Pattern splicing system and method for scanning of electron beam system

• US 4,816,692 A
• Filed: 07/08/1987
• Issued: 03/28/1989
• Est. Priority Date: 07/08/1987
• Status: Expired due to Fees

• Current Assignee: International Business Machines Corporation
• Original Assignee: International Business Machines Corporation
• Inventors: Rudert, John R. Jr.
• Primary Examiner(s): Fields, Carolyn E.
• Assistant Examiner(s): Miller, John A.
• Application Number:
  US07/071,120
• Time in Patent Office: 629 Days
• Field of Search: 250/492.22, 250/492.2, 250/492.3, 364/491
• US Class Current: 250/492.2
• CPC Class Codes: H01J 37/3026 Patterning strategy

Abstract

A system and an algorithmic method are provided for scanning an electron beam in a predetermined pattern over a surface, which is partitioned into a matrix of sub-fields. The system includes an electron beam, and it determines the boundary portions of that pattern in a selected sub-field of the matrix which extends into the next sequential adjacent sub-fields in the same row and column as the selected sub-field. The coordinates of the pattern boundary portion in the selected and the adjacent sub-fields are stored in a memory. The electron beam scans over the surface for fully exposing the surface with all portions of the predetermined pattern within the selected sub-field, except for the boundary portions. Then the boundary portions in the currently selected sub-field are spliced, i.e. partially exposed, as are the boundary portions of the adjacent sub-fields which extend into the currently selected sub-field. Portions of the spliced data are stored in a buffer for use in computing the data for the corresponding adjacent sub-fields. Then the coordinates of the pattern boundary portions in the previously selected sub-fields are deleted from the memory.

Claims

1. A system for scanning an electron beam in a predetermined pattern over a surface of a workpiece, said surface being partitioned into a matrix of sub-fields, said system including

a. an electron beam exposure system including an electron beam,

b. means for storing pattern data and means for determining the pattern boundary portions of said predetermined pattern in a currently selected sub-field of said matrix of sub-fields,

c. splicing means for splicing said pattern data to provide spliced pattern data including means for partially exposing said pattern boundary portions in said currently selected sub-field with said pattern data, and partially exposing the boundary portions of said adjacent sub-fields which extend into said currently selected sub-field,

d. means for operating said electron beam exposure system to expose said spliced pattern data on said workpiece, and

e. said exposure system being connected to the output of said means for operating.

2. A system in accordance with claim 1 wherein said sub-fields include a selected sub-field and adjacent sub-fields located adjacent to said selected sub-field, where said adjacent sub-fields are to be exposed subsequently,

said splicing means including means for determining the boundary portions of said predetermined and for partitioning and segregating the boundary portion in a selected sub-field of said matrix which extends into the next sequential adjacent sub-fields in the same row and column as said selected sub-field.

3. A system in accordance with claim 1 wherein said sub-fields include a selected sub-field and adjacent sub-fields located adjacent to said selected sub-field, where said adjacent sub-fields are to be exposed subsequently,

said splicing means including means for storing said spliced pattern data to be fed forward to said adjacent sub-fields of the pattern boundary portion in said selected and said adjacent sub-fields in a memory.

4. A system in accordance with claim 1 wherein said splicing means includes

means for providing spliced pattern data for scanning said electron beam over said surface of said workpiece to fully expose said surface with all portions of said predetermined pattern within said selected sub-field except said boundary portions.

5. A system in accordance with claim 1 wherein said splicing means includes

means for providing spliced pattern data for partially exposing said boundary portions in a currently selected sub-field with said pattern data, and partially exposing the boundary portions of adjacent sub-fields which extend into said currently selected sub-field.

6. A system in accordance with claim 1 including

a. memory means for storing pattern data representing at least one post processed pattern shape,

b. said means for storing pattern data being coupled to the output of said memory means,

c. said splicing means including

(1) means for receiving said pattern data from said means for storing,

(2) means for determining whether a splicing function is required on said pattern data, and

(3) output means for preparing said spliced pattern data,

d. said means for operating receiving said spliced pattern data from said output means and supplying said spliced pattern data to control exposure with an E-beam system.

7. A system for scanning an electron beam in a predetermined pattern over a surface, said surface being partitioned into a matrix of sub-fields, said system including

a. an electron beam,

b. means for determining the boundary portions of said predetermined pattern in a currently selected sub-field of said matrix which extends into the next sequential adjacent sub-fields in the same row and column as said selected sub-field;

c. means for storing the pattern data to be ,fed forward to adjacent sub-fields of the pattern boundary portion in said selected and said adjacent sub-fields in a memory;

d. means for scanning said electron beam over said surface to fully expose said surface with all portions of said predetermined pattern within said selected sub-field except the boundary portions; and

e. means for partially exposing said boundary portions in said currently selected sub-field with said pattern data, and partially exposing the boundary portions of said adjacent sub-fields which extend into said currently selected sub-field.

8. A system in accordance with claim 7 including means for deleting from said memory the coordinates of said pattern boundary portions in said currently selected subfield, selected previously.

9. A system in accordance with claim 7 wherein means for partially exposing said boundary portions include means for storing data to be fed forward for computation of the data for said adjacent sub-fields.

10. A system for scanning an electron beam in a predetermined pattern over a surface, said surface being partitioned into a matrix of sub-fields, said sub-fields including boundary portions of said pattern which lie within two or more adjacent sub-fields, said system comprising:

a. feed-forward memory means for storing the coordinates of the boundary portions of said pattern in a selected sub-field which are to be partially exposed by said electron beam during the scanning of a subsequently selected sub-field,

b. means for storing the coordinates of the boundary portions of said pattern in a previously selected sub-field which extends into the currently selected sub-field,

wherein said coordinates of said previously selected pattern boundary portions are deleted from said feed-forward memory means following the scanning of the currently selected sub-field.

11. A method for scanning an electron beam in a predetermined pattern over a surface, said surface being partitioned into a matrix of sub-fields, said method comprising the steps of:

a. determining the boundary portions of said predetermined pattern in a currently selected sub-field of said matrix which extends into the next sequential adjacent sub-fields in the same row and column as said selected sub-field;

b. storing the coordinates of said pattern boundary portion in said selected and said adjacent sub-fields in a memory means;

c. scanning said electron beam over said surface to fully expose said surface with all portions of said predetermined pattern within said selected sub-field except said boundary portions; and

d. partially exposing said boundary portions in said currently selected sub-field, and partially exposing the boundary portions of said adjacent sub-fields which extend into said currently selected sub-field.

12. A method in accordance with claim 11 including the step following step (d) of then deleting from said memory the coordinates of said pattern boundary portions in said selected currently selected sub-field, selected previously.