Process for the production of a telecentric light beam, device for carrying out this process and process for the production of an HOE

• US 4,832,426 A
• Filed: 03/23/1987
• Issued: 05/23/1989
• Est. Priority Date: 04/03/1986
• Status: Expired due to Term

• Current Assignee: Zumbach Electronic AG
• Original Assignee: Zumbach Electronic AG
• Inventors: Kaser, Beda
• Primary Examiner(s): NOT, DEFINED
• Assistant Examiner(s): Callaghan, Terry S.
• Application Number:
  US07/029,436
• Time in Patent Office: 792 Days
• Field of Search: 350/3.71, 350/3.72, 350/3.73, 350/320, 350/3.7
• US Class Current: 359/19
• CPC Class Codes: G01B 11/105 using photoelectric detection means
• CPC Class Codes: G02B 26/125 Details of the optical system between the polygonal mirror and the image plane G02B26/123, G02B26/127 take precedence; F-Theta lenses G02B13/0005
• CPC Class Codes: G02B 5/32 Holograms used as optical elements
• CPC Class Codes: Y10S 359/90 Methods

Abstract

A light beam is repeatedly deflected in the longitudinal direction through a holographic element HOE by means of a rotating multi-faceted mirror. This HOE is so formed that the beam entering at different angles leaves the HOE as a telecentric beam. Through a further HOE the telecentric beam is diffracted onto an electro-optic transducer. In the region of the telecentric beam is located an object to be measured, and the time of the interruption of the telecentric beam by means of this object enables the dimension of the latter to be determined. The production of the telecentric beam and the deflection of the latter onto the transducer by means of the HOE allows a simple cost-effect manufacture as well as a simple evalution of the measurements with increased precision. The manufacture of the HOE is likewise simple.

Claims

1. A device for the production of a telecentric light beam, comprising:

at least one holographic optical element, having a focal point; and

means located at least approximately at the focal point of said at least one holographic optical element for deflecting a beam of light through an angular range to produce a continuum of beams diverging toward the at least one holographic optical element so that the diverging beams are received thereby in the angular range; and

said at least one holographic optical element comprising means for deflecting the diverging beams at all angles in the angular range, such that the diverging beams are deflected by diffraction in one direction, thereby to obtain a telecentric light beam, wherein the at least one holographic optical element includes a flat holographic element formed on a prism as a carrier, whereby the prism is adapted for deflecting the diffracted light beams from the one direction into another direction.

2. A device according to claim 1, wherein said at least one holographic optical element, comprises a first holographic element, further comprising a second holographic optical element and a photoelectric transducer, said second holographic optical element serving as a collecting lens for projecting the telecentric beam onto said photo-electric transducer.

3. A device according to claim 2, wherein said first and second holographic optical elements are respectively inclined to a first optical plane of the diverging beams and a second optical plane of the telecentric beam deflected by said first holographic optical element in such a manner that the second plane is perpendicular to the first plane and to a third plane in which the telecentric beam lies after issung from said second holographic optical element.

4. A device as claimed in claim 3, wherein said first and second holographic optical elements are respectively inclined at 45°

to said first and second optical planes.

5. A process for the production of a telecentric light beam, comprising the step of:

deflecting a beam of light through an angular range at the focal point of at least one holographic optical element, to produce continuum of beams diverging toward the at least one holographic optical element so that the diverging beams are received thereby in the angular range; and

for all angles of the diverging beams in the angular range, deflecting the diverging beams with the at least one holographic optical element, such that the diverging beams are deflected by diffraction in one direction, thereby to obtain a telecentric light beam, wherein in addition to the telecentric light beam diffracted by the at least one holographic optical element a further light beam of a different order of diffraction is deflected by the at least one holographic optical element and is utilized for auxiliary functions.

6. A process as claimed in claim 5, wherein the telecentric light beam is of the first order of diffraction and the further light beam is of zero order.

7. A process according to claim 5, wherein the light beam of a different order of diffraction is projected onto at least one electro-optic transducer in order to detect the movement of the telecentric beam without influencing the telecentric beam.

8. A process as in claim 5, further comprising the steps of detecting the further light beam and the respective portions of the telecentric light beam originating at corresponding angles of the diverging beams, so that the angles of the corresponding diverging beams may be referenced to the angle of a diverging beam detected contemporaneously with detection of the further light beam.

9. A process for the production of a telecentric light beam, comprising the steps of:

deflecting a beam of light through an angular range at the focal point of at least one holographic optical element, to produce a continuum of beams diverging toward the at least one holographic optical element so that the diverging beams are received thereby in the angular range; and

for all angles of the diverging beams in the angular range, deflecting the diverging beams with the at least one holographic optical element, such that the diverging beams are deflected by diffraction in one direction, thereby to obtain a telecentric light beam, wherein the at least one holographic optical element comprises first and second holographic optical elements, said step of deflecting the diverging beams with at least one holographic optical element including the step of deflecting the diverging beams with the first holographic optical element onto the second holographic optical element and deflecting the beam deflected by the first holographic optical element with the second holographic optical element such that the telecentric light beam is formed in a single plane and such that the distance measured in the plane in a direction perpendicular to the one direction between portions of the telecentric light beam originating at any two spaced apart angles in the diverging beams is linearly related to the difference between the two angles.

10. A process for the production of a telecentric light beam, comprising the step of:

deflecting a beam of light through an angular range at the focal point of at least one holographic optical element, to produce a continuum of beams diverging toward the at least one holographic optical element so that the diverging beams are received thereby in the angular range; and

for all angles of the diverging beams in the angular range, deflecting the diverging beams with the at least one holographic optical element, such that the diverging beams are deflected by diffraction in one direction, thereby to obtain a telecentric light beam, wherein the at least one holographic optical element comprises a single curved holographic optical element, the step of deflecting the diverging beams with at least one holographic optical element including the step of deflecting the diverging beam with the curved holographic optical element such that the telecentric light beam is formed in a single plane and such that the distance measured in the plane in a direction perpendicular to the one direction between portions of the telecentric light beam originating at any two spaced apart angles in the diverging beams is linearly related to the difference between the two angles.