Interferometer system for making length or angle measurements

• US 4,813,783 A
• Filed: 11/03/1987
• Issued: 03/21/1989
• Est. Priority Date: 11/03/1987
• Status: Expired due to Fees

• Current Assignee: Carl-Zeïss-Stiftung
• Original Assignee: Carl-Zeiss-Stiftung
• Inventors: Torge, Reimund
• Primary Examiner(s): Willis, Davis L.
• Assistant Examiner(s): Koren, Matthew W.
• Application Number:
  US07/116,376
• Time in Patent Office: 504 Days
• Field of Search: 356/358, 356/361, 356/363
• US Class Current: 356/498
• CPC Class Codes: G01B 11/26 for measuring angles or tapers; for testing the alignment of axes
• CPC Class Codes: G01B 9/02027 Two or more interferometric channels or interferometers
• CPC Class Codes: G01B 9/02062 Active error reduction, i.e. varying with time
• CPC Class Codes: G01B 9/02072 by calibration or testing of interferometer
• CPC Class Codes: G01N 21/45 using interferometric methods; using Schlieren methods

Abstract

The invention is directed to an interferometer which includes two interferometer systems and with which length measurement or angle measurement as well as index of refraction measurement can be conducted simultaneously. For this purpose, at least one component beam from the measuring arm of the one interferometer system and a component beam from a comparison arm of the other interferometer system are directed through an evacuable arrangement.

Claims

1. An interferometer for making length or angle measurements comprising:

an evacuable arrangement for determining the index of refraction of air surrounding the interferometer, the evacuable arrangement including first and second evacuable chamber means;

a first interferometer system for generating first and second component beams, said first interferometer system including a first comparison arm and a first measuring arm;

said first measuring arm including said first evacuable chamber means and a movable reflection means mounted adjacent said first evacuable chamber means so as to be movable with respect to the latter;

a second interferometer system for generating third and fourth component beams, said second interferometer system including a second comparison arm and a second measuring arm;

said second comparison arm including said second evacuable chamber means and fixed reflection means fixedly mounted adjacent said second evacuable chamber means; and

,

optical means for directing said first and second component beams to said first comparison arm and said first measuring arm, respectively, and for directing said third and fourth component beams to said second comparison arm and said second measuring arm, respectively; and

for directing said second component beam from said first measuring arm through said first evacuable chamber means and for directing said third component beam from said second comparison arm through said second evacuable chamber means.

2. The interferometer of claim 1, wherein said evacuating arrangement includes third and fourth evacuable chamber means;

said first comparison arm including said third evacuable chamber means mounted adjacent fixed reflection means;

said second measuring arm including said fourth evacuable means mounted adjacent said movable reflection means;

said evacuable arrangement including two chamber systems independent of each other, the first chamber system including said third and fourth evacuable means and the second chamber system including said first and second evacuable means; and

,

said optical means directing all four of said component beams through said evacuable arrangement.

3. The interferometer of claim 1, wherein:

said optical means directs said second component beam and said third component beam through said first evacuable chamber means and said second evacuable chamber means, respectively.

4. The interferometer of claim 1, wherein said evacuating arrangement includes third and fourth evacuable chamber means;

said first comparison arm including said third evacuable chamber means mounted adjacent fixed reflection means;

said second measuring arm including said fourth evacuable means mounted adjacent said movable reflection means;

said evacauble arrangement including two chamber systems independent of each other, the first chamber system including said first and second evacuable means and the second chamber system including said third and fourth evacuable means; and

,

said optical means directing all four of said component beams through said evacuating arrangement.

5. The interferometer of claim 1, wherein:

said optical means directs said second component beam and said third component beam through said first evacuable chamber means and said second evacuable chamber means, respectively.

6. The interferometer of claim 1, said movable reflection means and said fixed reflection means being a movable triple reflection means and a fixed triple reflection means, respectively.

7. The interferometer of claim 6, said triple reflection means being a triple reflecting mirror.

8. The interferometer of claim 6, said triple reflection means being a triple prism.

9. The interferometer of claim 6, wherein said evacuating arrangement includes third and fourth evacuable chamber means;

said first comparison arm including said third evacuable chamber means mounted adjacent fixed reflection means;

said second measuring arm including said fourth evacuable means mounted adjacent said movable reflection means;

said four component beams being directed into selected ones of said evacuable chambers by said optical means and being reflected at said triple reflection means in four reflected component beams, respectively; and

,

said evacuable arrangement including four additional evacuable means corresponding to respective ones of said four reflected component beams.

10. The interferometer of claim 6, one of said triple reflection means having an optical axis and being rotatable about a point displaced from said optical axis for making angle measurements.

11. The interferometer of claim 1, said optical means including:

a light source for issuing light having first and second frequencies;

optical directing means for directing said first frequency into said first and second comparison arms so as to pass along the respective component beam paths thereof and for directing said second frequency into said first and second measuring arms so as to pass along the respective component beam paths thereof;

said optical directing means also joining said frequencies after the latter have passed along said component beam paths; and

,

said interferometer further including counter means and subtraction means for receiving the joined frequencies and for evaluating the light-dark exchange of the superposing frequencies.