Interferometer system for making length or angle measurements
First Claim
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1. An interferometer for making length or angle measurements comprising:
- an evacuable arrangement for determining the index of refraction of air surrounding the interferometer, the evacuable arrangement including first and second evacuable chamber means;
a first interferometer system for generating first and second component beams, said first interferometer system including a first comparison arm and a first measuring arm;
said first measuring arm including said first evacuable chamber means and a movable reflection means mounted adjacent said first evacuable chamber means so as to be movable with respect to the latter;
a second interferometer system for generating third and fourth component beams, said second interferometer system including a second comparison arm and a second measuring arm;
said second comparison arm including said second evacuable chamber means and fixed reflection means fixedly mounted adjacent said second evacuable chamber means; and
,optical means for directing said first and second component beams to said first comparison arm and said first measuring arm, respectively, and for directing said third and fourth component beams to said second comparison arm and said second measuring arm, respectively; and
for directing said second component beam from said first measuring arm through said first evacuable chamber means and for directing said third component beam from said second comparison arm through said second evacuable chamber means.
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Abstract
The invention is directed to an interferometer which includes two interferometer systems and with which length measurement or angle measurement as well as index of refraction measurement can be conducted simultaneously. For this purpose, at least one component beam from the measuring arm of the one interferometer system and a component beam from a comparison arm of the other interferometer system are directed through an evacuable arrangement.
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Citations
11 Claims
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1. An interferometer for making length or angle measurements comprising:
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an evacuable arrangement for determining the index of refraction of air surrounding the interferometer, the evacuable arrangement including first and second evacuable chamber means; a first interferometer system for generating first and second component beams, said first interferometer system including a first comparison arm and a first measuring arm; said first measuring arm including said first evacuable chamber means and a movable reflection means mounted adjacent said first evacuable chamber means so as to be movable with respect to the latter; a second interferometer system for generating third and fourth component beams, said second interferometer system including a second comparison arm and a second measuring arm; said second comparison arm including said second evacuable chamber means and fixed reflection means fixedly mounted adjacent said second evacuable chamber means; and
,optical means for directing said first and second component beams to said first comparison arm and said first measuring arm, respectively, and for directing said third and fourth component beams to said second comparison arm and said second measuring arm, respectively; and
for directing said second component beam from said first measuring arm through said first evacuable chamber means and for directing said third component beam from said second comparison arm through said second evacuable chamber means. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11)
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Specification