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Beam Redirecting

  • US 4,812,658 A
  • Filed: 07/23/1987
  • Issued: 03/14/1989
  • Est. Priority Date: 07/23/1987
  • Status: Expired due to Term
First Claim
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1. Apparatus for redirecting a particle beam from an initial direction lying along an initial axis, to a final direction lying in a plane which intersects said axis, said final direction being other than radially away from said axis, said apparatus comprising:

  • a first redirection structure for redirecting said beam from said initial direction to an intermediate direction lying in said plane, anda second redirection structure for redirecting said beam within said plane from said intermediate direction to said final direction.

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