Automatic tuning system for ultrasonic generators

• US 4,808,948 A
• Filed: 09/28/1987
• Issued: 02/28/1989
• Est. Priority Date: 09/28/1987
• Status: Expired due to Term

• Current Assignee: Kulicke and Soffa Industries Incorporated
• Original Assignee: Kulicke and Soffa Industries Incorporated
• Inventors: Patel, Dipakkumar I., Giampa, Randall S.
• Primary Examiner(s): Grimm, Siegfried H.
• Application Number:
  US07/101,839
• Time in Patent Office: 519 Days
• Field of Search: 331/1 A, 331/4, 331/25, 331/154, 331/156, 228/4.5, 228/110, 228/111, 156/73.1, 156/73.2, 156/73.3, 156/73.4, 156/580.1, 310/316, 310/317, 310/318, 310/314, 366/116, 318/116, 367/137, 367/138
• US Class Current: 331/4
• CPC Class Codes: B06B 1/0261 taken from a transducer or electrode connected to the driving transducer
• CPC Class Codes: H01L 2224/78343 by ultrasonic vibrations
• CPC Class Codes: H03J 1/0033 for voltage synthesis with a D/A converter
• CPC Class Codes: H03L 7/02 using a frequency discriminator comprising a passive frequency-determining element

Abstract

Apparatus for periodically sweeping a voltage controlled oscillator over a range of frequencies which includes a resonant frequency of a transducer being supplied with power by the voltage controlled oscillator through a power amplifier. The apparatus includes a digital phase detector having a voltage input coupled to the output of the power amplifier and a second voltage input coupled to a current sensor indicative of the phase of the current flowing through the supply circuit of the transducer to provie at the output of the phase detector a voltage signal indicative of phase difference between the voltage and the current in the transducer. The output of the phase detector is coupled to a processor and to the input of a summing circuit. The output of the processor is also coupled to the summing circuit to provide an offset voltage which adjusts the voltage controlled oscillator to the resonant frequency of the transducer.

Claims

1. Apparatus for automatically tuning an ultrasonic power supply generator to the resonant frequency of a transducer comprising:

a voltage controlled oscillator (VCO),

a power amplifier coupled to the output of said VCO,

a transducer coupled to the output of said power amplifier,

a phase detector coupled to the output of the power amplifier and to a current sensor in series with said transducer power supply,

a processor coupled to the output of said phase detector for generating offset voltages,

a summing circuit coupled to the output of said processor and to the output of said phase detector,

said processor being programmed to supply different offset voltages to sweep said VCO through a range of predetermined frequencies which cover the resonant frequency of said transducer and to determine the resonant frequency of said transducer and the offset voltage required to maintain said VCO at the resonant frequency of said transducer.

2. Apparatus as set forth in claim 1 wherein said phase detector is a digital phase detector and further includes a digital-to-analog converter coupled to the output of said phase detector, and the output of said digital-to-analog converter is coupled to said summing circuit.

3. Apparatus as set forth in claim 1 wherein the output of said processor is a digital output and further includes a digital-to-analog converter coupled between said processor and said summing circuit.

4. Apparatus as set forth in claim 2 which further includes a latch coupled to the output of said phase detector and the output of said latch is coupled to the input of said processor.

5. Apparatus as set forth in claim 1 which further includes a reference voltage input coupled to the input of said summing circuit.

6. Apparatus as set forth in claim 5 wherein said reference voltage is coupled to a ground connection so that the phase difference output from said phase detector is referenced to zero.

7. Apparatus as set forth in claim 1 wherein the output of said power amplifier is coupled through a supply circuit in said transducer.

8. Apparatus as set forth in claim 7 wherein said supply circuit is terminated at ground and further includes a precision sensing resistor in series in said supply circuit between ground and the output of said power amplifier.

9. Apparatus as set forth in claim 8 wherein the voltage across said precision sensing resistor is applied as a current phase input to said phase detector.