Semiconductor device having stacking structure
First Claim
1. A semiconductor device comprising:
- a base semiconductor structure having a flat main surface and including semiconductor elements, interelement wiring layers formed on said flat main surface for connecting said semiconductor elements together, and conductive pads provided on said main surface and connected to the interelement wiring layers;
at least one stacking semiconductor structure stacked on said base semiconductor structure, the stacking semiconductor structure having a flat main surface and a rear surface and including semiconductor elements, interelement wiring layers formed on said flat main surface for connecting said semiconductor elements together, conductive pads provided on said main surface for connection to the interelement wiring layer, and holes selectively formed at said rear surface of said stacking semiconductor structure to expose portions of rear surfaces of said conductive pads;
first conductive elements fixed in said holes of said stacking semiconductor structure for direct connection to the exposed rear surface portions of said conductive pads; and
second conductive elements fixed on said conductive pads of said base semiconductor structure and fixed on said first conductive elements to produce a gap between said base and said at least one stacking semiconductor structure.
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Accused Products
Abstract
A semiconductor device includes a base semiconductor structure including semiconductor elements, interconnection layers for connecting the semiconductor elements together, and conductive pads to which the interconnection layers are connected, at least one stacking semiconductor structure including semiconductor elements, an interconnection layer for connecting the semiconductor elements together, and conductive pads to which the interconnection layers are connected, the stacking semiconductor structure having holes selectively formed therein to expose portions of the conductive pads, first conductive elements fixed in the holes of the stacking semiconductor structure, to be electrically connected to the exposed portions of the conductive pads, and second conductive elements fixed on the conductive pads of the base semiconductor structure, and fixed to the first conductive elements, with a gap provided between the base and stacking semiconductor structures.
406 Citations
14 Claims
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1. A semiconductor device comprising:
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a base semiconductor structure having a flat main surface and including semiconductor elements, interelement wiring layers formed on said flat main surface for connecting said semiconductor elements together, and conductive pads provided on said main surface and connected to the interelement wiring layers; at least one stacking semiconductor structure stacked on said base semiconductor structure, the stacking semiconductor structure having a flat main surface and a rear surface and including semiconductor elements, interelement wiring layers formed on said flat main surface for connecting said semiconductor elements together, conductive pads provided on said main surface for connection to the interelement wiring layer, and holes selectively formed at said rear surface of said stacking semiconductor structure to expose portions of rear surfaces of said conductive pads; first conductive elements fixed in said holes of said stacking semiconductor structure for direct connection to the exposed rear surface portions of said conductive pads; and second conductive elements fixed on said conductive pads of said base semiconductor structure and fixed on said first conductive elements to produce a gap between said base and said at least one stacking semiconductor structure. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14)
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Specification