Method and apparatus for measuring the absolute thickness of dust defocus layers

• US 4,815,856 A
• Filed: 06/05/1986
• Issued: 03/28/1989
• Est. Priority Date: 06/05/1986
• Status: Expired due to Fees

• Current Assignee: Stuff Technology Partners-Ii
• Original Assignee: Storage Technology Partners
• Inventors: Bruce, Robert A.
• Primary Examiner(s): Willis, Davis L.
• Assistant Examiner(s): Koren, Matthew W.
• Application Number:
  US06/870,844
• Time in Patent Office: 1,027 Days
• Field of Search: 356/357, 356/381, 356/382, 364/525
• US Class Current: 356/504
• CPC Class Codes: G01B 11/0675 using interferometry

Abstract

A method and apparatus for measuring the absolute thickness of dust defocus layers upon spinning optical disks utilizes a collimated, expanded beam of light from a helium-neon laser which is focused into a converging beam and directed towards the layer at a predetermined angle of incidence defined by an angular spread centered about the angle of incidence. A pair of divergent beams reflecting from the upper and lower surfaces of the layer are received by a collecting mirror and are recollimated by a collimating lens to be incident upon a self-scanning photodiode array. The divergent beams form a monotonic interference pattern having a fringe density which is proportional to the distance between the upper and lower surfaces, and which is determined by the photodiode array.

Claims

1. Apparatus for measuring the distance between upper and lower surfaces of a transparent coating upon a planar surface, comprising:

means for producing a beam of light;

means, optically coupled to said light-producing means, for collimating said beam, wherein said collimating means is a cylindrical telescope;

lens means coupled to receive said collimated beam for focusing said collimated beam, at a point proximate to the coating, thereby forming a converging beam which is directed towards the coating at a predetermined angle of incidence defined by an angular spread centered about said angle of incidence, wherein said converging beam is reflected from the upper and lower surfaces, thereby forming a pair of diverging beams with an interference pattern having a fringe density which is proportional to the distance between the upper and lower surfaces; and

solid-state image sensing means coupled to receive said interference pattern for counting the number of fringes between said angular spread.

2. A method for determining the distance between upper and lower surfaces of a transparent coating upon a planar surface, comprising the steps of:

producing a beam of light;

collimating said beam;

focusing said collimated beam to produce a converging beam having a predetermined angular spread;

reflecting said converging beam from the upper and lower surfaces to produce a pair of diverging beams having an interference pattern formed therebetween, wherein said interference pattern consists of a plurality of alternating nulls and peaks forming a plurality of fringe cycles;

counting the number of fringe cycles within said predetermined angular spread, wherein said counting step consists of the steps of;

setting a threshold value indicative of a midpoint between each respective null-peak pair;

pulsing said sensing means at a predetermined clock rate corresponding to a preselected number of sensing elements within said sensing means;

counting said clock pulses and a number indicative of the total times said threshold value is exceeded;

multiplying said number, minus one, by the number of said sensing elements; and

dividing the result from said multiplying step by said count of clock pulses encompassing the (n-1) fringes to yield a fringe count that is proportional to the distance between the upper and lower surfaces of the transparent coating.

3. Apparatus for measuring the absolute thickness of a dust defocus layer upon a spinning optical disk, comprising;

a source of light;

means, coupled to said source, for collimating a beam of light received therefrom, wherein said collimating means is a cylindrical telescope;

lens means coupled to receive said collimated beam for focusing said collimated beam to produce a converging beam which is directed towards the layer at a predetermined angle of incidence defined by an angular spread centered about said angle of incidence;

collection means for receiving a first and second diverging beam reflected respectively from an upper and lower surface of the layer, wherein said first and second diverging beams form an interference pattern having a fringe density which is proportional to the absolute thickness; and

a self-scanning linear diode array receiving said interference pattern, said array adapted to count the fringes therein and determine said fringe density.

4. A method for measuring the absolute thickness of a dust defocus layer with upper and lower surfaces situated upon a spinning optical disk, comprising the steps of:

producing a beam of light;

collimating said beam;

shaped said collimated beam to produce a converging beam having a predetermined angular spread;

reflecting said converging beam from the upper and lower surfaces to produce a pair of diverging beams having an interference pattern formed therebetween, said interference pattern having a plurality of fringes with a fringe density that is proportional to the absolute thickness;

receiving said pair of diverging beams with said interference pattern formed therebetween with collection means;

disposing a self-scanning linear diode array relative to said collection means so as to project said interference pattern upon said self-scanning linear diode array; and

counting said plurality of fringes in said interference pattern with said self-scanning linear diode array, thereby determining said fringe density and the absolute thickness.

5. The method according to claim 4, wherein said shaping step comprises focusing said collimated beam substantially at said dust defocus layer.

6. The method according to claim 4, wherein said shaping step comprises focusing said collimated beam at a point above said dust defocus layer.

7. The method according to claim 4, wherein said shaping step comprises focusing said collimated beam at a point beneath said dust defocus layer.