Method for producing sintered metalized aluminum nitride ceramic bodies

• US 4,818,626 A
• Filed: 08/03/1987
• Issued: 04/04/1989
• Est. Priority Date: 09/04/1986
• Status: Expired due to Fees

• Current Assignee: Heraeus Holding GMBH
• Original Assignee: WC Heraeus GmbH (Heraeus Holding GMBH)
• Inventors: Brunner, Dieter, Werdecker, Waltraud, Kutzner, Martin
• Primary Examiner(s): Bell, Janyce
• Application Number:
  US07/081,322
• Time in Patent Office: 610 Days
• Field of Search: 427/229, 427/96, 427/226, 427/126.2, 427/123, 427/282, 427/380, 427/376.6, 427/376.3, 427/126.3, 428/901, 428/457, 428/697, 428/648, 428/699, 428/704, 428/469
• US Class Current: 428/469
• CPC Class Codes: C04B 20/0076 characterised by the grain distribution
• CPC Class Codes: C04B 35/581 based on aluminium nitride
• CPC Class Codes: C04B 41/009 characterised by the material treated
• CPC Class Codes: C04B 41/4578 Coating or impregnating of green ceramics or unset concrete
• CPC Class Codes: C04B 41/5025 with ceramic materials copper oxide or solid solutions thereof C04B41/5074
• CPC Class Codes: C04B 41/5053 non-oxide ceramics carbon or carbonisable materials C04B41/5001
• CPC Class Codes: C04B 41/5133 with a composition mainly composed of one or more of the refractory metals
• CPC Class Codes: C04B 41/88 Metals
• CPC Class Codes: Y10S 428/901 Printed circuit
• CPC Class Codes: Y10T 428/31678 Of metal

Abstract

To permit using a single firing step, sintered aluminum nitride ceramic bodies provided with firmly adhering electrically conductive films or resistive layers can be produced by sintering of the green ceramic bodies and the films or layers in common, if these films or layers additionally contain a mixture of aluminum nitride and rare earth metal oxide.

Claims

1. A method for producing a sintered metalized aluminum nitride ceramic body, comprising the steps of:

applying, onto a green aluminum nitride ceramic body, a metalizing paste comprised of about 50 to 90% of an inorganic component which comprises 90 to 99% by weight of powdered metalizing agent selected from the group consisting of tungsten, molybdenum, hafnium nitride, zirconium nitride and titanium nitride and 1 to 10% by weight of a powdered mixture comprising 5 to 95% by weight of aluminum nitride and 5 to 50% by weight of a rare earth metal oxide which is dispersed in an amount of about 10 to about 50% of anorganic vehicle to form the metalizing paste;

thereafter

drying the metalizing paste; and

thereafter

sintering the metalizing paste and the green ceramic body by heating to a temperature of from about 1750°

C. to about 2000°

C. in a nitrogen or nitrogen-hydrogen mixture atmosphere to convert the metalizing paste and the green ceramic body into said sintered metalized aluminum nitride body.

2. The method of claim 1, wherein the drying of the metalizing paste comprises heating to form about 120°

to about 300°

C. and then heating under nitrogen or a mixture of nitrogen and hydrogen.

3. The method of claim 1, wherein the metalizing agent comprises titanium nitride, zirconium nitride and/or hafnium nitride.

4. The method of claim 1, wherein the metalizing agent comprises tungsten and/or molybdenum.

5. The method of claim 1, wherein the metalizing agent is present in the form of a mixture of a plurality of powders having different average particle sizes.

6. The method of claim 5, wherein the mixture comprises two powders, the average particle sizes of which are in a ratio of approximately from 1:

5 to approximately 1;

8 to one another.

7. The method of claim 6, wherein the aluminum nitride powder contained in the metalizing paste has an average particle size of les than 10 microns and a specific surface area of between about 2 and about 40 m² /g.

8. The method of claim 7, wherein the specific surface area of the nitride powder is between 4 and 7 m² /g.

9. The method of claim 8, wherein the rare earth metal oxide is yttrium oxide.

10. The method of claim 8, wherein the rare earth metal oxide is a mixture of yttrium oxide with 0 to 50% by weight of aluminum oxide.

11. The method of claim 10, wherein the metalizing agent is tungsten.

12. The method of claim 10, wherein the metalizing agent is titanium nitride.

13. The method of claim 10, wherein the metalizing agent is zirconium nitride.

14. The method of claim 5, wherein the metalizing agent is powdered tungsten composed of 62-78% by weight of a powder having an average particle size of 2-7 microns and 22-38% by weight of a powder having an average size of 0.4-1.2 microns.

15. The method of claim 5, wherein the metalizing agent is powdered molybdenum composed of 75-85% by weight of powder having an average particle size of 0.7-1.2 microns and 15-25% by weight of a powder having an average size of 4-8 microns.

16. The method of claim 5, wherein the metalizing agent is powdered titanium nitride composed of 65-75% by weight of a powder having an average particle size of 3-6 microns and 25-35% by weight of a powder having an average particle size of 0.6-1 microns.

17. The method of claim 5, wherein the metalizing agent is powdered zirconium nitride composed of 65-75% by weight of a powder having an average particle size of 4-10 microns and 25-35% by weight of a powder having an average particle size of 0.8-3 microns.

18. The method of claim 5, wherein the metalizing agent is powdered hafnium nitride composed of 90-99% by weight of a powder having an average particle size of 5-10 microns and 1-10% by weight of a powder having an average particle size of 0.8-2 microns.

19. The method of claim 1, wherein the aluminum nitride powder contained in the metalizing paste hase an average particle size of less than 10 microns and a specific surface area of between about 2 and about 40 m² /g.

20. The method of claim 19, wherein the rare earth metal oxide is a mixture of yttrium oxide with 0 to 50% by weight of aluminum oxide.

21. The method of claim 1, wherein the step of applying the metalizing paste comprises screen printing of the paste onto the green ceramic body and into via holes therein.

22. A microcircuit prepared by the method of claim 1.