Process for forming reflective gold coatings

• US 4,837,052 A
• Filed: 05/02/1988
• Issued: 06/06/1989
• Est. Priority Date: 03/03/1986
• Status: Expired due to Fees

• Current Assignee: Applied Materials Incorporated
• Original Assignee: Applied Materials Incorporated
• Inventors: Lorimer, D'Arcy H.
• Primary Examiner(s): Childs, Sadie
• Application Number:
  US07/188,769
• Time in Patent Office: 400 Days
• Field of Search: 427/250, 427/160, 427/376.2, 427/226, 427/125, 427/376.6, 427/376.7, 427/383.3, 427/383.5, 427/385.5, 427/389.7, 427/404, 427/255, 427/255.2, 427/294 , 427/126.5, 427/126.2, 427/255.7, 427/124, 427/407.1, 427/387
• US Class Current: 427/160
• CPC Class Codes: C04B 41/52 Multiple coating or impregnating multiple coating or impregnating with the same composition or with compositions only differing in the concentration of the constituents, is classified as single coating or impregnation
• CPC Class Codes: C23C 14/021 Cleaning or etching treatments
• CPC Class Codes: C23C 14/12 Organic material
• CPC Class Codes: C23C 14/18 on other inorganic substrates
• CPC Class Codes: C23C 14/5806 Thermal treatment
• CPC Class Codes: C23C 28/00 Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D

Abstract

A process for providing a highly reflective, protected gold coating on quartz is disclosed. A thin layer of gold chromium is vapor deposited on the quartz followed by vapor deposition of an essentially pure gold layer, application of a protective polymer overcoat and heating at about 450° F. for 12-16 hours. The gold chromium provides excellent adhesion between the quartz and the reflective layered structure whereas the polymer protects the gold from mechanical abrasion and erosion, for example, for water, and against heat.

Claims

1. A process for forming a high reflectivity, adherent, corrosion-resistant gold-containing layered structure on a quartz base, comprising

vacuum depositing a first, relatively thin layer of gold chromium alloy on the quartz;

vacuum depositing on the first layer a second, relatively thick outer layer consisting essentially of gold for providing high infrared radiation reflectivity to the quartz;

forming a third layer on the second, gold layer the third layer being of polymer material selected from silicone resin and polyimide; and

heating the resulting layered structure to enhance the adhesion of the gold layer via the gold chromium layer to the quartz and to cure the polymer.

2. The process of claim 1 wherein the gold chromium layer is about 500 to 700 Angstroms thick and consists essentially of 5 percent chromium and 95 percent gold, and wherein the second layer is approximately 6,000 to 6,500 Angstroms thick.

3. The process of claim 1 wherein the first layer is about 500 to 700 Angstroms thick and consists essentially of 5 percent chromium and 95 percent gold, wherein the second layer is about 6,000 to 6,500 Angstroms thick, and wherein the third layer is approximately 3 to 4 mils thick.

4. The process of claim 1, 2 or 3 wherein the heating step involves heating the structure in an air ambient at 450°

C. for approximately 12-16 hours.

5. The process of claim 1 wherein the quartz base is configured as a bell jar.