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Vision metrology system

  • US 4,825,394 A
  • Filed: 05/07/1985
  • Issued: 04/25/1989
  • Est. Priority Date: 05/07/1985
  • Status: Expired due to Fees
First Claim
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1. A vision head for a vision metrologysystem, comprising:

  • a primary prism,a primary objective lens,zoom optics means comprising a plurality of lensesa sensor,said primary prism, primary objective lens, and said zoom optics means comprising an optical path through which an image of an object may pass onto said sensor,said primary prism comprising structure positioned to allow light to pass therethrough by way of a first path which coincides with said optical path and by way of a second path having an initial portion which is different from said first path and which intercepts said first path and then merges with said first path,a reseau pattern means having a plurality of reseaus formed in a given pattern,light means for projecting an image of said reseaus through said primary prism onto said sensor by way of said second path for use for correcting in real-time, optical distortion of the image of the object passing through said plurality of lenses of said zoom optics means.

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