Method and apparatus for monitoring the location of wafer disks

• US 4,827,110 A
• Filed: 06/11/1987
• Issued: 05/02/1989
• Est. Priority Date: 06/11/1987
• Status: Expired due to Term

• Current Assignee: Asyst Technologies Incorporated (Azenta, Inc.)
• Original Assignee: Fluoroware, Inc. (Entegris Incorporated)
• Inventors: Rossi, Alexander N., Sancen, Mario N.
• Primary Examiner(s): Pitts, Harold I.
• Application Number:
  US07/061,935
• Time in Patent Office: 691 Days
• Field of Search: 235/376, 235/380
• US Class Current: 235/376
• CPC Class Codes: G03F 7/70541 Tagging, i.e. hardware or software tagging of features or components, e.g. using tagging scripts or tagging identifier codes for identification of chips, shots or wafers
• CPC Class Codes: G03F 7/7075 Handling workpieces outside exposure position, e.g. SMIF box
• CPC Class Codes: G06K 7/10009 sensing by radiation using wavelengths larger than 0.1 mm, e.g. radio-waves or microwaves
• CPC Class Codes: H01L 21/67294 using identification means, e.g. labels on substrates or labels on containers
• CPC Class Codes: H01L 21/67326 Horizontal carrier comprising wall type elements whereby the substrates are vertically supported, e.g. comprising sidewalls

Abstract

A method and system for monitoring the process of a plurality of batches of semiconductor wafers or memory disks through a series of processing operations. Each batch is placed in a carrier in which it is transported to the locations where the processing operations are performed. Each carrier is provided with a transponder tag coded to be responsive to within reading range of a reader unit which transmits a radio frequency signal to the transponder tag and reads and decodes a phase modulated signal returned by the transponder tag to uniquely identify the carrier that is positioned within range of the reader unit. Further control apparatus receives information from the reader units to permit the monitoring process of semiconductor wafer or memory disk batches through multiple processing operations.

Claims

1. A method for monitoring the progress of a plurality of batches of disks through a multiplicity of operations at several locations comprising the steps of:

inserting each batch of disks into a carrier constructed and arranged for supporting the disks in a parallel, axially arranged spaced array;

providing each carrier with a transponder tag constructed, arranged and coded for uniquely identifying the carrier and the batch inserted therein;

detecting the presence of each carrier at one of the several locations by operating a multiplicity of limited range reader units, each of which is positioned adjacent to one of the locations, the reader units being constructed and arranged for determining the identification cf any transponder tag within its detection range; and

monitoring the progress of at least one batch of disks through various locations by updating and storing location information received from the reader units.

2. A system for tracking batches of disks through a plurality of operations comprising:

a plurality of carriers, each of which is adapted for carrying a batch of at least one disks;

a plurality of transponder tags, each of which is mounted on the outside surface of a vertical wall of a carrier, each tag including a transmitting antenna oriented perpendicular to the plane of the disks;

at least one remote recognition reader constructed and arranged for transmitting an RF signal to the transponder tag and receiving a coded RF response therefrom indicative of the identity of a particular batch of disks and providing an output signal characteristic thereof; and

control means for receiving the output from the readers and providing a control signal indicative of which carrier is within the range of which reader.

3. The invention of claim 2, wherein the transponder tag includes a surface acoustic wave crystal adapted for modifying the phase of a received signal in accordance with a predetermined code and wherein the crystal is inductively coupled to the antenna.

4. The invention of claim 3 wherein each of the reader units transmits a radio frequency signal to a transponder tag within its detection range and wherein the transponder tag receives the signal and returns a phase modulated signal coded to uniquely identify the transponder tag and the carrier upon which it is mounted.

5. The invention of claim, 2 wherein the trans-ponder tag is mounted on the carrier by:

inserting the transponder tag in a recess in a surface of the carrier, the recess being constructed and arranged for supporting the transponder tag perpendicular to the plane of disks carried in the carrier; and

sealing the transponder tag in the recess with a cover means constructed and arranged for covering and sealing the transponder tag.

6. The invention of claim 2 wherein the transponder tag is comprised of:

printed circuit antenna means mounted on a base; and

a surface acoustic have transducer mounted on the base, the transducer having at least one flat surface thereof mounted to the base with the antenna means operatively coupled to the transducer.

7. The invention of claim 6 wherein the transducer package includes transducer antenna means and wherein the antenna means is operatively coupled to the transducer antenna means by inductive coupling.

8. The invention of claim 7 wherein the transducer package is operatively coupled to the antenna by a conductive connection.

9. The invention of claim 2 wherein each of the reader units transmits a radio frequency signal to a transponder within its detection range which receives the signal and returns a phase modulated signal coded for uniquely identifying the transponder tag and the carrier upon which it is mounted.