Membrane with perforations, method for producing such a membrane and separating device comprising one or more of such membranes

• US 4,844,778 A
• Filed: 12/21/1987
• Issued: 07/04/1989
• Est. Priority Date: 12/23/1986
• Status: Expired due to Term

• Current Assignee: Stork VECO BV Karel V Gelreweg 22 6961 LB Eerbeek The Netherlands
• Original Assignee: Stork Veco B.V.
• Inventors: Witte, Johan F.
• Primary Examiner(s): TUFARIELLO, THOMAS
• Application Number:
  US07/135,343
• Time in Patent Office: 561 Days
• Field of Search: 204/11
• US Class Current: 205/75
• CPC Class Codes: B01D 2325/26 Electrical properties
• CPC Class Codes: B01D 67/0062 by micromachining techniques, e.g. using masking and etching steps, photolithography
• CPC Class Codes: B01D 67/0069 by deposition from the liquid phase, e.g. electrochemical deposition B01D67/0046 takes precedence
• CPC Class Codes: B01D 71/02 Inorganic material
• CPC Class Codes: B01D 71/0215 Silicon carbide; Silicon nitride; Silicon oxycarbide
• CPC Class Codes: C25D 1/08 Perforated or foraminous objects, e.g. sieves C25D1/10 takes precedence

Abstract

Described, is a membrane and its method of manufacturing which membrane is an electroformed metal foil having areas of high perforation density (higher than 150000/cm²) and unperforated areas and in particular also unperforated areas having greater thickness than the other areas.

The membrane is produced in a process comprising a two step photolithographic procedure in which canals formed in the first photolithographic step are used to ensure good vacuum contact during the second photolitographic step in which the high density pattern is formed in the photolacquer used.

The invention also relates to a separation device incorporating one or more membranes according to the invention.

Claims

1. Membrane for separating media containing several constituents which is a foil having a plurality of symmetrically shaped perforations, said foil consisting entirely of electroformed metal of uniform thickness, the perforations being arranged in a predetermined regular pattern forming a plurality of regions each having all the same desired perforation density, the perforation density being at least 150,000 perforations/cm², and in which the remaining regions of the foil includes an unperforated area between at least two perforation regions.

2. Membrane according to claim 1, wherein the unperforated regions of said membrane carry electroformed metal thereby to cause such unperforated regions to have a greater thickness than the regions in which the perforation density has the desired value.

3. Membrane according to claim 1, wherein said membrane consists essentially of nickel.

4. Membrane according to claim 1, wherein said membrane further comprises on its outside surface, a corrosion or wear-resistant coating.

5. Membrane according to claim 4, wherein the coating is selected from the group consisting of as chromium, cobalt/nickel, B-nickel, P-nickel, tin-nickel, titanium nitride, silicon carbide, silicon dioxide, noble metals and alloys thereof.

6. Membrane according to claim 1, wherein said membrane has a surface area exceeding 0.07 cm².

12. Device for separation of a medium containing several constituents comprising at least a housing, medium feeding and withdrawal means and means for mounting at least one membrane and a mounted membrane according to claim 1.

13. Device for separation of a medium containing several constituents comprising at least a housing, medium feeding and withdrawal means and means for mounting at least one membrane and a mounted membrane according to claim 2.

14. Device for separation of a medium containing several constituents comprising at least a housing, medium feeding and withdrawal means and means for mounting at least one membrane and a mounted membrane according to claim 3.

16. Device for separation of a medium containing several constituents comprising at least a housing, medium feeding and withdrawal means and means for mounting at least one membrane and a mounted membrane according to claim 1 wherein the unperforated regions of said membrane carry electroformed metal thereby to cause such unperforated regions to have a greater thickness than the regions in which the perforation density has the desired value and in which the foil has a thickness which is insufficient to make the membrane self-supporting and the thickness of the electroformed metal on the unperforated regions is sufficient to make the resulting membrane self-supporting and in which said foil is a nickel foil and in which said membrane further comprises on its outside surface, a corrosion or wear-resistant coating.

17. Membrane according to claim 2 in which the foil has a thickness which is insufficient to make the membrane self-supporting and the thickness of the electroformed metal on the unperforated regions is sufficient to make the resulting membrane self-supporting.

18. Membrane according to claim 17 in which said foil is a nickel foil.

19. Membrane according to claim 18 wherein said membrane further comprises on its outside surface, a corrosion or wear-resistant coating.

7. Method for producing a membrane having a perforation density in a plurality of predetermined areas of at least 150000/cm²,

wherein, in a first step, a photoresist pattern, the resist-free regions of which correspond to the unperforated regions to be present in the finished membrane, is formed on an electrically conducting substrate by coating with photo-resist, exposure using a suitable film and development;

wherein a subsequent exposure and development is then carried out using a mask suitable for the purpose and, making use of vacuum contact and a suitable light source, whereby a pattern is formed in the photoresist regions left behind after the first step, the uncoated areas in said pattern corresponding to the metal between the perforations in the regions of the finished membrane where the perforation density has the desired value;

wherein the substrate thus provided with a composite photoresist pattern is subjected to an electroplating operation for depositing metal on all the uncoated regions; and

wherein the metal deposit thus formed is removed.

8. Method according to claim 7, wherein, prior to the removal of the metal deposit formed, a new photoresist layer is provided on top of the photoresist pattern and formed metal deposit, which is exposed in a manner such that, after development, at least a part of the unperforated regions of the metal deposit is uncoated, after which said regions are coated with a relatively thick metal layer in an additional electroplating operation.

9. Method according to claim 7, wherein the formed metal deposit is provided with a corrosion-or wear-resistant coating which is selected from the group consisting of chromium, cobalt/nickel, B-nickel, P-nickel, tin-nickel, titanium nitride, silicon carbide, silicon dioxide, noble metals and alloys of noble metals.

10. Method according to claim 7, wherein several electrically conducting substrates is mounted on an electrically conducting parent body during the various electroplating operations.

11. Method according to claim 10, wherein the electrically conducting substrates and the electrically conducting parent body are flat.

20. Method according to claim 10, wherein the electrically conducting substrates and the electrically conductive parent body are cylindrical.

15. Device for separation of a medium containing several constituents comprising at least a housing, medium feeding and withdrawal means and means for mounting at least one membrane and a mounted membrane according to 1 wherein the unperforated regions of said membrane carry electroformed metal thereby to cause such unperforated regions to have a greater thickness than the regions in which the perforation density has the desired value and in which the foil has a thickness which is insufficient to make the membrane self-supporting and the thickness of the electroformed metal on the unperforated regions is sufficient to make the resulting membrane self-supporting.