Phase modulated ronchi testing of aspheric surfaces

• US 4,818,108 A
• Filed: 12/14/1987
• Issued: 04/04/1989
• Est. Priority Date: 12/14/1987
• Status: Expired due to Term

• Current Assignee: Hughes Optical Products Incorporated Des Plaines Illinois
• Original Assignee: Hughes Optical Products Incorporated
• Inventors: Eppinger, Hans J.
• Primary Examiner(s): NOT, DEFINED
• Assistant Examiner(s): Koren, Matthew W.
• Application Number:
  US07/132,225
• Time in Patent Office: 477 Days
• Field of Search: 356/359, 356/360, 356/363, 356/371, 356/376, 356/124
• US Class Current: 356/513
• CPC Class Codes: G01B 11/255 for measuring radius of curvature measuring diameter G01B11/08

Abstract

An apparatus and method for measuring the surface contour of an aspheric optical surface 36. This is accomplished by splitting a single coherent beam of light into two individual beams with one beam tilted with respect to the other. The degree of tilt is adjusted until a single interference fringe is observed. This single fringe is then directed onto the aspheric surface 36 under test by means of a focusing lens 30. By the use of a beam spliter 24 the reflected fringe is then directed onto a multi-element optical detector 40 . The shape of the fringe reflected onto the detector 40 corresponds to the shape of the aspheric surface 36. A phase modulating mirror 26 is then moved to increase or decrease the path length of one of the two interfering beams of light. This results in sweeping the fringe across the entire aspheric surface 36 so that the entire aspheric surface 36 can be measured. The result is an easy to perform measurement of the aspheric surface 36 which is close to diffraction limited. Further, the above invention does not require a laboratory environment.

Claims

1. Apparatus for measuring the shape of aspheric surfaces comprising:

a coherent light source;

means for expanding the beam of light from the coherent light source;

means for splitting the light from the beam expanding means into two coaxial beams;

means for focusing and directing the two coaxial beams onto the aspheric surface to be measured;

means for adjusting the position the aspheric surface so that the optical axis of the aspheric surface coincides with the optical axis of the focusing means;

means for detecting incident light;

means for tilting one of coaxial beams with respect to the other to create an interference pattern between the coaxial beams; and

means for directing the light reflected from the aspheric surface onto the detector, whereby the interference pattern sensed by the detector gives an indication of the shape of the aspheric surface.

2. The apparatus of claim 1 further comprising:

means for modulating the optical path length of one of the two coaxial beams, thereby causing the interference pattern to move across the aspheric surface, thus permitting the shape of the entire aspheric surface to be measured by the detector.

3. The apparatus of claim 2 wherein the means for splitting the light beam from the coherent light source into two coaxial beams comprises:

a first beam splitter mounted at approximately a 45°

angle with respect to the light beam, said first beam splitter transmitting a portion of the light beam emitted from the beam expander and also reflecting a portion of said beam;

a fixed mirror mounted in the path of that portion of the light beam that is transmitted through the first beam splitter, said the fixed mirror also being mounted approximately perpendicular to said light transmitted through the first beam splitter, whereupon the transmitted light is reflected from the fixed mirror back to the beam splitter where the light is again split with a portion being transmitted and a portion being reflected in a direction transverse to the axis of the light emitted from the coherent light source; and

a second mirror movably mounted perpendicular to the fixed mirror and in the path of the portion from the light of the beam expander that is reflected by the first beam splitter, whereupon the light that is reflected by the second mirror is directed back to the beam splitter and a portion of this light is transmitted through the first beam splitter in a direction transverse to the direction of the original coherent light source.

4. The apparatus of claim 3 wherein the means for focusing and directing the two coaxial beams onto the aspheric surface to be measured comprises:

a second beam splitter mounted in the path of the two transverse light beams that are reflected from the fixed mirror and from the second mirror, the second beam splitter being mounted perpendicular to the first beam splitter, whereupon the light from the two transverse light beams are split, one portion being transmitted and the second portion being reflected;

a focusing lens mounted in the path of the two light beams after they are transmitted through the second beam splitter; and

said aspheric surface being mounted in the path of the light transmitted from the focusing lens and reflecting this light back toward the focusing lens, the aspheric surface being positioned such that the focal point of the aspheric surface coincides with the focal point of the focusing lens.

5. The apparatus of claim 3 wherein the means for directing the light reflected from the aspheric surface onto the detector comprises:

a lens mounted in the path of the two light beams at a point after these beams have been reflected from the aspheric surface back through the focusing lens and then reflected off the second beam splitter.

6. The apparatus of claim 1 wherein the coherent light source is a laser.

7. The apparatus of claim 3 wherein the aspheric surface is a mirror.

8. The apparatus of claim 7 wherein the means for tilting one of the coaxial beams comprises:

a rotating means attached to the fixed mirror for tilting the fixed mirror with respect to the second mirror, whereby the spatial frequency of the interference pattern thus created can be adjusted.

9. The apparatus of claim 8 wherein the means for tilting one of the coaxial beams is adjusted so that a single interference fringe is projected onto the aspheric surface, whereby geometric aberrations in the reflected fringe are minimized.

10. The apparatus of claim 3 wherein the means for modulating the optical path length of one of the two coaxial beams comprises:

a means for moving the second mirror in a direction perpendicular to the direction of the light incident upon it, whereby the optical path lengths of one of the two transverse beams of light is increased or decreased by approximately one wave length.

11. The apparatus of claim 1 wherein the detecting means includes a means for taking repeated measurements of the resulting fringe or fringes as the fringe or fringes move across the aspheric surface.

12. The apparatus of claim 10 wherein the means for measuring the shape of the fringe comprises:

a multi-element charged coupled device array coupled to a circuit means for measuring and displaying the intensity of the light incident upon each element of the charged coupled device array.

13. The apparatus of claim 1 wherein the means for adjusting the position of the aspheric surface until the optical axis of the aspheric surface coincides with the optical axis of the focusing means comprises:

an interferometer mirror for receiving one beam of light reflected by the second beam splitter and reflecting the beam back through the second beam splitter and onto the detector;

means for moving the aspheric surface about an axis perpendicular to the beam, until a symmetric fringe pattern is observed at the detector; and

means for adjusting the position of the aspheric surface along the optical axis until no fringes are observed at the detector.

14. Apparatus for measuring aspheric surfaces comprising:

a laser light source;

a beam expander mounted in the light path of the coherent light source for increasing the diameter of the light beam from the coherent light source;

a first beam splitter mounted at approximately 45°

angle with respect to the light beam, said first beam splitter transmitting a portion of the light beam emitted from the beam expander and also reflecting a portion of said beam;

a fixed mirror mounted in the path of that portion of the light beam that is transmitted through the first beam splitter, said the fixed mirror also being mounted approximately perpendicular so said light transmitted through the first beam splitter, whereupon the transmitted light is reflected from the fixed mirror back to the beam splitter, where the light is again split with a portion being transmitted and a portion being reflected in a direction transverse to the axis of the light emitted from the coherent light source;

a second mirror movably mounted approximately perpendicular to the fixed mirror and in the path of the portion of the light from the beam expander that is reflected by the first beam splitter whereupon the light that is reflected by the second mirror is directed back to the beam splitter and a portion of this light is transmitted through the first beam splitter in a direction transverse to the direction of the original coherent light source;

a second beam splitter mounted in the path of the two transverse light beams that are reflected from the fixed mirror and from the second mirror, the second beam splitter being mounted perpendicular to the first beam splitter whereupon the light from the two transverse light beams are split, one portion being transitted and a second portion being reflected;

a pivotal axis upon which the fixed mirror is mounted whereby the fixed mirror can be tilted at a small angle thereby creating an interference pattern between the two transverse light beams;

an interferometer mirror mounted in the path of the light reflected from the second beam splitter;

a focusing lens mounted in the path of the two light beams transmitted through the second beam splitter;

an aspheric surface mounted in the path of the light transmitted from the focusing lens which reflects this light back toward the focusing lens, the aspheric surface being positioned such that the optical axis of the aspheric surface coincides with the optical axis of the focusing lens;

a second lens mounted in the path of the two light beams at a point after these beams have been reflected from the aspheric lens back through the focusing lens and then reflected off the second beam splitter;

a detector for detecting the light which is transmitted through the second lens whereby one or more interference fringes can be sensed by the detector and the shape of the detected fringe pattern gives an indication of the shape of the aspheric surface; and

means for moving said second mirror whereby the path length of one of the two transverse beams of light is increased or decreased by approximately one wavelength, thereby causing the interference fringe to move across the aspheric surface thus permitting the entire aspheric surface to be measured by the detector.

15. A method for measuring the shape of aspheric surfaces comprising:

providing a coherent light source;

expanding the beam of light from the coherent light source;

splitting the expanded light beam into two coaxial beams;

focusing and directing the two coaxial beams onto the aspheric surface to be measured;

adjusting the position of the aspheric surface so that the focal point of the aspheric surface coincides with the focal point of the focusing means;

tilting one of the two coaxial beams with respect to the other to create an interference pattern between the two coaxial beams;

providing a means for detecting light;

directing the light reflected from the aspheric surface onto the detector, whereby the interference pattern sensed by the detector gives an indication of the shape of the aspheric surface.

16. The method of claim 15 further comprising the step of:

modulating the optical path length of one of the two coaxial beams, thereby causing the interference pattern to move across the aspheric surface, thus permitting the shape of the entire aspheric surface to be measured by the detector.

17. The method of claim 15 wherein the step of the tilting one of the two coaxial beams further comprises the step of tilting one of the two coaxial beams until a single interference fringe is projected onto the aspheric surface, whereby geometric aberrations in the reflected fringe are minimized.