam of such dimensions and material that atomic forces existing between atoms and molecules are sufficient to deflect said cantilever beam, said cantilever beam having a free end and a fixed end and including a pointed tip located along said beam and spaced from said fixed end, said pointed tip being held in close proximity to said surface to be examined, the atomic forces existing between said pointed tip and said surface causing said cantilever beam to be deflected,

detection means for detecting the deflection of said cantilever beam when atomic forces exist between said surface and said pointed tip, said detection means and said cantilever beam forming an integral structure micromachined from a single piece of material, said detection means and said cantilever beam being spaced from one another by a gap, said detection means including a tunnel junction formed between two tunnel electrodes, at least one of which is located such that a deflection of said cantilever beam will move said at least one electrode,

means for producing a tunnel current in said tunnel junction, and

means for adjusting the spacing between said two tunnel electrodes to thereby adjust the magnitude of said tunnel current, said means for adjusting including at least two electrostatic deflection electrodes across which a potential is applied for varying the distance between said two deflection electrodes, said deflection electrodes being located with respect to said cantilever beam that the spacing between said tunnel electrodes is adjustable depending on the magnitude of the potential applied between said deflecting electrodes.

10. The sensor head of claim 9, where said cantilever beam and said detection means are comprised of a material selected from the group consisting of silicon, compounds continuing silicon, and GaAs.

11. The sensor head of claim 9, where said at least one tunnel electrode is located on said cantilever beam.

12. The sensor head of claim 11, where the other said tunnel electrode is located on said detection means.

13. The sensor head of claim 12, where said means for adjusting is connected to said detection means, and moves said detection means when said potential is applied.

14. The sensor head of claim 12, where said means for adjusting is connected to said cantilever beam and moves said cantilever beam when said potential is applied.

15. The sensor head of claim 9, where said detection means includes a beam separated from said cantilever beam, one of said two tunnel electrodes being located on said cantilever beam and the other tunnel electrode being located on said beam separated from said cantilever beam.

16. The sensor head of claim 15, where at least one of said deflection electrodes is located on said cantilever beam.

17. The sensor head of claim 15, where at least one of said deflection electrodes is located on said beam separated from said cantilever beam.

18. The sensor head of claim 15, where said cantilever beam and said beam separated from said cantilever beam extend generally parallel to one another from a common, integral base.

19. The sensor head of claim 18 where said beam separated from said cantilever beam is flexible.

20. The sensor head of claim 18, where said beam separated from said cantilever beam is rigid.

21. The sensor head of claim 18, where said integral structure is comprised of silicon