Apparatus for producing graded-composition coatings

• US 4,814,056 A
• Filed: 06/23/1987
• Issued: 03/21/1989
• Est. Priority Date: 06/23/1987
• Status: Expired due to Fees

• Current Assignee: Hauzer Industries BV (Bodycote PLC)
• Original Assignee: Vac-Tec Systems, Inc. (Alderox, Inc.)
• Inventors: Welty, Richard P.
• Primary Examiner(s): Beck, Shrive
• Assistant Examiner(s): Bashore, Alain
• Application Number:
  US07/066,254
• Time in Patent Office: 637 Days
• Field of Search: 118/720, 118/721, 118/730, 118/729, 118/733, 118/301, 427/282, 427/255.5, 427/258, 427/425, 427/255.7, 204/298, 204/192.12
• US Class Current: 204/298.11
• CPC Class Codes: B01J 2219/0043 for direct application of reagents, e.g. through openings in a shutter
• CPC Class Codes: B01J 2219/00605 the compounds being directly bound or immobilised to solid supports
• CPC Class Codes: B01J 2219/00637 by coating it with another layer
• CPC Class Codes: B01J 2219/00657 One-dimensional arrays
• CPC Class Codes: B01J 2219/00745 Inorganic compounds
• CPC Class Codes: B01J 2219/00756 Compositions, e.g. coatings, crystals, formulations
• CPC Class Codes: C23C 14/044 using masks to redistribute rather than totally prevent coating, e.g. producing thickness gradient
• CPC Class Codes: C23C 14/22 characterised by the process of coating
• CPC Class Codes: C23C 14/56 Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks
• CPC Class Codes: C40B 40/18 Libraries containing only inorganic compounds or inorganic materials
• CPC Class Codes: C40B 60/14 for creating libraries

Abstract

Apparatus for depositing a coating on at least one substrate where the coating includes at least two component materials where the relative percentages of the component materials with respect to each other varies through the thickness of the coating. The apparatus includes at least two deposition sources for respectively providing the two component materials, at least one mask having at least one aperture, the mask being disposed between at least one of said two deposition sources and the substrate, and a motion effecting mechanism for effecting relative motion between the substrate and the deposition sources to thus effect a predetermined variation of the relative percentages of the component materials as a function of at least the shape of the aperture in the mask.

Claims

1. Apparatus for depositing at least one graded composition coating on a surface of at least one substrate where the graded coating includes at least two component materials where the relative percentages of the component materials with respect to each other varies through the thickness of the coating, said apparatus comprising:

at least two deposition sources for respectively providing said two component materials;

at least one mask having at least one aperture, said mask being disposed between at least one of said two deposition sources and said substrate; and

motion effecting means for effecting relative motion betweeen said substrate and said deposition sources where the width of the aperature varies in a direction substantially parallel to said relative motion between the substrate and the deposition sources to thus effect a predetermined variation of said relative percentages of said component materials as a function of at least the shape of the aperture in the mask such that the composition of the graded coating is uniform over the surface of the substrate.

2. Apparatus as in claim 1 where the aperture in the mask linearly varies in size in the direction of relative motion of the substrate with respect to the mask so that the amount of material deposited from said one source linearly varies through the thickness of the coating.

3. Apparatus as in claim 1 where the aperture in the mask non-linearly varies in size in the direction of relative motion of the substrate with respect to the mask so that the amount of material deposited from said one source non-linearly varies through the thickness of the coating.

4. Apparatus as in claim 1 where the aperture in the mask varies in size in accordance with a predetermined periodicity in the direction of relative motion of the substrate with respect to the mask so that the amount of material deposited from said one source varies with said periodicity through the thickness of the coating.

5. Apparatus as in claim 1 where said mask is disposed only between said one deposition source and said substrate so that the amount of component material deposited from the other deposition source remains constant through the coating thickness.

6. Apparatus as in claim 1 where said deposition sources are so positioned with respect to the substrate that they respectively deposit the component materials on different areas on the surface of the substrate.

7. Apparatus as in claim 1 where said deposition sources are so positioned with respect to the substrate that they respectively deposit the component materials on areas on the surface of the substrate which at least partially overlap.

8. Apparatus as in claim 1 including means for applying electrical power to said deposition sources including means for varying the powers respectively applied to the sources to thus facilitate said predetermined variation of said relative percentages of said component materials.

9. Apparatus as in claim 1 where each of said deposition sources includes a plurality of sources substantially aligned in the direction of relative motion of the substrate with respect to the plurality of sources.

10. Apparatus as in claim 1 where said deposition sources are stationary and said substrate moves with respect to the deposition sources.

11. Apparatus as in claim 1 including at least one load lock, at least on process chamber in which is included said deposition sources and said mask, at least one exit lock, and means for sequentially feeding the substrate through the load lock, the process chamber, and the exit lock.

12. Apparatus as in claim 11 including a plurality of process chambers for forming a multi-layer coating where the layers are respectively formed in said process chambers.

13. Apparatus as in claim 12 where each layer may be of single or multiple (graded or non-graded) component materials.

14. Apparatus as in claim 1 where said substrate is cylindrical in configuration and said motion effecting means includes means for translating the substrate along its axis by the deposition sources.

15. Apparatus as in claim 14 where said motion effecting means includes means for rotating said cylindrical substrate about its axis.

16. Apparatus as in claim 15 where said deposition sources are so disposed with respect to said substrate that they deposit their respective component materials on different portions of the substrate.

17. Apparatus as in claim 16 where said deposition sources are respectively disposed on substantially opposite sides of the substrate.

18. Apparatus as in claim 14 where said one coating material is metallic and the other is ceramic.

19. Apparatus as in claim 1 wherein said substrate includes a substantially flat deposition surface upon which the coating is deposited.

20. Apparatus as in claim 19 where said deposition sources are so positioned with respect to said flat deposition surface that the respective component materials provided by these sources substantially overlap on the flat deposition surface.

21. Apparatus as in claim 1 including a plurality of substrates mounted on a substrate carrier.

22. Apparatus as in claim 21 where said motion effecting means includes means for translating the substrate carrier by the deposition sources.

23. Apparatus as in claim 22 where said motion effecting means includes means for rotating the substrates with respect to the carrier.

24. Apparatus as in claim 22 where said motion effecting means includes means for rotating the substrate carrier.

25. Apparatus as in claim 1 where said deposition sources are selected from the group consisting of cathodic arc devices, sputtering devices, and thermal evaporation devices.

26. An apparatus for depositing at least one graded composition coating on a surface of at least one substrate where the graded coating includes at least two component materials where the relative percentages of the component materials with respect to each other varies through the thickness of the coating, said apparatus comprising:

means for directing said two component toward said substrate;

means including an aperture for intercepting a portion of at least one of said two component materials prior to said portion reaching the substrate; and

means for relatively moving the substrate with respect to the component materials being deposited thereon where the width of the aperture varies in a direction substantially parallel to said relative movement of the substrate with respect to the component materials being deposited thereon to thus effect a predetermined variation of said relative percentage of said component materials as a function of at least said intercepted portion of said one component material such that the composition of the graded coating is uniform over the surface of the substrate.

27. Apparatus for depositing a coating on at least one substrate where the coating includes at least two component materials where the relative percentages of the component materials with respect to each other varies through the thickness of the coating, said apparatus comprising:

at least two deposition sources for respectively providing said two component materials;

at least one mask having at least one aperture, said mask being disposed between at least one of said two deposition sources and said substrate; and

motion effecting means for effecting relative motion between said substrate and said deposition sources where the aperture in the mask linearly varies in size in the direction of relative motion of the substrate with respect to the mask so that the amount of material deposited from said one source linearly varies through the thickness of the coating such that the composition of the graded coating is uniform over the surface of the substrate.

28. Apparatus for depositing a coating on at least one substrate where the coating includes at least two component materials where the relative percentages of the component materials with respect to each other varies through the thickness of the coating, said apparatus comprising:

at least two deposition sources for respectively providing said two component materials;

at least one mask having at least one aperture, said mask being disposed between at least one of said two deposition sources and said substrate; and

motion effecting means for effecting relative motion between said substrate and said deposition sources where the aperture in the mask non-linearly varies in size in the direction of relative motion of the substrate with respect to the mask so that the amount of material deposited from said one source non-linearly varies through the thickness of the coating such that the composition of the graded coating is uniform over the surface of the substrate.