Capacitance manometer having stress relief for fixed electrode

• US 4,823,603 A
• Filed: 05/03/1988
• Issued: 04/25/1989
• Est. Priority Date: 05/03/1988
• Status: Expired due to Term

• Current Assignee: Entegris Incorporated
• Original Assignee: Vacuum General, Inc. (Entegris Incorporated)
• Inventors: Ferran, Robert J., Osterstrom, Gordon E.
• Primary Examiner(s): Woodiel, Donald O.
• Application Number:
  US07/189,780
• Time in Patent Office: 357 Days
• Field of Search: 73/718, 73/724, 73/708, 361/283
• US Class Current: 73/724
• CPC Class Codes: G01L 19/04 Means for compensating for effects of changes of temperature , i.e. other than electric compensation
• CPC Class Codes: G01L 9/0072 using variations in capacitance
• CPC Class Codes: G01L 9/12 by making use of variations in capacitance , i.e. electric circuits therefor

Abstract

An improved capacitance manometer includes a thin, electrically conductive diaphragm fixedly mounted to a housing. The diaphragm separates a first chamber that is subjected to a reference pressure from a second chamber that is subjected to a pressure that is to be measured relative to the reference pressure. The diaphragm flexes in response to a pressure differential between the two chambers. The diaphragm comprises one electrode of a variable capacitor. A second electrode of the variable capacitor is provided by a fixed electrically conductive area mounted on a ceramic disc or other fixed electrode support. The ceramic disc is mounted within the housing so that the electrically conductive area on the ceramic disc is proximate to and spaced apart from the diaphragm in generally parallel relationship to the diaphragm when the diaphragm is in a substantially relaxed condition (i.e., not flexed by a pressure differential). In order to prevent the ceramic disc and its associated conductive area from bending as the temperature changes, the ceramic disc is mechanically isolated from the housing by a roller bearing structure that preferably is a spherical or cylindrical electrical insulator. The roller bearing structure allows the ceramic disc to move with respect to the housing to prevent temperature induced forces that would otherwise cause bending. The roller bearing structure provides the additional advantage of significantly reducing leakage current through the ceramic disc that would otherwise affect the accuracy of measurements made with the capacitance manometer.

Claims

1. A variable capacitance measuring device responsive to a variable parameter, said measuring device comprising:

a variable capacitor, said variable capacitor comprising;

a first electrically conductive element comprising a first electrode of said variable capacitor, at least a portion of said first electrode movable in a first direction in response to variations in said variable parameter; and

a second electrically conductive element comprising a second electrode of said variable capacitor; and

rolling means for mounting said second electrode proximate to said first electrode so that said second electrode is substantially immovable in said first direction with respect to said first electrode and so that said second electrode is movable in a second direction perpendicular to said first direction.

2. The variable capacitance measuring device as defined in claim 1, wherein said variable parameter is differential pressure between a reference pressure and an unknown pressure, and wherein said first electrode comprises a diaphragm having first and second sides, said diaphragm positioned so that said reference pressure is on said first side of said diaphragm and said unknown pressure is on said second side of said diaphragm, at least a portion of said diaphragm being movable in said first direction in response to changes in said pressure differential.

3. The variable capacitance measuring device as defined in claim 1, further comprising:

a housing, said housing having a mounting surface therein; and

an insulating support within said housing, said insulating support having a first surface on which said second electrode is secured,

said rolling means for mounting said second electrode proximate to said first electrode comprising a roller bearing interposed between said insulating support and said mounting surface of said housing, the position of said roller bearing selected so that;

said insulating support is substantially immovable with respect to said mounting surface of said housing in said first direction; and

said insulating support is movable with respect to said mounting surface in said second direction.

4. A variable capacitance measuring device responsive to a variable parameter, said measuring device comprising:

a housing;

a first electrode secured to said housing, said first electrode reciprocally movable along a first axis within said housing in response to changes in said variable parameter;

a second electrode within said housing, said second electrode spaced apart from said first electrode so that said first and second electrodes form a capacitor;

an insulator, said insulator having a surface on which said second electrode is mounted; and

a roller bearing interposed between said insulator and said housing, said roller bearing positioned so that said insulator and said second electrode are immovable with respect to said first electrode in a direction along said first axis, said roller bearing permitting movement of said second electrode and said insulator in a plane perpendicular to said first axis.

5. The variable capacitance measuring device as defined in claim 4,

wherein said first electrode comprises a diaphragm secured to said housing, said diaphragm separating a first region within said housing having a first pressure from a second region within said housing having a second pressure;

wherein said variable parameter is a differential pressure between said first and second regions; and

wherein at least a portion of said diaphragm moves along said first axis in a direction toward said second electrode when one of said first and second pressures increases relative to the other of said first and second pressures and said portion of said diaphragm moves along said first axis in a direction away from said diaphragm when said one of said first and second pressures decreases relative to the other of said first and second pressures.

6. A variable capacitance manometer for measuring changes in pressure, said manometer comprising:

an electrically conductive housing, said housing comprising a material having a first coefficient of thermal expansion;

a diaphragm mechanically and electrically coupled to said housing, said diaphragm separating said housing into first and second pneumatically isolated pressure chambers, said first pressure chamber having a first pressure and said second pressure chamber having a second pressure that is variable relative to said first pressure thereby providing a pressure differential between the first and second chambers, said diaphragm having a portion thereof movable in a first direction along an axis toward one of said first and second chambers when said pressure differential increases and movable in a second direction along said axis away from said one of said first and second pressure chambers when said pressure differential increases, said diaphragm being the first electrode of a variable capacitor;

a second electrode of said variable capacitor positioned within one of said first and second pressure chambers proximate to said diaphragm, said second electrode spaced apart from said portion of said diaphragm by a distance that varies in response to changes in said pressure differential between said first and second pressure chambers;

an insulating support that supports said second electrode in a fixed position in said housing in a plane perpendicular to said axis, said insulating support comprising a material having a second coefficient of thermal expansion different from said first coefficient of thermal expansion; and

roller bearings interposed between said insulating support and said housing, said roller bearings positioned to prevent movement of said insulating support in a direction perpendicular to said plane while allowing movement of said insulating support in a direction within said plane.

7. The variable capacitance manometer as defined in claim 6, wherein said roller bearings comprise an electrical insulator to provide electrical isolation between said insulating support and said electrically conductive housing.

8. The variable capacitance manometer as defined in claim 7, wherein said roller bearings comprise sapphire.

9. The variable capacitance manometer as defined in claim 6, wherein said roller bearings are spherical.

10. The variable capacitance manometer as defined in claim 6, wherein said roller bearings are cylindrical.

11. A variable capacitance manometer for measuring a difference in first and second pressures, said variable capacitance manometer comprising:

a housing;

a fixed electrically conductive electrode positioned within said housing, said fixed electrically conductive electrode forming a first electrode of a variable capacitor;

an electrically conductive diaphragm within said housing, said diaphragm forming a second electrode of said variable capacitor, said diaphragm having two sides, one of said first and second sides subjected to one of said two pressures, the other of said first and second sides subjected to the other of said two pressures, a portion of said diaphragm movable in response to changes in a pressure differential between said two pressures thereby changing the capacitance between said diaphragm and said fixed electrode;

an insulator that supports said fixed electrode within said housing; and

a set of roller bearings interposed between said insulator and said housing, said roller bearings positioned to prevent movement of said insulator in a first direction toward said diaphragm and to permit movement of said insulator in a plane perpendicular to said first direction.

12. The capacitance manometer as defined in claim 11, wherein said roller bearings are spherical.

13. The capacitance manometer as defined in claim 12, wherein said roller bearings comprise an electrically insulating material.

14. The capacitance manometer as defined in claim 13, wherein said roller bearings comprise sapphire.

15. The capacitance manometer as defined in claim 11, wherein said roller bearings are cylindrical.

16. The capacitance manometer as defined in claim 15, wherein said roller bearings comprise an electrically insulating material.

17. The capacitance manometer as defined in claim 16, wherein said roller bearings comprise sapphire.