Fabry-perot interferometer
First Claim
1. A Fabry-Perot interferometer having two reflective surfaces in which one of the reflective surfaces is provided on a diaphragm mounted by a hinge assembly to a support wherein the diaphragm and the hinge assembly are integral with the support, and the support, diaphragm and hinge assembly are made form a single crystal.
1 Assignment
0 Petitions
Accused Products
Abstract
A Fabry-Perot interferometer comprises a single crystal silicon substrate (1) with an integrally formed diaphragm (6) supported between walls (2-5). A glass superstrate (14) is mounted adjacent the substrate (1) with a spacer (13) sandwiched therebetween. Facing surfaces (12, 16) of the diaphragm (6) and superstrate (14) are polished and suitably coated to define reflective surfaces and the position of the diaphragm may be altered to vary the response of the interferometer.
74 Citations
15 Claims
- 1. A Fabry-Perot interferometer having two reflective surfaces in which one of the reflective surfaces is provided on a diaphragm mounted by a hinge assembly to a support wherein the diaphragm and the hinge assembly are integral with the support, and the support, diaphragm and hinge assembly are made form a single crystal.
-
11. A Fabry-Perot interferometer comprising:
-
a first partially reflective member; a second partially reflective member disposed parallel to the first member and adjustably disposed with respect thereto so as to permit variable dimensioning of an optical Fabry-Perot interferometer cavity formed therebetween; and an at least partially transparent electrode means disposed on each of said members for electrostatically controlling said variable dimensioning as a function of an electrical signal impressed across said electrode means. - View Dependent Claims (12, 13, 14, 15)
-
Specification