Vibrational angular rate sensor

• US 4,836,023 A
• Filed: 03/09/1988
• Issued: 06/06/1989
• Est. Priority Date: 03/09/1988
• Status: Expired due to Term

• Current Assignee: Yazaki Corporation
• Original Assignee: Yazaki Corporation
• Inventors: Oikawa, Takahiro
• Primary Examiner(s): Chapman, John
• Application Number:
  US07/165,797
• Time in Patent Office: 454 Days
• Field of Search: 73/505, 73/DIG. 1, 73/DIG. 4, 310/321, 310/351, 310/367
• US Class Current: 73/504.14
• CPC Class Codes: G01C 19/5642 using vibrating bars or beams

Abstract

To increase the quality factor Q of the vibrational angular rate sensor and therefore the sensitivity of the sensor, stabilize the sensor performance, facilitate wiring work, and minimize the sensor, a square pillar shaped vibrator, four vibrator node support pins and an external vibrator support base are all formed integral with each other from a single constant elasticity material block. Further, at least three and preferably four piezoelectric elements are connected to an external circuit via at least three and preferably four separate thin film conductive layers each extending from each piezoelectric element, on and along each vibrator node support pin, to an external vibrator support base.

Claims

1. A vibrational angular rate sensor, comprising:

(a) a vibrator of square pillar shape;

(b) means for node-supporting said vibrator

at two vibration nodes of said vibrator;

(c) means for external support of said vibrator via said vibrator node-supporting means;

(d) said vibrator, said vibrator mode-supporting means, and said vibrator external support means all being formed integral with each other from a single material block;

(e) at least three piezoelectric elements attached to at least three side surfaces of said square pillar shaped vibrator; and

(f) at least three thin film conductive layers each extending along one of said vibrator node-supporting means from one of said at least three piezoelectric elements to said external vibrator supporting means so as to be connectable to an external fine conductive wire.

2. The vibrational angular rate sensor as set forth in claim 1, wherein said external vibrator supporting means is formed into two separate square U shapes.

3. The vibrational angular rate sensor at set forth in claim 1, wherein said external vibrator supporting means is formed into a single Square O shape.

4. The vibrational angular rate sensor as set forth in claim 1, wherein said external vibrator supporting means is formed into a single square C shape.