Merged bipolar/CMOS technology using electrically active trench
First Claim
1. A semiconductor circuit comprising:
- a conductive substrate of a first conductivity type material;
first and second semiconductor areas of a second conductivity type material formed on said substrate;
a trench separating said first and second semiconductor areas, said trench including electrically isolating sidewalls and a bottom formed in said substrate;
a conductive material filling said trench and in electrical contact with said substrate; and
first and second semiconductor devices formed in respective said first and second semiconductor areas.
1 Assignment
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Accused Products
Abstract
Disclosed is a structure and method of fabricating bipolar and MOSFET devices isolated by an electrically active trench. A doped epitaxial layer (24) is formed on semiconductor substrate (10). A trench (36) is formed through the epitaxial layer (24) down to the substrate (10). The trench (36) is filled with a conductive material (54) and a topside contact (182) is formed in electrical contact with the conductive trench. A bipolar transistor (176) is formed in the epitaxial area (38) on one side of the trench (36) and a MOSFET transistor (178) is formed in the epitaxial area (40) on the other side of the trench (36). Plural contacts (200-206) can be made to the top surface of the trench (186), thereby maintaining the underlying substrate (10) at a desired and uniform potential.
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Citations
22 Claims
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1. A semiconductor circuit comprising:
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a conductive substrate of a first conductivity type material; first and second semiconductor areas of a second conductivity type material formed on said substrate; a trench separating said first and second semiconductor areas, said trench including electrically isolating sidewalls and a bottom formed in said substrate; a conductive material filling said trench and in electrical contact with said substrate; and first and second semiconductor devices formed in respective said first and second semiconductor areas. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9)
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10. A method of fabricating a semiconductor circuit with a bipolar transistor isolated from a MOSFET transistor, comprising the steps of:
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forming a layer of semiconductor material of a first conductivity type on a substrate of second conductivity type; forming a trench through said layer of semiconductor material into contact with said substrate; forming an electrical isolation adjacent the sidewalls of said trench; filling said trench with a conductive material of said second conductivity type; and forming a bipolar transistor and a MOSFET transistor in said layer of semiconductor material, each said transistor formed on opposing sides of said trench. - View Dependent Claims (11, 12, 13, 14, 15, 16, 17)
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18. A method of providing multiple contacts to a substrate of a semiconductor circuit, comprising:
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forming a layer of semiconductor material on said substrate; forming a trench matrix through said semiconductor material into contact with said substrate; filling said trench matrix with a conductive material which is in electrical contact with said substrate; and forming a plurality of electrical contacts to said conductive material at locations remote from said substrate. - View Dependent Claims (19, 20, 21, 22)
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Specification