Method and apparatus of using a two beam interference microscope for inspection of integrated circuits and the like

• US 4,818,110 A
• Filed: 05/06/1986
• Issued: 04/04/1989
• Est. Priority Date: 05/06/1986
• Status: Expired due to Term

• Current Assignee: KLA Instruments, Corporation
• Original Assignee: KLA Instruments, Corporation
• Inventors: Davidson, Mark
• Primary Examiner(s): Nelms, David C.
• Assistant Examiner(s): Koren, Matthew W.
• Application Number:
  US06/860,308
• Time in Patent Office: 1,064 Days
• Field of Search: 356/358, 356/359, 356/384, 356/387, 356/372, 356/376
• US Class Current: 356/512
• CPC Class Codes: G01B 11/024 by means of diode-array scanning
• CPC Class Codes: G01B 9/0203 With imaging systems
• CPC Class Codes: G01B 9/02072 by calibration or testing of interferometer
• CPC Class Codes: G01B 9/02083 characterised by particular signal processing and presentation
• CPC Class Codes: G01B 9/0209 Low-coherence interferometers
• CPC Class Codes: G01N 21/95607 using a comparative method
• CPC Class Codes: G03F 7/70625 Dimensions, e.g. line width, critical dimension [CD], profile, sidewall angle or edge roughness

Abstract

A specially adapted Linnik microscope is used in combination with a video camera, a wafer transport stage and data processing electronics to form a novel inspection apparatus based on the use of the two beam interference microscope. The apparatus can utilize either broad band or narrow band light to develop a plurality of interference images taken at different axial positions relative to the surface under investigation. The point-by-point brightness along scan lines across such images is then used to develop data which is proportional to the degree of coherence (or to the fringe amplitude, the variance of the fringes, or the amplitude of oscillation of the fringes) as the optical path difference is varied in a two beam optical or acoustic microscope.

Claims

1. A method of inspecting an object and generating synthetic image data comprising the steps of:

(a) using an interference optical system including an object channel and a reference channel for simultaneously inspecting an object and a reflective reference surface and developing a plurality of images formed by the interference between object wave energy passing from said object and through said object channel to an image plane and reference wave energy passing from said reference surface and through said reference channel to said image plane, each said image being formed in response to a change in position of either said object or said reference surface;

(b) determining for each image the absolute value of the degree of coherence between said object wave energy and said reference wave energy by calculating the variance along each column of an array of mxn pixels in said image plane, where m and n are integers, and generating absolute value coherence data corresponding to each said column; and

(c) using said absolute value coherence data to generate synthetic image data representative of a particular characteristic of said object, wherein the brightness of each pixel element of a synthetic image developed using said synthetic image data is proportional to said absolute value coherence data.

2. A process for generating synthetic image data representative of a cross-section of an at least partially reflective irregular surface of an object formed by a portion of a semiconductor wafer having an elongated strip of raised surface extending therethrough, comprising the steps of:

(a) illuminating the irregular object surface with light from a source of illumination;

(b) illuminating a reflective reference surface with light from said source of illumination, said reference surface being formed by an optically flat mirror;

(c) collecting object light reflected from said object surface and directing said object light along a first optical axis;

(d) collecting reference light reflected from said reference surface and directing said reference light along a second optical axis at least a portion of which is parallel to said first optical axis;

(e) focussing the light directed along said first and second optical axes to form a fringed image pattern resulting from interference of said object light and said reference light;

(f) orientating said wafer so that a selected scan line may be directed substantially orthogonal relative to the length of said elongated strip;

(g) inspecting said image pattern to develop a series of coherence data corresponding to the fringe amplitude at points along said scan line;

(h) incrementally changing the position of said object along said first optical axis, each time repeating steps (a) through (e) and (g);

(i) processing the plurality of series of coherence data to develop synthetic image data corresponding to a cross-sectional profile of said object surface taken in a plane including said selected scan lines;

(j) displaying said synthetic image data to visually depict a cross-sectional profile of said object surface taken in the plane including said scan lines; and

(k) determining the position of said object along said first optical axis at which the value of said coherence data corresponding to the crossing of a first particular scan line over said raised surface is at a maximum relative to the corresponding coherence data of the other scan lines and identifying this position as corresponding to the top surface of said strip.

3. A process as recited in claim 2, and further comprising the step of;

(l) detecting the width of the top of said raised surface by measuring the length of the portion of said first particular scan line over which said coherence data is at a maximum.

4. A process as recited in claim 3, and further comprising the steps of;

(m) determining the position of said object along said first optical axis when the value of said coherence data corresponding to the crossing of another particular scan line over portions of said surface other than said raised surface are at a maximum relative to the corresponding data of the other scanned lines; and

(n) determining the width of the base of said raised surface by measuring the separation between the portions of said other particular scan lines over which said data is at a maximum.

5. A process as recited in claim 4, and further comprising the step of:

(o) determining the height of said raised surface above the adjacent wafer surface by measuring the distance between the position at which the object is positioned along said first optical axis when the width of the top of said raised surface is detected and the position along said first optical axis when the width of the base of said raised surface is detected.

6. A process as recited in claim 5 and further comprising the step of;

(p) calculating the slopes of the side walls of said raised surface, in the plane including said scan lines, as a function of the height of the top of the raised surface above the base thereof and the difference in width of the top and the base along the corresponding scan lines.

7. A process as recited in claim 2, wherein said synthetic image data is developed by calculating the intensity of the interference fringes in said fringed image pattern and by calculating the local variance of the image intensity caused by the fringes.

8. A process as recited in claim 2, wherein said synthetic image data is generated by calculating the variance of the intensity of each pixel in the image plane as the path difference between the first and second optical paths is made to change.

9. A method of measuring certain dimensions of an elongated strip of raised surface formed on an object, such as a semiconductor wafer or photomask, using an interference optical system to develop images formed by interference between object wave energy passing from the object and through an object channel to an image plane and reference wave energy passing through a reference channel to the image plane, comprising the steps of:

(a) illuminating the object surface with light from a source of illumination;

(b) illuminating a reflective reference surface with light from said source of illumination;

(c) collecting object light reflected from said object surface and directed along a first optical axis through said object channel;

(d) collecting reference light reflected from said reference surface and directed along a second optical axis through said reference channel, said second optical axis having at least a portion thereof which is parallel to said first optical axis;

(e) focusing the light directed along said parallel portions of said first and second optical axes onto an image plane to form an interference image pattern resulting from interference of said object light and said reference light;

(f) inspecting the image pattern by detecting the light intensity at each pixel in an array of mxn pixels extending across the image of said strip to produce pixel data;

(g) scanning the pixel data and calculating therefrom coherence data representing the absolute value or magnitude of the complex degree of coherence of light incident upon said image plane and storing the calculated coherence data for subsequent reference;

(h) incrementally changing the position of said object along said first optical axis, each time repeating steps (a) through (g); and

(i) using the stored coherence data to generate data from which a synthetic image corresponding to a transverse cross-section of the measured strip may be developed.

10. A method as recited in claim 9 and further including the step of:

inspecting the stored coherence data to determine the height of the top surface of said strip relative to the adjacent surface of said object, such height being measured by determining a first position along said first optical axis at which maximum coherence occurs at a point in an array corresponding with said top surface, and by determining a second position along said first optical axis at which maximum coherence occurs at a point in an array corresponding with said adjacent surface, the measured height of said top surface being equal to the distance between said first position and said second position.

11. A method as recited in claim 10 and further comprising the step of determining the width of the top surface of said strip by applying an edge finding algorithm to coherence data taken from the image corresponding to said top surface.

12. A method as recited in claim 10 and further comprising the step of measuring the width of the bottom of the strip by applying an edge finding algorithm to coherence data taken from the image corresponding to said adjacent surface.

13. A method as recited in claim 9 wherein the step of calculating the absolute value or magnitude of the complex degree of coherence is accomplished by measuring the variance of the interference image along pixel columns of an mxn array inspected at each position of said object along said optical axis.

14. A method as recited in claim 9 wherein the step of calculating the absolute value or magnitude of the complex degree of coherence is accomplished by calculating the variance of the light intensity among corresponding pixels of the several image patterns inspected as the position of said object is changed along said first optical axis producing a change in the path difference between said object channel and said reference channel.

15. A method as recited in claim 9 wherein the step of calculating the absolute value or magnitude of the complex degree of coherence is accomplished by calculating the variance of the light intensity among corresponding pixels of the several image patterns inspected as the position of said reference mirror is changed along said second optical axis producing a change in the path difference between said object channel and said reference channel.

16. A method of inspecting an object and generating synthetic image data comprising the steps of:

(a) using an interference optical system including an object channel and a reference channel for simultaneously inspecting an object and a reflective reference surface and developing a plurality of images formed by the interference between object wave energy passing from said object and through said object channel to an image plane and reference wave energy passing from said reference surface and through said reference channel to said image plane, each said image being formed in response to a change in position of either said object or said reference surface

(b) determining for each image the absolute value of the degree of coherence between said object wave energy and said reference wave energy by calculating the variance in the intensity of each pixel over the said plurality of images and generating corresponding absolute value coherence data; and

(c) using said absolute value coherence data to generate synthetic image data representative of a particular characteristic of said object, wherein the brightness of each pixel element of a synthetic image developed using said synthetic image data is proportional to said absolute value coherence data.