Process for forming lightly-doped-drain (LDD) without extra masking steps

• US 4,843,023 A
• Filed: 06/30/1987
• Issued: 06/27/1989
• Est. Priority Date: 09/25/1985
• Status: Expired due to Fees

• Current Assignee: Hewlett-Packard Company (HP Inc.)
• Original Assignee: Hewlett-Packard Company (HP Inc.)
• Inventors: Hsu, Fu-Chieh, Chiu, Kuang Y.
• Primary Examiner(s): Hearn, Brian E.
• Assistant Examiner(s): Wilczewski, M.
• Application Number:
  US07/065,617
• Time in Patent Office: 728 Days
• Field of Search: 156/643, 357/23.3, 357/23.9, 357/90, 357/91, 437/34, 437/57, 437/41, 437/42, 437/44, 437/30, 437/29, 437/28, 437/27, 437/241, 437/238, 437/233, 427/93
• US Class Current: 438/231
• CPC Class Codes: H01L 21/0337 characterised by the process involved to create the mask, e.g. lift-off masks, sidewalls, or to modify the mask, e.g. pre-treatment, post-treatment
• CPC Class Codes: H01L 21/823864 with a particular manufacturing method of the gate sidewall spacers, e.g. double spacers, particular spacer material or shape
• CPC Class Codes: H01L 29/6656 using multiple spacer layers, e.g. multiple sidewall spacers
• CPC Class Codes: H01L 29/6659 with both lightly doped source and drain extensions and source and drain self-aligned to the sides of the gate, e.g. lightly doped drain [LDD] MOSFET, double diffused drain [DDD] MOSFET
• CPC Class Codes: H01L 29/78 with field effect produced by an insulated gate H01L29/7725, H01L29/775, H01L29/778 take precedence

Abstract

A new lightly doped drain (LDD) process which does not required extra masking steps as compared to the conventional CMOS process is presented. By employing a new two layer side wall spacer technology, the LDD ion implantation for n-channel and p-channel devices can be carried out by sharing the n⁺ or p⁺ source and drain ion implantation mask. This approach provides maximum flexibility in designing optimum n^- and p^- channel LDD MOSFETs without using any additional mask steps other than the conventional CMOS mask levels. This process is also compatible with self-aligned silicide process.

Claims

1. A method of producing a plurality of lightly doped drain MOS transistors of different polarities on a single substrate, the method comprising:

(a) forming a plurality of gates on a surface of a single semiconductor substrate, selected ones of the gates defining first polarity areas and the remainder of the gates defining second polarity areas;

(b) covering top and side portions of said gates and portions of said surface of said substrate with an etch-stop layer comprising a silicon nitride;

(c) covering said etch-stop layer with a polysilicon layer;

(d) selectively removing portions of said polysilicon layer to leave polysilicon sidewalls abutting said etch-stop covered gates;

(e) forming a first ion implantation mask over the first polarity areas,

(f) doping the substrate using as masks the gates and abutting sidewalls in the second polarity areas and the first ion implantation mask to form self-aligned second polarity main source and drain regions in the second polarity areas;

(g) removing the sidewalls abutting the gates in the second polarity areas;

(h) relatively lightly doping the substrate using as masks the gates in the second polarity areas and the first implantation mask to form self-aligned, lightly doped second polarity source and drain regions which contact said main source and drain regions, respectively, whereby a portion of the substrate extending between each gate and its associated lightly doped source and drain reigons defines a channel region, each such gate and its associated source and drain regions defining a transistor of the second polarity;

(i) removing the first ion implantation mask;

(j) forming a second ion implantation mask over the second polarity areas,

(k) doping the substrate using as masks the gates and abutting sidewalls in the first polarity areas and the second ion implantation mask to form self-aligned first polarity main source and drain regions in the first polarity areas;

(l) removing the sidewalls abutting the gates in the first polarity areas;

(m) relatively lightly doping the substrate using as masks the gates in the first polarity areas and the second implantation mask to form self-aligned, lightly doped first polarity source and drain regions which contact said first polarity main source and drain regions, respectively, whereby a portion of the substrate extending between each gate and its associated lightly doped first polarity source and drain regions defines a channel region, each such gate and its associated source and drain regions defining a transistor of the first polarity; and

(n) removing the second ion implantation mask.

2. A method as recited in claim 1 further comprising the step of forming a protective layer over top and side portions said gate and over said surface of said substrate before covering said gate and substrate with said etch-stop layer.

3. A method as recited in claim 1 wherein the step for removing portions of said polysilicon layer includes using said etch-stop layer to control said etching.

4. A method as recited in claim 1 wherein the step for removing portions of said polysilicon layer includes using an antisotropic etching process.

5. A method as recited in claim 1 wherein the step for removing said sidewalls includes a wet etching process.

6. A method as recited in claim 1 further comprising the step of adjusting the thickness of said polysilicon layer to vary the overlap of said gate with said lightly-doped source and drain regions.