Bar code remote recognition system for process carriers of wafer disks

• US 4,833,306 A
• Filed: 05/18/1988
• Issued: 05/23/1989
• Est. Priority Date: 05/18/1988
• Status: Expired due to Term

• Current Assignee: Asyst Technologies Incorporated (Azenta, Inc.)
• Original Assignee: Fluoroware, Inc. (Entegris Incorporated)
• Inventors: Milbrett, Lynn
• Primary Examiner(s): Pitts, Harold T.
• Application Number:
  US07/196,132
• Time in Patent Office: 370 Days
• Field of Search: 235/375, 235/462
• US Class Current: 235/375
• CPC Class Codes: G06K 19/02 characterised by the selection of materials, e.g. to avoid wear during transport through the machine
• CPC Class Codes: G07C 3/00 Registering or indicating the condition or the working of machines or other apparatus, other than vehicles
• CPC Class Codes: Y10S 414/14 Wafer cassette transporting

Abstract

A remote recognition system for monitoring the progress of a plurality of batches of semiconductor wafers or memory disks through a series of processing operations based on bar code recognition technology. Each batch is placed in a carrier in which it is transported to various locations where processing operations are performed. Each carrier is provided with an optically visible bar code tag, coded to be responsive to within reading range of a bar code reader unit which transmits a modulated light beam signal to the coded bar code tag and reads and decodes the light beam reflected back and collected by an optical receiver to uniquely identify the carrier that is positioned within range of the reader unit. Information from the reader units to permit monitoring the progress of semiconductor wafer or memory disk batches through multiple processing operations is received by further control apparatus. The novel bar coded carrier for use with this remote recognition system uses a bar code tag encapsulated in an external wall of the carrier, so that the bar code tag is protected from harsh chemical environments encountered by the process carrier while it remains readable by the various bar code reader units.

Claims

1. A method for monitoring the progress of a plurality of batches of disks through a multiplicity of operations at several locations comprising the steps of:

inserting each batch of disks into a process carrier constructed and arranged for supporting the disks in a parallel, axially arranged spaced array;

providing each carrier with an optically visible bar code tag encapsulated in the carrier and constructed, arranged and coded for uniquely identifying the carrier and batch inserted therein;

detecting the presence of each carrier at one of the several locations by operating a multiplicity of limited range bar code reader units, each of which is positioned adjacent to one of the locations, the bar code reader units being constructed and arranged for determining the identification of any coded bar code indicia tag within its detection range; and

monitoring the progress of at least one batch of disks through various locations by updating and storing location information received from the reader units.

2. The invention of claim 1 wherein each of the coded bar code indicia reader units directs a modulated light beam from a laser light source to a bar code tag within its detection range and wherein the bar code tag receives the light beam and returns to an optical receiver a reflected light beam uniquely characteristic of the bar code tag and of the carrier on which it is mounted.

3. The invention of claim 2 wherein the carrier is formed of perfluorinated synthetic resin and the bar code tag is formed of anodized aluminum, polymide synthetic resin, stainless steel, perfluorinated synthetic resin, ceramic or polyester synthetic resin and the bar code tag is attached to a surface of the carrier by hermetic heat sealing under an optically transparent cover of perfluorinated synthetic resin.

4. A system for tracking batches of disks through a plurality of operations comprising:

a plurality of carriers, each of which is adapted for carrying a batch of at least one disk and each of which carrier has encapsulated on the outside surface of a vertical wall an optically visible bar code tag including a unique array of spaced apart parallel lines of varying widths containing data coded in the width and spacing of the lines uniquely identifying a single carrier;

at least one remote recognition bar code reader constructed and arranged for directing a modulated light beam across the bar code in a direction normal to the lines and receiving back a reflective light beam uniquely characteristic of that bar code; and

control means for receiving the output from the bar code readers and providing a control signal indicative of which carrier is within the range of which bar code reader.

5. The invention of claim 4 wherein each of the bar code reader units directs a modulated light beam from a laser light source to a bar code tag within its detection range and wherein the bar code tag receives the light beam and returns a reflected light beam uniquely characteristic of the bar code tag and the carrier upon which it is mounted.

6. The invention of claim 4, wherein the bar code tag is mounted on the carrier by:

inserting the bar code tag in a recess in a surface of the carrier, the recess being constructed and arranged for supporting the bar code tag; and

sealing the bar code tag in the recess with an optically transparent cover means constructed and arranged for covering and sealing the bar code tag.

7. The invention of claim 4, wherein the carrier is formed of perfluorinated synthetic resin and the bar code tag is formed of anodized aluminum, stainless steel, perfluorinated synthetic resin, ceramic, polyester synthetic resin, or polymide synthetic resin and the bar code tag is attached to a flat surface of the carrier by hermetic heat sealing under an optically transparent cover of perfluorinated synthetic resin.

8. A bar coded process carrier constructed and arranged for supporting a batch of at least one disk in a parallel, axially arranged spaced array and provided with an optically visible bar code tag encapsulated within the carrier, the bar code tag constructed, arranged and coded for uniquely identifying the carrier and batch inserted therein.

9. The bar coded process carrier according to claim 8, wherein the bar code tag is encapsulated within the carrier so as to protect the bar code tag from harsh chemical environments normally encountered in disk processing.

10. The bar coded process carrier according to claim 9, wherein the bar code tag substrate is anodized aluminum, stainless steel, perfluorinated synthetic resin, polymide synthetic resin, ceramic or polyester synthetic resin.

11. The bar coded process carrier according to claim 10, wherein the process carrier is formed of perfluorinated synthetic resin and the bar code tag is hermetically heat-sealed to the carrier under an optically transparent cover of perfluorinated synthetic resin.