Projection exposure apparatus

• US 4,814,829 A
• Filed: 06/10/1987
• Issued: 03/21/1989
• Est. Priority Date: 06/12/1986
• Status: Expired due to Term

• Current Assignee: Canon Kabushiki Kaisha (Canon Inc.)
• Original Assignee: Canon Kabushiki Kaisha (Canon Inc.)
• Inventors: Ogawa, Shigeki, Totsuka, Masao, Ina, Hideki, Suzuki, Akiyoshi, Sakai, Fumio, Outsuka, Kazuhito, Kosugi, Masao
• Primary Examiner(s): Hix, L. T.
• Assistant Examiner(s): Rutledge, D.
• Application Number:
  US07/060,398
• Time in Patent Office: 650 Days
• Field of Search: 355/43, 355/45, 355/53, 356/400, 356/401
• US Class Current: 355/43
• CPC Class Codes: G03F 9/7023 Aligning or positioning in direction perpendicular to substrate surface
• CPC Class Codes: G03F 9/7069 Alignment mark illumination, e.g. darkfield, dual focus

Abstract

A projection exposure apparatus for projecting a pattern of a reticle upon a wafer by use of a projection lens system, is disclosed. The apparatus is arranged so that a mark illuminating light is projected upon the wafer from between the projection lens system and the wafer and not by way of the projection lens system. The light diffracted by an edge of a wafer alignment mark is photoelectrically detected by way of the projection lens system, whereby an electrical signal corresponding to an image of the alignment mark is obtained. On the basis of the detected signal, the wafer is aligned with the reticle. This arrangement allows detection of the alignment mark without being affected by a photoresist applied to the wafer surface. Thus, the reticle-to-wafer alignment can be made accurately. Also, a novel and unique alignment method is disclosed. The disclosed method assures high-accuracy reticle-to-wafer alignment.

Claims

1. A projection exposure apparatus for projecting a pattern formed on a first object upon a second object, having a mark and a radiation-sensitive layer, by use of a projection optical system to thereby expose the radiation-sensitive layer to the pattern of the first object, said apparatus comprising:

an illumination optical system adapted to illuminate, from between the projection optical system and the second object without use of the projection optical system, the surface of the second object on a side thereof on which the radiation-sensitive layer is provided; and

a detection optical system for detecting, by use of the projection optical system and by use of a light from said illumination optical system, the mark of the second member from the side thereof on which the radiation-sensitive layer is provided, wherein said detection optical system has an numerical aperture of sin A with respect to the second object, wherein said illumination optical system supplies an illuminating light to the second object at an angle B with respect to an optical axis of the projection optical system, and wherein A and B satisfy the following relation;

B≧

A+10°

.

2. An apparatus according to claim 1, wherein the illuminating light is projected upon the second object with a Brewster angle at respect to the radiation sensitive layer provided on the second object.

3. An apparatus according to claim 1, wherein the illuminating light is projected upon the second object in a direction perpendicular to an edge, to be detected, of the mark of the second object.

4. An apparatus according to claim 1, wherein said illumination optical system changes the angle over time, at which the illuminating light is incident upon the second member.

5. An apparatus according to claim 1, wherein said illumination optical system includes a stop provided therein to restrict the direction of the light impinging on the mark and the region on the second member to be irradiated with the illuminating light.

6. An apparatus according to claim 5, wherein said stop is inclined with respect to an optical axis of said illumination optical system.

7. An apparatus according to claim 1, wherein said detection optical system includes a spatial filter corresponding to the mark of the second object.

8. An apparatus according to claim 1, wherein said illumination optical system includes a light source comprising laser for producing the illuminating light.

9. An apparatus according to claim 8, wherein said illumination optical system produces illuminating light incident upon the second member in a P-polarized state.

10. An apparatus according to claim 8, wherein said illumination optical system includes a plurality of lasers producing lasers beams of different wavelengths and wherein said apparatus further comprises a plurality of detection optical system of a number corresponding to the number of said lasers.

11. An apparatus according to claim 8, wherein the laser beam is incident upon the second object with such angle of incidence that is effective to cause, when the mark is irradiated with the laser beam, a high-order diffraction light to be reflected from the mark and to advance substantially in parallel to the optical axis of the projection optical system.

12. A projection exposure apparatus for projecting a pattern formed on a first object upon a second object having a mark by use of a projection optical system, said apparatus comprising:

first illuminating means for illuminating the second object from between the projection optical system and the second object without use of the projection optical system;

second illumination means for illuminating a plate-like member having a reference mark formed therein;

detection means operable to detect the mark of the second object by use of an illuminating light supplied from said first illumination means and by use of the projection optical system, said detection means being also operable to detect the reference mark by use of an illuminating light supplied from said second illumination means and passing through said plate-like member, wherein said detection means has an numerical aperture of sin A with respect to the second object, wherein said first illumination means supplies an illuminating light to the second object at an angle B with respect to an optical axis of the projection optical system, and wherein A and B satisfy the following relation;

B≧

A+10°

; and

control means for controlling the positional relation between the first and second objects in accordance with the detection by said detecting means.

13. An apparatus according to claim 12, wherein the reference mark is defined by an aperture formed in the plate-like member.

14. An apparatus for projecting a pattern formed on a first object upon a second object having a mark by use of a projection optical system, said apparatus comprising:

illumination means for illuminating the second object from between the projection optical system and the second object without use of the projection optical system;

imaging means for imaging, upon the second object, a reference mark formed on a plate-like member, by use of an illuminating light supplied from said illumination means and passing through the projection optical system;

detection means for detecting an image of the mark of the second object, which image is partially shaded by means of said reference mark, wherein said detection means has a numerical aperture of sin A with respect to the second object, wherein said illumination means supplies an illuminating light to the second object at an angle B with respect to an optical axis of the projection optical system, and wherein A and B satisfy the followimg relation;

B≧

A+10°

; and

means for controlling the positional relation between the first and second objects in accordance with the detection by said detection means.

15. An apparatus according to claim 14, wherein said detection means is arranged to scan the image of the mark of the second object, having been transmitted through said plate-like member, and also to photoelectrically convert the scanned image into an electrical signal.

16. An appartus for projecting a pattern formed on a first object upon a second object having a mark by use of projection optical system, said apparatus comprising illumination means for illuminating the second object from between the projection optical system and the second object without using the projection optical system;

means for scanning an image of the mark of the second object formed with the aid of the projection optical system and an image of reference mark provided on a plate-like member;

means for receiving the scanned images and converting the scanned images into electrical signals;

means for detecting the positional deviation of the second object from the reference mark, on the basis of the electrical signals; and

control means for controlling the positional relation between the first and second objects in accordance with the detection by said detecting means.

17. An apparatus according to claim 16, wherein said detecting means includes a plurality of light receiving means and wherein the image of the mark of the second object and the image of the reference mark are received separately by said plurality of light receiving means.

18. An apparatus according to claim 16, wherein said receiving means receives the image of the mark of the second object and the image of the reference mark with a predetermined time difference.

19. An apparatus according to claim 16, wherein each of the second object and the plate-like member has at least two marks provided with respect to X and Y directions, respectively, of an X-Y coordinate system and wherein said detecting means detects one of said at least two marks, associated with one of the X and Y directions, independently of the other associated with the other direction.

20. An apparatus according to claim 19, wherein said scanning means includes one movable polygonal mirror and wherein the images of the mark elements of the mark of the second object and the reference mark are scanned with the aid of movement of said polygonal mirror.

21. An apparatus for proejcting a pattern formed on a first object upon a second object having a mark by use of a projection optical system, said apparatus comprising:

an illumination optical system for illuminating the second object from between the projection optical system and the second object without using the projection optical system;

a detector for detecting, by use of the projection optical system, an image of the mark of the second object as illuminated by said illumination optical system;

means for monitoring a change in the sensitivity of said detector;

by irradiating said detector with a light from a standard light source; and

means for controlling the positional relation between the first and second objects in accordance with an output of said detector when the image of the mark is detected thereby.

22. An apparatus according to claim 21, further comprising means for compensating for the change in the sensitivity of said detector, detected as a result of the monitoring, by controlling the intensity of light to be supplied form said illumination optical system.

23. An apparatus for projecting a pattern formed on a first object upon a second object having a mark by use of a projection optical system, said apparatus comprising:

an illumination optical system for illuminating the second object from between the projection optical system and the second object without using the projection optical system, said illumination optical system including a single-mode fiber for directing an illuminating light to the second object;

means for detecting, by use of the projection optical system, the mark of the second object by use of the illuminating light from said illumination optical system, wherein said detection means has an numerical aperture of sin A with respect to the second object, wherein said illumination optical system supplies an illuminating light to the second object at an angle B with respect to an optical axis of the projection optical system, and wherein A and B satisfy the following relation;

B≧

A+10°

; and

control means for controlling the positional relation between the first and second objects in accordance with the detection by said detecting means.

24. An apparatus according to claim 23, wherein said illumination optical system includes a gradient index type lens system and an expander lens system provided adjacent to opposite ends of said single mode fibers.

25. An apparatus according to claim 23, wherein said illumination optical system comprises a plurality of illumination lights, and wherein said illumination optical system illuminates the second object by use of said plurality of illuminating light supplied along different optical path lengths.

26. An apparatus for projecting a pattern formed on a first object upon a second object having a mark by use of a projection optical system, said apparatus comprising:

an illumination optical system arranged to illuminate the second object from between the projection optical system and the second object and without using the projection optical system, said illumination optical system illuminating the scond object by use of lights projected in sequence and in a plurality of directions;

detection means for detecting, by use of the projection optical system, the mark of the second object by use of the lights projected in sequence from said illumination optical system, wherein said detection means has an numerical aperture of sin A with respect to the second object, wherein said illumination optical system supplies an illuminating light to the second object at an angle B with respect to an optical axis of the projection optical system, and wherein A and B satisfy the following relation;

B≧

A+10°

; and

means for controlling the positional relation between the first and second objects in accordance with the detection by said detection means.

27. An apparatus for projecting a pattern formed on a first object upon a second object having a mark by use of a projection optical system, said apparatus comprising:

an illumination optical system arranged to illuminate the second object from between the projection optical system and the second object and without using the projection optical system, said illumination optical system illuminating the second object by use of lights projected in sequence and in a plurality of directions;

detection means for detecting, by use of the projection optical system, the mark of the second object by use of the lights projected in sequence from said illumination optical system; and

means for controlling the positional relation between the first and second objects in accordance with the detection by said detecting means, wherein said illumination optical system is adapted to project the lights toward the second object, in sequence and in four directions congruent with axes of an X-Y coordinate system defined on the second object.

28. An apparatus for projecting a pattern formed on a first object upon a second object having a mark by use of a projection optical system, said apparatus comprising:

an illumination optical system arranged to illuminate the second object from between the projection optical system and the second object without using the projection optical system, said illumination optical system illuminating the second object by use of lights projected in sequence and in a plurality of directions;

detection means for detecting, by use of the projection optical system, the mark of the second object by use of the lights produced in sequence from said illumination optical system; and

means for controlling the positional relation between the first and second objects in accordance with the detection by said detecting means, wherein said illumination optical system is adapted to sequentially project lights in two of four directions in an alternate fashion with the remaining two of the four directions.

29. An apparatus for projecting a pattern formed on a first object upon a second object having a mark by use of projection optical system, said apparatus comprising:

an illumination optical system for illuminating the second object from between the projection optical system and the second object without using the projection optical system;

image detecting means for receiving an image of the mark of the second object as illuminated by said illumination optical system, the image being formed with the aid of the projection optical system, wherein said image detecting means generates image data in response to the reception of the image by said image detecting means, wherein said image detecting means has an numerical aperture of sin A with respect to the second object, wherein said illumination optical system supplies an illuminating light to the second object at an angle B with respect to an optical axis of the projection optical system, and wherein A and B satisfy the following relation;

B≧

A+10°

; and

control means for controlling the positional relation between the first and second objects in accordance with the image data.

30. An apparatus according to claim 29, wherein said illumination optical system is arranged to illuminate the second object by use of lights projected in sequence in a plurality of directions.

31. An apparatus for projecting a pattern formed on a first object upon a second object having a mark, by use of a projection optical system and with use of light of a first wavelength, said apparatus comprising:

an illumination optical system for illuminating the second object by use of a light of a second wavelength different from the first wavelength;

a detection optical system having a plurality of rear-surface reflection type mirrors each having parallel surfaces, said mirrors being disposed so as to be inclined with respect to an optical axis of said detection optical system;

detecting means for detecting, by use of the projection optical system and said detection optical system, the mark of the second object by use of the light from said illuminatiom optical system; and

means for controlling the positional relation between the first and second objects in accordance with the detection by said detecting means.

32. An apparatus according to claim 31, wherein said illumination optical system is arranged to illuminate the second object from between the projection optical system and the second object without using the projection optical system.

33. An apparatus for projecting a pattern, formed on a first object having an alignment mark upon a second object by use of a projection optical system, said apparatus comprising:

illumination means for illuminating with incoherent illuminating light, in a direction opposite to the directon of pattern projection, a reference mark formed on a plate-like member and the alignment mark of the first object, wherein said illumination means transmits the incoherent illuminating light through the reference mark of the plate-like member, and wherein the plate-like member is disposed between the projection optical system and the first object, wherein said illumination means illuminates the reference mark on the plate-like member and the alignment mark on the first oject from between the projection optical system and the plate-like member; and

means for receiving the light from said illumination means to obtain image data;

means for calculating the relative positional deviation between the reference mark and the alignment mark on the basis of the image data; and

means for aligning the first object on the basis of the positional deviation calculated by said calculating means.

34. An apparatus according to claim 33, whrein said illumination means comprises a Hg lamp for generating light comprising transmitting illumination light comprising g-line rays supplied from a Hg lamp.

35. An apparatus according to claim 33, wherein said apparatus further comprises means for producing light to be used for the projection of the pattern upon the second object and wherein the illuminating light is introduced from said producing means.

36. An apparatus for projecting a pattern, formed on a first object having a mark, upon a second object having a mark by use of a projection optical system, said apparatus comprising:

first mark supporting means for supporting a first reference mark operable as an index for the alignment of the first object;

second mark supporting means for supporting a second reference mark operable as an index for the alignment of the second object;

means for continuously monitoring the position of the mark of the first object with respect to the first reference mark;

detecting means for detecting, by use of the projection optical system, the positional relation between the mark provided on the second object and the second reference mark; and

control means for controlling the position of the second object in accordance with the detection by said detecting means.

37. An apparatus according to claim 36, wherein said monitoring means generates an output relating to data for moving the first object so that the first object is continuously held at a predetermined position.

38. An apparatus according to claim 36, wherein said monitoring means generates an output relating to data for controlling the movement of the second object to control the position of the second object.

39. An apparatus for projecting a pattern, formed on a first object having a mark, upon a second object by use of a projection optical system, said apparatus comprising:

mark supporting means for supporting a reference mark operable as an index for the alignment of the first object;

image pickup means for observing the reference mark and the mark provided on the first object;

means operable to cause said image pickup means to observe a grid-like distortion measuring reference mark, and for preparing correction data on the basis of the positions of intersections of the distortion measuring reference mark and the positions of the intersections as detected as a result of the observation by said image pickup menas; and

means for aligning the mark of the first object with the reference mark supported by said supporting means, on the basis of the observation of the reference mark and the mark of the first object by said image pickup means and in accordance with the correction data.

40. An apparatus for projecting a pattern formed on a first object upon a second object by use of a projection optical system, said apparatus comprising:

an illumination optical system for illuminating the second object from between the projection optical system and the second object without using the projection optical system;

a detector for receiving an image, formed through the projection optical system, of the second object as illuminated by said illumination optical system, said detector also receiving an image, formed through the projection optical system, of a second object, which is a standard, placed on a predetermined position and illuminated by said illumination optical system;

means for comparing a signal produced from said detector in response to the reception of the image of the standard, with a preparatorily stored reference value; and

means for correcting the intensity of the light from said illumination optical system in accordance with the comparison by said comparing means.

41. An apparatus according to claim 40, wherein said correcting means includes a polarizing member actable on the light from said illumination means.

42. An apparatus according to claim 40 wherein said correcting means includes a neutral density filter actable on the light from said illumination optical system.

43. An apparatus according to claim 40, wherein said detector has a sensitivity and wherein the sensitivity of the detector is adjusted prior to the reception of the signal from the standard.