Method of ashing layers, and apparatus for ashing layers

• US 4,812,201 A
• Filed: 07/15/1987
• Issued: 03/14/1989
• Est. Priority Date: 07/25/1986
• Status: Expired due to Term

• Current Assignee: Tokyo Electron Limited
• Original Assignee: Tokyo Electron Limited
• Inventors: Yoshioka, Haruhiko, Shigaki, Keisuke, Onoe, Teruhiko, Sakai, Hiroyuki, Amemiya, Yutaka, Iimuro, Shunichi, Yoshioka, Kazutoshi, Matsumura, Kimiharu
• Primary Examiner(s): Lacey, David L.
• Assistant Examiner(s): Dang, Thi
• Application Number:
  US07/073,978
• Time in Patent Office: 608 Days
• Field of Search: 156/345, 156/643, 156/646, 204/192.32, 430/328, 430/329, 430/330, 430/432
• US Class Current: 438/725
• CPC Class Codes: G03F 7/42 Stripping or agents therefor
• CPC Class Codes: H01L 21/31138 by dry-etching

Abstract

A method and an apparatus, both for ashing unnecessary layers such as a photoresist layer, formed on a semiconductor wafer, by applying ozone to the layer, are disclosed. An ashing gas containing oxygen atom radical, or containing oxygen gas and an ashing-promoting gas, is applied to the layer, thereby ashing the layer readily and efficiently. The surface temperature of the layer is set at a prescribed value, and the ashing gas is applied uniformly onto the entire surface of the layer, or onto a part thereof, thus ashing the whole layer, or a part thereof, uniformly at a high rate, and the end-point of the ashing process is detected, thereby to enhance the efficiency of the ashing process.

Claims

1. An ashing method, comprising the steps of:

preparing a gas mixture of ozone and nitrogen oxides excited by passing an electric discharge through dinitrogen oxide;

generating oxygen atom radicals in said gas mixture by heating said gas mixture in a reaction region above a heated substrate, said gas mixture uniformly flowing over the surface layer of the substrate and the reaction region being the zone between the surface of the substrate and a plane 0.5-20 mm high above the substrate; and

ashing a desired portion of the surface layer of said substrate by reaction of the surface layer with said oxygen atom radicals.

2. The method of claim 1, wherein the surface temperature of the substrate ranges from 150°

to 800°

C.

3. The method of claim 1, further comprising the step of detecting the end point of the ashing reaction by measuring the concentration of the gas generated by the ashing reaction.

4. An ashing method, comprising the steps of:

preparing a gas mixture of ozone and nitrogen oxides excited by passing an electric discharge through dinitrogen oxide;

heating said gas mixture containing ozone and excited nitrogen oxides thereby generating a gas containing oxygen atom radicals;

contacting the surface of a substrate with said gas mixture by allowing said gas containing oxygen atom radicals to flow uniformly over said substrate surface from its center to the periphery thereof in the radial direction of said substrate; and

ashing a desired portion of the surface layer of said substrate by reaction of the surface layer with said oxygen atom radicals.